3/9/2011	1:28:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	1:28:35 AM	Recipe started at 1:28 AM
3/9/2011	1:28:35 AM	H2 valve closed
3/9/2011	1:28:35 AM	BCl3 valve closed
3/9/2011	1:28:35 AM	PH3 valve closed
3/9/2011	1:28:35 AM	SiCl4 pre valve closed
3/9/2011	1:28:35 AM	SiCl4 post valve closed
3/9/2011	1:28:35 AM	Main Vac valve closed
3/9/2011	1:28:35 AM	Bypass valve closed
3/9/2011	1:28:35 AM	Bubbler valve closed
3/9/2011	1:28:35 AM	Helium valve opened
3/9/2011	1:28:35 AM	Helium MFC set to  500.000000
3/9/2011	1:28:35 AM	H2 MFC set to  0.000000
3/9/2011	1:28:35 AM	BCl3 MFC set to  0.000000
3/9/2011	1:28:35 AM	PHl3 MFC set to  0.000000
3/9/2011	1:28:35 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:28:35 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:28:35 AM	Tube furnace set to 0
3/9/2011	1:28:40 AM	Helium valve closed
3/9/2011	1:28:40 AM	H2 valve closed
3/9/2011	1:28:40 AM	BCl3 valve closed
3/9/2011	1:28:40 AM	PH3 valve closed
3/9/2011	1:28:40 AM	SiCl4 pre valve closed
3/9/2011	1:28:40 AM	SiCl4 post valve closed
3/9/2011	1:28:40 AM	Main Vac valve closed
3/9/2011	1:28:40 AM	Bypass valve closed
3/9/2011	1:28:40 AM	Bubbler valve closed
3/9/2011	1:28:40 AM	Helium MFC set to  0.000000
3/9/2011	1:28:40 AM	H2 MFC set to  0.000000
3/9/2011	1:28:40 AM	BCl3 MFC set to  0.000000
3/9/2011	1:28:40 AM	PHl3 MFC set to  0.000000
3/9/2011	1:28:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:28:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:28:41 AM	Tube furnace set to 0
3/9/2011	1:28:41 AM	Run finished at 1:28 AM
3/9/2011	1:28:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	1:32:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	1:32:35 AM	Recipe started at 1:32 AM
3/9/2011	1:32:35 AM	Helium valve closed
3/9/2011	1:32:35 AM	H2 valve closed
3/9/2011	1:32:35 AM	BCl3 valve closed
3/9/2011	1:32:35 AM	PH3 valve closed
3/9/2011	1:32:35 AM	SiCl4 pre valve closed
3/9/2011	1:32:35 AM	SiCl4 post valve closed
3/9/2011	1:32:35 AM	Main Vac valve closed
3/9/2011	1:32:35 AM	Bubbler valve closed
3/9/2011	1:32:35 AM	Bypass valve opened
3/9/2011	1:32:35 AM	Helium MFC set to  0.000000
3/9/2011	1:32:35 AM	H2 MFC set to  0.000000
3/9/2011	1:32:35 AM	BCl3 MFC set to  0.000000
3/9/2011	1:32:35 AM	PHl3 MFC set to  0.000000
3/9/2011	1:32:35 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:32:35 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:32:35 AM	Tube furnace set to 0
3/9/2011	1:33:07 AM	Helium valve closed
3/9/2011	1:33:07 AM	H2 valve closed
3/9/2011	1:33:07 AM	BCl3 valve closed
3/9/2011	1:33:07 AM	PH3 valve closed
3/9/2011	1:33:07 AM	SiCl4 pre valve closed
3/9/2011	1:33:07 AM	SiCl4 post valve closed
3/9/2011	1:33:07 AM	Bubbler valve closed
3/9/2011	1:33:07 AM	Main Vac valve opened
3/9/2011	1:33:07 AM	Bypass valve opened
3/9/2011	1:33:07 AM	Helium MFC set to  0.000000
3/9/2011	1:33:07 AM	H2 MFC set to  0.000000
3/9/2011	1:33:07 AM	BCl3 MFC set to  0.000000
3/9/2011	1:33:07 AM	PHl3 MFC set to  0.000000
3/9/2011	1:33:07 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:33:07 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:33:07 AM	Tube furnace set to 0
3/9/2011	1:33:07 AM	Run finished at 1:33 AM
3/9/2011	1:33:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	1:33:26 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	1:33:38 AM	Recipe started at 1:33 AM
3/9/2011	1:33:38 AM	Helium valve closed
3/9/2011	1:33:38 AM	H2 valve closed
3/9/2011	1:33:38 AM	BCl3 valve closed
3/9/2011	1:33:38 AM	PH3 valve closed
3/9/2011	1:33:38 AM	SiCl4 pre valve closed
3/9/2011	1:33:38 AM	SiCl4 post valve closed
3/9/2011	1:33:38 AM	Main Vac valve closed
3/9/2011	1:33:38 AM	Bubbler valve closed
3/9/2011	1:33:38 AM	Bypass valve opened
3/9/2011	1:33:38 AM	Helium MFC set to  0.000000
3/9/2011	1:33:38 AM	H2 MFC set to  0.000000
3/9/2011	1:33:38 AM	BCl3 MFC set to  0.000000
3/9/2011	1:33:38 AM	PHl3 MFC set to  0.000000
3/9/2011	1:33:38 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:33:38 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:33:38 AM	Tube furnace set to 0
3/9/2011	1:33:38 AM	Helium valve closed
3/9/2011	1:33:38 AM	H2 valve closed
3/9/2011	1:33:38 AM	BCl3 valve closed
3/9/2011	1:33:38 AM	PH3 valve closed
3/9/2011	1:33:38 AM	SiCl4 pre valve closed
3/9/2011	1:33:38 AM	SiCl4 post valve closed
3/9/2011	1:33:38 AM	Bubbler valve closed
3/9/2011	1:33:38 AM	Main Vac valve opened
3/9/2011	1:33:38 AM	Bypass valve opened
3/9/2011	1:33:38 AM	Helium MFC set to  0.000000
3/9/2011	1:33:38 AM	H2 MFC set to  0.000000
3/9/2011	1:33:38 AM	BCl3 MFC set to  0.000000
3/9/2011	1:33:38 AM	PHl3 MFC set to  0.000000
3/9/2011	1:33:38 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:33:38 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:33:38 AM	Tube furnace set to 0
3/9/2011	1:34:39 AM	H2 valve closed
3/9/2011	1:34:39 AM	BCl3 valve closed
3/9/2011	1:34:39 AM	PH3 valve closed
3/9/2011	1:34:39 AM	SiCl4 pre valve closed
3/9/2011	1:34:39 AM	SiCl4 post valve closed
3/9/2011	1:34:39 AM	Bubbler valve closed
3/9/2011	1:34:39 AM	Helium valve opened
3/9/2011	1:34:39 AM	Main Vac valve opened
3/9/2011	1:34:39 AM	Bypass valve opened
3/9/2011	1:34:39 AM	Helium MFC set to  100.000000
3/9/2011	1:34:39 AM	H2 MFC set to  0.000000
3/9/2011	1:34:39 AM	BCl3 MFC set to  0.000000
3/9/2011	1:34:39 AM	PHl3 MFC set to  0.000000
3/9/2011	1:34:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:34:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:34:39 AM	Tube furnace set to 0
3/9/2011	1:35:39 AM	Helium valve closed
3/9/2011	1:35:39 AM	H2 valve closed
3/9/2011	1:35:39 AM	BCl3 valve closed
3/9/2011	1:35:39 AM	PH3 valve closed
3/9/2011	1:35:39 AM	SiCl4 pre valve closed
3/9/2011	1:35:39 AM	SiCl4 post valve closed
3/9/2011	1:35:39 AM	Bubbler valve closed
3/9/2011	1:35:39 AM	Main Vac valve opened
3/9/2011	1:35:39 AM	Bypass valve opened
3/9/2011	1:35:39 AM	Helium MFC set to  0.000000
3/9/2011	1:35:39 AM	H2 MFC set to  0.000000
3/9/2011	1:35:39 AM	BCl3 MFC set to  0.000000
3/9/2011	1:35:39 AM	PHl3 MFC set to  0.000000
3/9/2011	1:35:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:35:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:35:39 AM	Tube furnace set to 0
3/9/2011	1:36:39 AM	H2 valve closed
3/9/2011	1:36:39 AM	BCl3 valve closed
3/9/2011	1:36:39 AM	PH3 valve closed
3/9/2011	1:36:39 AM	SiCl4 pre valve closed
3/9/2011	1:36:39 AM	SiCl4 post valve closed
3/9/2011	1:36:39 AM	Bubbler valve closed
3/9/2011	1:36:39 AM	Helium valve opened
3/9/2011	1:36:39 AM	Main Vac valve opened
3/9/2011	1:36:39 AM	Bypass valve opened
3/9/2011	1:36:39 AM	Helium MFC set to  100.000000
3/9/2011	1:36:39 AM	H2 MFC set to  0.000000
3/9/2011	1:36:39 AM	BCl3 MFC set to  0.000000
3/9/2011	1:36:39 AM	PHl3 MFC set to  0.000000
3/9/2011	1:36:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:36:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:36:39 AM	Tube furnace set to 0
3/9/2011	1:37:39 AM	Helium valve closed
3/9/2011	1:37:39 AM	H2 valve closed
3/9/2011	1:37:39 AM	BCl3 valve closed
3/9/2011	1:37:39 AM	PH3 valve closed
3/9/2011	1:37:39 AM	SiCl4 pre valve closed
3/9/2011	1:37:39 AM	SiCl4 post valve closed
3/9/2011	1:37:39 AM	Bubbler valve closed
3/9/2011	1:37:39 AM	Main Vac valve opened
3/9/2011	1:37:39 AM	Bypass valve opened
3/9/2011	1:37:39 AM	Helium MFC set to  0.000000
3/9/2011	1:37:39 AM	H2 MFC set to  0.000000
3/9/2011	1:37:39 AM	BCl3 MFC set to  0.000000
3/9/2011	1:37:39 AM	PHl3 MFC set to  0.000000
3/9/2011	1:37:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:37:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:37:39 AM	Tube furnace set to 0
3/9/2011	1:38:39 AM	H2 valve closed
3/9/2011	1:38:39 AM	BCl3 valve closed
3/9/2011	1:38:39 AM	PH3 valve closed
3/9/2011	1:38:39 AM	SiCl4 pre valve closed
3/9/2011	1:38:39 AM	SiCl4 post valve closed
3/9/2011	1:38:39 AM	Bubbler valve closed
3/9/2011	1:38:39 AM	Helium valve opened
3/9/2011	1:38:39 AM	Main Vac valve opened
3/9/2011	1:38:39 AM	Bypass valve opened
3/9/2011	1:38:39 AM	Helium MFC set to  100.000000
3/9/2011	1:38:39 AM	H2 MFC set to  0.000000
3/9/2011	1:38:39 AM	BCl3 MFC set to  0.000000
3/9/2011	1:38:39 AM	PHl3 MFC set to  0.000000
3/9/2011	1:38:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:38:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:38:40 AM	Tube furnace set to 0
3/9/2011	1:39:40 AM	Helium valve closed
3/9/2011	1:39:40 AM	H2 valve closed
3/9/2011	1:39:40 AM	BCl3 valve closed
3/9/2011	1:39:40 AM	PH3 valve closed
3/9/2011	1:39:40 AM	SiCl4 pre valve closed
3/9/2011	1:39:40 AM	SiCl4 post valve closed
3/9/2011	1:39:40 AM	Bubbler valve closed
3/9/2011	1:39:40 AM	Main Vac valve opened
3/9/2011	1:39:40 AM	Bypass valve opened
3/9/2011	1:39:40 AM	Helium MFC set to  0.000000
3/9/2011	1:39:40 AM	H2 MFC set to  0.000000
3/9/2011	1:39:40 AM	BCl3 MFC set to  0.000000
3/9/2011	1:39:40 AM	PHl3 MFC set to  0.000000
3/9/2011	1:39:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:39:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:39:40 AM	Tube furnace set to 0
3/9/2011	1:40:40 AM	H2 valve closed
3/9/2011	1:40:40 AM	BCl3 valve closed
3/9/2011	1:40:40 AM	PH3 valve closed
3/9/2011	1:40:40 AM	SiCl4 pre valve closed
3/9/2011	1:40:40 AM	SiCl4 post valve closed
3/9/2011	1:40:40 AM	Bubbler valve closed
3/9/2011	1:40:40 AM	Helium valve opened
3/9/2011	1:40:40 AM	Main Vac valve opened
3/9/2011	1:40:40 AM	Bypass valve opened
3/9/2011	1:40:40 AM	Helium MFC set to  100.000000
3/9/2011	1:40:40 AM	H2 MFC set to  0.000000
3/9/2011	1:40:40 AM	BCl3 MFC set to  0.000000
3/9/2011	1:40:40 AM	PHl3 MFC set to  0.000000
3/9/2011	1:40:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:40:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:40:40 AM	Tube furnace set to 0
3/9/2011	1:41:40 AM	Helium valve closed
3/9/2011	1:41:40 AM	H2 valve closed
3/9/2011	1:41:40 AM	BCl3 valve closed
3/9/2011	1:41:40 AM	PH3 valve closed
3/9/2011	1:41:40 AM	SiCl4 pre valve closed
3/9/2011	1:41:40 AM	SiCl4 post valve closed
3/9/2011	1:41:40 AM	Bubbler valve closed
3/9/2011	1:41:40 AM	Main Vac valve opened
3/9/2011	1:41:40 AM	Bypass valve opened
3/9/2011	1:41:40 AM	Helium MFC set to  0.000000
3/9/2011	1:41:40 AM	H2 MFC set to  0.000000
3/9/2011	1:41:40 AM	BCl3 MFC set to  0.000000
3/9/2011	1:41:40 AM	PHl3 MFC set to  0.000000
3/9/2011	1:41:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:41:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:41:40 AM	Tube furnace set to 0
3/9/2011	1:42:40 AM	H2 valve closed
3/9/2011	1:42:40 AM	BCl3 valve closed
3/9/2011	1:42:40 AM	PH3 valve closed
3/9/2011	1:42:40 AM	SiCl4 pre valve closed
3/9/2011	1:42:40 AM	SiCl4 post valve closed
3/9/2011	1:42:40 AM	Bubbler valve closed
3/9/2011	1:42:40 AM	Helium valve opened
3/9/2011	1:42:40 AM	Main Vac valve opened
3/9/2011	1:42:40 AM	Bypass valve opened
3/9/2011	1:42:40 AM	Helium MFC set to  100.000000
3/9/2011	1:42:40 AM	H2 MFC set to  0.000000
3/9/2011	1:42:40 AM	BCl3 MFC set to  0.000000
3/9/2011	1:42:40 AM	PHl3 MFC set to  0.000000
3/9/2011	1:42:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:42:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:42:40 AM	Tube furnace set to 0
3/9/2011	1:43:40 AM	Helium valve closed
3/9/2011	1:43:40 AM	H2 valve closed
3/9/2011	1:43:40 AM	BCl3 valve closed
3/9/2011	1:43:40 AM	PH3 valve closed
3/9/2011	1:43:40 AM	SiCl4 pre valve closed
3/9/2011	1:43:40 AM	SiCl4 post valve closed
3/9/2011	1:43:40 AM	Bubbler valve closed
3/9/2011	1:43:40 AM	Main Vac valve opened
3/9/2011	1:43:40 AM	Bypass valve opened
3/9/2011	1:43:40 AM	Helium MFC set to  0.000000
3/9/2011	1:43:40 AM	H2 MFC set to  0.000000
3/9/2011	1:43:40 AM	BCl3 MFC set to  0.000000
3/9/2011	1:43:40 AM	PHl3 MFC set to  0.000000
3/9/2011	1:43:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:43:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:43:41 AM	Tube furnace set to 0
3/9/2011	1:44:41 AM	H2 valve closed
3/9/2011	1:44:41 AM	BCl3 valve closed
3/9/2011	1:44:41 AM	PH3 valve closed
3/9/2011	1:44:41 AM	SiCl4 pre valve closed
3/9/2011	1:44:41 AM	SiCl4 post valve closed
3/9/2011	1:44:41 AM	Bubbler valve closed
3/9/2011	1:44:41 AM	Helium valve opened
3/9/2011	1:44:41 AM	Main Vac valve opened
3/9/2011	1:44:41 AM	Bypass valve opened
3/9/2011	1:44:41 AM	Helium MFC set to  100.000000
3/9/2011	1:44:41 AM	H2 MFC set to  0.000000
3/9/2011	1:44:41 AM	BCl3 MFC set to  0.000000
3/9/2011	1:44:41 AM	PHl3 MFC set to  0.000000
3/9/2011	1:44:41 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:44:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:44:41 AM	Tube furnace set to 0
3/9/2011	1:45:41 AM	Helium valve closed
3/9/2011	1:45:41 AM	H2 valve closed
3/9/2011	1:45:41 AM	BCl3 valve closed
3/9/2011	1:45:41 AM	PH3 valve closed
3/9/2011	1:45:41 AM	SiCl4 pre valve closed
3/9/2011	1:45:41 AM	SiCl4 post valve closed
3/9/2011	1:45:41 AM	Bubbler valve closed
3/9/2011	1:45:41 AM	Main Vac valve opened
3/9/2011	1:45:41 AM	Bypass valve opened
3/9/2011	1:45:41 AM	Helium MFC set to  0.000000
3/9/2011	1:45:41 AM	H2 MFC set to  0.000000
3/9/2011	1:45:41 AM	BCl3 MFC set to  0.000000
3/9/2011	1:45:41 AM	PHl3 MFC set to  0.000000
3/9/2011	1:45:41 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:45:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:45:41 AM	Tube furnace set to 0
3/9/2011	1:46:41 AM	H2 valve closed
3/9/2011	1:46:41 AM	BCl3 valve closed
3/9/2011	1:46:41 AM	PH3 valve closed
3/9/2011	1:46:41 AM	SiCl4 pre valve closed
3/9/2011	1:46:41 AM	SiCl4 post valve closed
3/9/2011	1:46:41 AM	Bubbler valve closed
3/9/2011	1:46:41 AM	Helium valve opened
3/9/2011	1:46:41 AM	Main Vac valve opened
3/9/2011	1:46:41 AM	Bypass valve opened
3/9/2011	1:46:41 AM	Helium MFC set to  100.000000
3/9/2011	1:46:41 AM	H2 MFC set to  0.000000
3/9/2011	1:46:41 AM	BCl3 MFC set to  0.000000
3/9/2011	1:46:41 AM	PHl3 MFC set to  0.000000
3/9/2011	1:46:41 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:46:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:46:41 AM	Tube furnace set to 0
3/9/2011	1:47:41 AM	Helium valve closed
3/9/2011	1:47:41 AM	H2 valve closed
3/9/2011	1:47:41 AM	BCl3 valve closed
3/9/2011	1:47:41 AM	PH3 valve closed
3/9/2011	1:47:41 AM	SiCl4 pre valve closed
3/9/2011	1:47:41 AM	SiCl4 post valve closed
3/9/2011	1:47:41 AM	Bubbler valve closed
3/9/2011	1:47:41 AM	Main Vac valve opened
3/9/2011	1:47:41 AM	Bypass valve opened
3/9/2011	1:47:41 AM	Helium MFC set to  0.000000
3/9/2011	1:47:41 AM	H2 MFC set to  0.000000
3/9/2011	1:47:41 AM	BCl3 MFC set to  0.000000
3/9/2011	1:47:41 AM	PHl3 MFC set to  0.000000
3/9/2011	1:47:41 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:47:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:47:41 AM	Tube furnace set to 0
3/9/2011	1:48:41 AM	H2 valve closed
3/9/2011	1:48:41 AM	BCl3 valve closed
3/9/2011	1:48:41 AM	PH3 valve closed
3/9/2011	1:48:41 AM	SiCl4 pre valve closed
3/9/2011	1:48:41 AM	SiCl4 post valve closed
3/9/2011	1:48:41 AM	Bubbler valve closed
3/9/2011	1:48:41 AM	Helium valve opened
3/9/2011	1:48:41 AM	Main Vac valve opened
3/9/2011	1:48:41 AM	Bypass valve opened
3/9/2011	1:48:41 AM	Helium MFC set to  100.000000
3/9/2011	1:48:41 AM	H2 MFC set to  0.000000
3/9/2011	1:48:41 AM	BCl3 MFC set to  0.000000
3/9/2011	1:48:41 AM	PHl3 MFC set to  0.000000
3/9/2011	1:48:41 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:48:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:48:42 AM	Tube furnace set to 0
3/9/2011	1:49:42 AM	Helium valve closed
3/9/2011	1:49:42 AM	H2 valve closed
3/9/2011	1:49:42 AM	BCl3 valve closed
3/9/2011	1:49:42 AM	PH3 valve closed
3/9/2011	1:49:42 AM	SiCl4 pre valve closed
3/9/2011	1:49:42 AM	SiCl4 post valve closed
3/9/2011	1:49:42 AM	Bubbler valve closed
3/9/2011	1:49:42 AM	Main Vac valve opened
3/9/2011	1:49:42 AM	Bypass valve opened
3/9/2011	1:49:42 AM	Helium MFC set to  0.000000
3/9/2011	1:49:42 AM	H2 MFC set to  0.000000
3/9/2011	1:49:42 AM	BCl3 MFC set to  0.000000
3/9/2011	1:49:42 AM	PHl3 MFC set to  0.000000
3/9/2011	1:49:42 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:49:42 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:49:42 AM	Tube furnace set to 0
3/9/2011	1:50:42 AM	H2 valve closed
3/9/2011	1:50:42 AM	BCl3 valve closed
3/9/2011	1:50:42 AM	PH3 valve closed
3/9/2011	1:50:42 AM	SiCl4 pre valve closed
3/9/2011	1:50:42 AM	SiCl4 post valve closed
3/9/2011	1:50:42 AM	Bubbler valve closed
3/9/2011	1:50:42 AM	Helium valve opened
3/9/2011	1:50:42 AM	Main Vac valve opened
3/9/2011	1:50:42 AM	Bypass valve opened
3/9/2011	1:50:42 AM	Helium MFC set to  100.000000
3/9/2011	1:50:42 AM	H2 MFC set to  0.000000
3/9/2011	1:50:42 AM	BCl3 MFC set to  0.000000
3/9/2011	1:50:42 AM	PHl3 MFC set to  0.000000
3/9/2011	1:50:42 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:50:42 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:50:42 AM	Tube furnace set to 0
3/9/2011	1:51:42 AM	Helium valve closed
3/9/2011	1:51:42 AM	H2 valve closed
3/9/2011	1:51:42 AM	BCl3 valve closed
3/9/2011	1:51:42 AM	PH3 valve closed
3/9/2011	1:51:42 AM	SiCl4 pre valve closed
3/9/2011	1:51:42 AM	SiCl4 post valve closed
3/9/2011	1:51:42 AM	Bubbler valve closed
3/9/2011	1:51:42 AM	Main Vac valve opened
3/9/2011	1:51:42 AM	Bypass valve opened
3/9/2011	1:51:42 AM	Helium MFC set to  0.000000
3/9/2011	1:51:42 AM	H2 MFC set to  0.000000
3/9/2011	1:51:42 AM	BCl3 MFC set to  0.000000
3/9/2011	1:51:42 AM	PHl3 MFC set to  0.000000
3/9/2011	1:51:42 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:51:42 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:51:42 AM	Tube furnace set to 0
3/9/2011	1:52:42 AM	H2 valve closed
3/9/2011	1:52:42 AM	BCl3 valve closed
3/9/2011	1:52:42 AM	PH3 valve closed
3/9/2011	1:52:42 AM	SiCl4 pre valve closed
3/9/2011	1:52:42 AM	SiCl4 post valve closed
3/9/2011	1:52:42 AM	Bubbler valve closed
3/9/2011	1:52:42 AM	Helium valve opened
3/9/2011	1:52:42 AM	Main Vac valve opened
3/9/2011	1:52:42 AM	Bypass valve opened
3/9/2011	1:52:42 AM	Helium MFC set to  100.000000
3/9/2011	1:52:42 AM	H2 MFC set to  0.000000
3/9/2011	1:52:42 AM	BCl3 MFC set to  0.000000
3/9/2011	1:52:42 AM	PHl3 MFC set to  0.000000
3/9/2011	1:52:42 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:52:42 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:52:42 AM	Tube furnace set to 0
3/9/2011	1:53:42 AM	Helium valve closed
3/9/2011	1:53:42 AM	H2 valve closed
3/9/2011	1:53:42 AM	BCl3 valve closed
3/9/2011	1:53:42 AM	PH3 valve closed
3/9/2011	1:53:42 AM	SiCl4 pre valve closed
3/9/2011	1:53:42 AM	SiCl4 post valve closed
3/9/2011	1:53:42 AM	Bubbler valve closed
3/9/2011	1:53:42 AM	Main Vac valve opened
3/9/2011	1:53:42 AM	Bypass valve opened
3/9/2011	1:53:42 AM	Helium MFC set to  0.000000
3/9/2011	1:53:42 AM	H2 MFC set to  0.000000
3/9/2011	1:53:42 AM	BCl3 MFC set to  0.000000
3/9/2011	1:53:42 AM	PHl3 MFC set to  0.000000
3/9/2011	1:53:42 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:53:42 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:53:42 AM	Tube furnace set to 0
3/9/2011	1:53:43 AM	Run finished at 1:53 AM
3/9/2011	1:53:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	1:54:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/9/2011	1:54:35 AM	Recipe started at 1:54 AM
3/9/2011	1:54:35 AM	Helium valve closed
3/9/2011	1:54:35 AM	H2 valve closed
3/9/2011	1:54:35 AM	BCl3 valve closed
3/9/2011	1:54:35 AM	PH3 valve closed
3/9/2011	1:54:35 AM	SiCl4 pre valve closed
3/9/2011	1:54:35 AM	SiCl4 post valve closed
3/9/2011	1:54:35 AM	Main Vac valve closed
3/9/2011	1:54:35 AM	Bypass valve closed
3/9/2011	1:54:35 AM	Bubbler valve closed
3/9/2011	1:54:35 AM	Helium MFC set to  0.000000
3/9/2011	1:54:35 AM	H2 MFC set to  0.000000
3/9/2011	1:54:35 AM	BCl3 MFC set to  0.000000
3/9/2011	1:54:35 AM	PHl3 MFC set to  0.000000
3/9/2011	1:54:35 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:54:35 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:54:35 AM	Tube furnace set to 0
3/9/2011	1:54:35 AM	Run finished at 1:54 AM
3/9/2011	1:54:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/9/2011	1:55:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	1:55:03 AM	Recipe started at 1:55 AM
3/9/2011	1:55:03 AM	Helium valve closed
3/9/2011	1:55:03 AM	H2 valve closed
3/9/2011	1:55:03 AM	BCl3 valve closed
3/9/2011	1:55:03 AM	PH3 valve closed
3/9/2011	1:55:03 AM	SiCl4 pre valve closed
3/9/2011	1:55:03 AM	SiCl4 post valve closed
3/9/2011	1:55:03 AM	Main Vac valve closed
3/9/2011	1:55:03 AM	Bubbler valve closed
3/9/2011	1:55:03 AM	Bypass valve opened
3/9/2011	1:55:03 AM	Helium MFC set to  0.000000
3/9/2011	1:55:03 AM	H2 MFC set to  0.000000
3/9/2011	1:55:03 AM	BCl3 MFC set to  0.000000
3/9/2011	1:55:03 AM	PHl3 MFC set to  0.000000
3/9/2011	1:55:03 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:55:03 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:55:03 AM	Tube furnace set to 0
3/9/2011	1:55:04 AM	Helium valve closed
3/9/2011	1:55:04 AM	H2 valve closed
3/9/2011	1:55:04 AM	BCl3 valve closed
3/9/2011	1:55:04 AM	PH3 valve closed
3/9/2011	1:55:04 AM	SiCl4 pre valve closed
3/9/2011	1:55:04 AM	SiCl4 post valve closed
3/9/2011	1:55:04 AM	Bubbler valve closed
3/9/2011	1:55:04 AM	Main Vac valve opened
3/9/2011	1:55:04 AM	Bypass valve opened
3/9/2011	1:55:04 AM	Helium MFC set to  0.000000
3/9/2011	1:55:04 AM	H2 MFC set to  0.000000
3/9/2011	1:55:04 AM	BCl3 MFC set to  0.000000
3/9/2011	1:55:04 AM	PHl3 MFC set to  0.000000
3/9/2011	1:55:04 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:55:04 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:55:04 AM	Tube furnace set to 0
3/9/2011	1:55:04 AM	Run finished at 1:55 AM
3/9/2011	1:55:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	1:55:14 AM	Helium MFC set to  50.000000
3/9/2011	1:55:14 AM	Helium valve opened
3/9/2011	1:55:48 AM	Helium MFC set to  0.000000
3/9/2011	1:55:49 AM	Helium valve closed
3/9/2011	1:56:33 AM	Recipe started at 1:56 AM
3/9/2011	1:56:33 AM	Helium valve closed
3/9/2011	1:56:33 AM	BCl3 valve closed
3/9/2011	1:56:33 AM	PH3 valve closed
3/9/2011	1:56:33 AM	SiCl4 pre valve closed
3/9/2011	1:56:33 AM	SiCl4 post valve closed
3/9/2011	1:56:33 AM	Main Vac valve closed
3/9/2011	1:56:33 AM	Bypass valve closed
3/9/2011	1:56:33 AM	Bubbler valve closed
3/9/2011	1:56:33 AM	H2 valve opened
3/9/2011	1:56:33 AM	Helium MFC set to  0.000000
3/9/2011	1:56:33 AM	H2 MFC set to  500.000000
3/9/2011	1:56:33 AM	BCl3 MFC set to  0.000000
3/9/2011	1:56:33 AM	PHl3 MFC set to  0.000000
3/9/2011	1:56:33 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:56:33 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:56:34 AM	Tube furnace set to 0
3/9/2011	1:57:53 AM	Helium valve closed
3/9/2011	1:57:53 AM	BCl3 valve closed
3/9/2011	1:57:53 AM	PH3 valve closed
3/9/2011	1:57:53 AM	SiCl4 pre valve closed
3/9/2011	1:57:53 AM	SiCl4 post valve closed
3/9/2011	1:57:53 AM	Main Vac valve closed
3/9/2011	1:57:53 AM	Bypass valve closed
3/9/2011	1:57:53 AM	H2 valve opened
3/9/2011	1:57:53 AM	Bubbler valve opened
3/9/2011	1:57:53 AM	Helium MFC set to  0.000000
3/9/2011	1:57:53 AM	H2 MFC set to  500.000000
3/9/2011	1:57:53 AM	BCl3 MFC set to  0.000000
3/9/2011	1:57:53 AM	PHl3 MFC set to  0.000000
3/9/2011	1:57:53 AM	SiCl4 MFC set to  0.000000
3/9/2011	1:57:53 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:57:54 AM	Tube furnace set to 1000
3/9/2011	2:17:54 AM	Helium valve closed
3/9/2011	2:17:54 AM	PH3 valve closed
3/9/2011	2:17:54 AM	Main Vac valve closed
3/9/2011	2:17:54 AM	Bypass valve closed
3/9/2011	2:17:54 AM	H2 valve opened
3/9/2011	2:17:54 AM	BCl3 valve opened
3/9/2011	2:17:54 AM	SiCl4 pre valve opened
3/9/2011	2:17:54 AM	SiCl4 post valve opened
3/9/2011	2:17:54 AM	Bubbler valve opened
3/9/2011	2:17:54 AM	Helium MFC set to  0.000000
3/9/2011	2:17:54 AM	H2 MFC set to  500.000000
3/9/2011	2:17:54 AM	BCl3 MFC set to  3.000000
3/9/2011	2:17:54 AM	PHl3 MFC set to  0.000000
3/9/2011	2:17:54 AM	SiCl4 MFC set to  50.000000
3/9/2011	2:17:54 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:17:54 AM	Tube furnace set to 1000
3/9/2011	2:32:54 AM	H2 valve closed
3/9/2011	2:32:54 AM	BCl3 valve closed
3/9/2011	2:32:54 AM	PH3 valve closed
3/9/2011	2:32:54 AM	SiCl4 pre valve closed
3/9/2011	2:32:54 AM	SiCl4 post valve closed
3/9/2011	2:32:54 AM	Main Vac valve closed
3/9/2011	2:32:54 AM	Bypass valve closed
3/9/2011	2:32:54 AM	Helium valve opened
3/9/2011	2:32:54 AM	Bubbler valve opened
3/9/2011	2:32:54 AM	Helium MFC set to  500.000000
3/9/2011	2:32:54 AM	H2 MFC set to  0.000000
3/9/2011	2:32:54 AM	BCl3 MFC set to  0.000000
3/9/2011	2:32:54 AM	PHl3 MFC set to  0.000000
3/9/2011	2:32:54 AM	SiCl4 MFC set to  0.000000
3/9/2011	2:32:54 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:32:54 AM	Tube furnace set to 0
3/9/2011	2:52:54 AM	Helium valve closed
3/9/2011	2:52:54 AM	H2 valve closed
3/9/2011	2:52:54 AM	BCl3 valve closed
3/9/2011	2:52:54 AM	PH3 valve closed
3/9/2011	2:52:54 AM	SiCl4 pre valve closed
3/9/2011	2:52:54 AM	SiCl4 post valve closed
3/9/2011	2:52:54 AM	Main Vac valve closed
3/9/2011	2:52:54 AM	Bypass valve closed
3/9/2011	2:52:54 AM	Bubbler valve closed
3/9/2011	2:52:54 AM	Helium MFC set to  0.000000
3/9/2011	2:52:54 AM	H2 MFC set to  0.000000
3/9/2011	2:52:54 AM	BCl3 MFC set to  0.000000
3/9/2011	2:52:54 AM	PHl3 MFC set to  0.000000
3/9/2011	2:52:54 AM	SiCl4 MFC set to  0.000000
3/9/2011	2:52:54 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:52:54 AM	Tube furnace set to 0
3/9/2011	2:52:54 AM	Run finished at 2:52 AM
3/9/2011	4:28:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	4:28:04 AM	Recipe started at 4:28 AM
3/9/2011	4:28:04 AM	H2 valve closed
3/9/2011	4:28:04 AM	BCl3 valve closed
3/9/2011	4:28:04 AM	PH3 valve closed
3/9/2011	4:28:04 AM	SiCl4 pre valve closed
3/9/2011	4:28:04 AM	SiCl4 post valve closed
3/9/2011	4:28:04 AM	Main Vac valve closed
3/9/2011	4:28:04 AM	Bypass valve closed
3/9/2011	4:28:04 AM	Bubbler valve closed
3/9/2011	4:28:04 AM	Helium valve opened
3/9/2011	4:28:04 AM	Helium MFC set to  500.000000
3/9/2011	4:28:04 AM	H2 MFC set to  0.000000
3/9/2011	4:28:04 AM	BCl3 MFC set to  0.000000
3/9/2011	4:28:04 AM	PHl3 MFC set to  0.000000
3/9/2011	4:28:04 AM	SiCl4 MFC set to  0.000000
3/9/2011	4:28:04 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:28:04 AM	Tube furnace set to 0
3/9/2011	4:28:08 AM	Helium valve closed
3/9/2011	4:28:08 AM	H2 valve closed
3/9/2011	4:28:08 AM	BCl3 valve closed
3/9/2011	4:28:08 AM	PH3 valve closed
3/9/2011	4:28:08 AM	SiCl4 pre valve closed
3/9/2011	4:28:08 AM	SiCl4 post valve closed
3/9/2011	4:28:08 AM	Main Vac valve closed
3/9/2011	4:28:08 AM	Bypass valve closed
3/9/2011	4:28:08 AM	Bubbler valve closed
3/9/2011	4:28:08 AM	Helium MFC set to  0.000000
3/9/2011	4:28:08 AM	H2 MFC set to  0.000000
3/9/2011	4:28:08 AM	BCl3 MFC set to  0.000000
3/9/2011	4:28:08 AM	PHl3 MFC set to  0.000000
3/9/2011	4:28:08 AM	SiCl4 MFC set to  0.000000
3/9/2011	4:28:08 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:28:09 AM	Tube furnace set to 0
3/9/2011	4:28:09 AM	Run finished at 4:28 AM
3/9/2011	4:28:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	4:31:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	4:31:45 AM	Recipe started at 4:31 AM
3/9/2011	4:31:45 AM	Helium valve closed
3/9/2011	4:31:45 AM	H2 valve closed
3/9/2011	4:31:45 AM	BCl3 valve closed
3/9/2011	4:31:45 AM	PH3 valve closed
3/9/2011	4:31:45 AM	SiCl4 pre valve closed
3/9/2011	4:31:45 AM	SiCl4 post valve closed
3/9/2011	4:31:45 AM	Main Vac valve closed
3/9/2011	4:31:45 AM	Bubbler valve closed
3/9/2011	4:31:45 AM	Bypass valve opened
3/9/2011	4:31:45 AM	Helium MFC set to  0.000000
3/9/2011	4:31:45 AM	H2 MFC set to  0.000000
3/9/2011	4:31:45 AM	BCl3 MFC set to  0.000000
3/9/2011	4:31:45 AM	PHl3 MFC set to  0.000000
3/9/2011	4:31:45 AM	SiCl4 MFC set to  0.000000
3/9/2011	4:31:45 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:31:45 AM	Tube furnace set to 0
3/9/2011	4:32:16 AM	Helium valve closed
3/9/2011	4:32:16 AM	H2 valve closed
3/9/2011	4:32:16 AM	BCl3 valve closed
3/9/2011	4:32:16 AM	PH3 valve closed
3/9/2011	4:32:16 AM	SiCl4 pre valve closed
3/9/2011	4:32:16 AM	SiCl4 post valve closed
3/9/2011	4:32:16 AM	Bubbler valve closed
3/9/2011	4:32:16 AM	Main Vac valve opened
3/9/2011	4:32:16 AM	Bypass valve opened
3/9/2011	4:32:16 AM	Helium MFC set to  0.000000
3/9/2011	4:32:16 AM	H2 MFC set to  0.000000
3/9/2011	4:32:16 AM	BCl3 MFC set to  0.000000
3/9/2011	4:32:16 AM	PHl3 MFC set to  0.000000
3/9/2011	4:32:16 AM	SiCl4 MFC set to  0.000000
3/9/2011	4:32:16 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:32:17 AM	Tube furnace set to 0
3/9/2011	4:32:17 AM	Run finished at 4:32 AM
3/9/2011	4:32:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	10:13:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	10:13:19 AM	Recipe started at 10:13 AM
3/9/2011	10:13:19 AM	H2 valve closed
3/9/2011	10:13:19 AM	BCl3 valve closed
3/9/2011	10:13:19 AM	PH3 valve closed
3/9/2011	10:13:19 AM	SiCl4 pre valve closed
3/9/2011	10:13:19 AM	SiCl4 post valve closed
3/9/2011	10:13:19 AM	Main Vac valve closed
3/9/2011	10:13:19 AM	Bypass valve closed
3/9/2011	10:13:19 AM	Bubbler valve closed
3/9/2011	10:13:19 AM	Helium valve opened
3/9/2011	10:13:19 AM	Helium MFC set to  500.000000
3/9/2011	10:13:19 AM	H2 MFC set to  0.000000
3/9/2011	10:13:19 AM	BCl3 MFC set to  0.000000
3/9/2011	10:13:19 AM	PHl3 MFC set to  0.000000
3/9/2011	10:13:19 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:13:19 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:13:20 AM	Tube furnace set to 0
3/9/2011	10:14:40 AM	Helium valve closed
3/9/2011	10:14:40 AM	H2 valve closed
3/9/2011	10:14:40 AM	BCl3 valve closed
3/9/2011	10:14:40 AM	PH3 valve closed
3/9/2011	10:14:40 AM	SiCl4 pre valve closed
3/9/2011	10:14:40 AM	SiCl4 post valve closed
3/9/2011	10:14:40 AM	Main Vac valve closed
3/9/2011	10:14:40 AM	Bypass valve closed
3/9/2011	10:14:40 AM	Bubbler valve closed
3/9/2011	10:14:40 AM	Helium MFC set to  0.000000
3/9/2011	10:14:40 AM	H2 MFC set to  0.000000
3/9/2011	10:14:40 AM	BCl3 MFC set to  0.000000
3/9/2011	10:14:40 AM	PHl3 MFC set to  0.000000
3/9/2011	10:14:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:14:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:14:40 AM	Tube furnace set to 0
3/9/2011	10:14:40 AM	Run finished at 10:14 AM
3/9/2011	10:14:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	10:23:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	10:23:08 AM	Recipe started at 10:23 AM
3/9/2011	10:23:08 AM	Helium valve closed
3/9/2011	10:23:08 AM	H2 valve closed
3/9/2011	10:23:08 AM	BCl3 valve closed
3/9/2011	10:23:08 AM	PH3 valve closed
3/9/2011	10:23:08 AM	SiCl4 pre valve closed
3/9/2011	10:23:08 AM	SiCl4 post valve closed
3/9/2011	10:23:08 AM	Main Vac valve closed
3/9/2011	10:23:08 AM	Bubbler valve closed
3/9/2011	10:23:08 AM	Bypass valve opened
3/9/2011	10:23:08 AM	Helium MFC set to  0.000000
3/9/2011	10:23:08 AM	H2 MFC set to  0.000000
3/9/2011	10:23:08 AM	BCl3 MFC set to  0.000000
3/9/2011	10:23:08 AM	PHl3 MFC set to  0.000000
3/9/2011	10:23:08 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:23:08 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:23:08 AM	Tube furnace set to 0
3/9/2011	10:23:40 AM	Helium valve closed
3/9/2011	10:23:40 AM	H2 valve closed
3/9/2011	10:23:40 AM	BCl3 valve closed
3/9/2011	10:23:40 AM	PH3 valve closed
3/9/2011	10:23:40 AM	SiCl4 pre valve closed
3/9/2011	10:23:40 AM	SiCl4 post valve closed
3/9/2011	10:23:40 AM	Bubbler valve closed
3/9/2011	10:23:40 AM	Main Vac valve opened
3/9/2011	10:23:40 AM	Bypass valve opened
3/9/2011	10:23:40 AM	Helium MFC set to  0.000000
3/9/2011	10:23:40 AM	H2 MFC set to  0.000000
3/9/2011	10:23:40 AM	BCl3 MFC set to  0.000000
3/9/2011	10:23:40 AM	PHl3 MFC set to  0.000000
3/9/2011	10:23:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:23:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:23:40 AM	Tube furnace set to 0
3/9/2011	10:23:40 AM	Run finished at 10:23 AM
3/9/2011	10:23:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	10:24:43 AM	Tube furnace set to 400
3/9/2011	10:27:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	10:27:36 AM	Recipe started at 10:27 AM
3/9/2011	10:27:36 AM	Helium valve closed
3/9/2011	10:27:36 AM	H2 valve closed
3/9/2011	10:27:36 AM	BCl3 valve closed
3/9/2011	10:27:36 AM	PH3 valve closed
3/9/2011	10:27:36 AM	SiCl4 pre valve closed
3/9/2011	10:27:36 AM	SiCl4 post valve closed
3/9/2011	10:27:36 AM	Main Vac valve closed
3/9/2011	10:27:36 AM	Bubbler valve closed
3/9/2011	10:27:36 AM	Bypass valve opened
3/9/2011	10:27:36 AM	Helium MFC set to  0.000000
3/9/2011	10:27:36 AM	H2 MFC set to  0.000000
3/9/2011	10:27:36 AM	BCl3 MFC set to  0.000000
3/9/2011	10:27:36 AM	PHl3 MFC set to  0.000000
3/9/2011	10:27:36 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:27:36 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:27:36 AM	Tube furnace set to 0
3/9/2011	10:27:36 AM	Helium valve closed
3/9/2011	10:27:36 AM	H2 valve closed
3/9/2011	10:27:36 AM	BCl3 valve closed
3/9/2011	10:27:36 AM	PH3 valve closed
3/9/2011	10:27:36 AM	SiCl4 pre valve closed
3/9/2011	10:27:36 AM	SiCl4 post valve closed
3/9/2011	10:27:36 AM	Bubbler valve closed
3/9/2011	10:27:36 AM	Main Vac valve opened
3/9/2011	10:27:36 AM	Bypass valve opened
3/9/2011	10:27:36 AM	Helium MFC set to  0.000000
3/9/2011	10:27:36 AM	H2 MFC set to  0.000000
3/9/2011	10:27:36 AM	BCl3 MFC set to  0.000000
3/9/2011	10:27:36 AM	PHl3 MFC set to  0.000000
3/9/2011	10:27:36 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:27:36 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:27:36 AM	Tube furnace set to 0
3/9/2011	10:28:36 AM	H2 valve closed
3/9/2011	10:28:36 AM	BCl3 valve closed
3/9/2011	10:28:36 AM	PH3 valve closed
3/9/2011	10:28:36 AM	SiCl4 pre valve closed
3/9/2011	10:28:36 AM	SiCl4 post valve closed
3/9/2011	10:28:36 AM	Bubbler valve closed
3/9/2011	10:28:36 AM	Helium valve opened
3/9/2011	10:28:36 AM	Main Vac valve opened
3/9/2011	10:28:36 AM	Bypass valve opened
3/9/2011	10:28:36 AM	Helium MFC set to  100.000000
3/9/2011	10:28:36 AM	H2 MFC set to  0.000000
3/9/2011	10:28:36 AM	BCl3 MFC set to  0.000000
3/9/2011	10:28:36 AM	PHl3 MFC set to  0.000000
3/9/2011	10:28:36 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:28:36 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:28:37 AM	Tube furnace set to 0
3/9/2011	10:29:37 AM	Helium valve closed
3/9/2011	10:29:37 AM	H2 valve closed
3/9/2011	10:29:37 AM	BCl3 valve closed
3/9/2011	10:29:37 AM	PH3 valve closed
3/9/2011	10:29:37 AM	SiCl4 pre valve closed
3/9/2011	10:29:37 AM	SiCl4 post valve closed
3/9/2011	10:29:37 AM	Bubbler valve closed
3/9/2011	10:29:37 AM	Main Vac valve opened
3/9/2011	10:29:37 AM	Bypass valve opened
3/9/2011	10:29:37 AM	Helium MFC set to  0.000000
3/9/2011	10:29:37 AM	H2 MFC set to  0.000000
3/9/2011	10:29:37 AM	BCl3 MFC set to  0.000000
3/9/2011	10:29:37 AM	PHl3 MFC set to  0.000000
3/9/2011	10:29:37 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:29:37 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:29:37 AM	Tube furnace set to 0
3/9/2011	10:30:37 AM	H2 valve closed
3/9/2011	10:30:37 AM	BCl3 valve closed
3/9/2011	10:30:37 AM	PH3 valve closed
3/9/2011	10:30:37 AM	SiCl4 pre valve closed
3/9/2011	10:30:37 AM	SiCl4 post valve closed
3/9/2011	10:30:37 AM	Bubbler valve closed
3/9/2011	10:30:37 AM	Helium valve opened
3/9/2011	10:30:37 AM	Main Vac valve opened
3/9/2011	10:30:37 AM	Bypass valve opened
3/9/2011	10:30:37 AM	Helium MFC set to  100.000000
3/9/2011	10:30:37 AM	H2 MFC set to  0.000000
3/9/2011	10:30:37 AM	BCl3 MFC set to  0.000000
3/9/2011	10:30:37 AM	PHl3 MFC set to  0.000000
3/9/2011	10:30:37 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:30:37 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:30:37 AM	Tube furnace set to 0
3/9/2011	10:31:37 AM	Helium valve closed
3/9/2011	10:31:37 AM	H2 valve closed
3/9/2011	10:31:37 AM	BCl3 valve closed
3/9/2011	10:31:37 AM	PH3 valve closed
3/9/2011	10:31:37 AM	SiCl4 pre valve closed
3/9/2011	10:31:37 AM	SiCl4 post valve closed
3/9/2011	10:31:37 AM	Bubbler valve closed
3/9/2011	10:31:37 AM	Main Vac valve opened
3/9/2011	10:31:37 AM	Bypass valve opened
3/9/2011	10:31:37 AM	Helium MFC set to  0.000000
3/9/2011	10:31:37 AM	H2 MFC set to  0.000000
3/9/2011	10:31:37 AM	BCl3 MFC set to  0.000000
3/9/2011	10:31:37 AM	PHl3 MFC set to  0.000000
3/9/2011	10:31:37 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:31:37 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:31:37 AM	Tube furnace set to 0
3/9/2011	10:32:37 AM	H2 valve closed
3/9/2011	10:32:37 AM	BCl3 valve closed
3/9/2011	10:32:37 AM	PH3 valve closed
3/9/2011	10:32:37 AM	SiCl4 pre valve closed
3/9/2011	10:32:37 AM	SiCl4 post valve closed
3/9/2011	10:32:37 AM	Bubbler valve closed
3/9/2011	10:32:37 AM	Helium valve opened
3/9/2011	10:32:37 AM	Main Vac valve opened
3/9/2011	10:32:37 AM	Bypass valve opened
3/9/2011	10:32:37 AM	Helium MFC set to  100.000000
3/9/2011	10:32:37 AM	H2 MFC set to  0.000000
3/9/2011	10:32:37 AM	BCl3 MFC set to  0.000000
3/9/2011	10:32:37 AM	PHl3 MFC set to  0.000000
3/9/2011	10:32:37 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:32:37 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:32:37 AM	Tube furnace set to 0
3/9/2011	10:33:37 AM	Helium valve closed
3/9/2011	10:33:37 AM	H2 valve closed
3/9/2011	10:33:37 AM	BCl3 valve closed
3/9/2011	10:33:37 AM	PH3 valve closed
3/9/2011	10:33:37 AM	SiCl4 pre valve closed
3/9/2011	10:33:37 AM	SiCl4 post valve closed
3/9/2011	10:33:37 AM	Bubbler valve closed
3/9/2011	10:33:37 AM	Main Vac valve opened
3/9/2011	10:33:37 AM	Bypass valve opened
3/9/2011	10:33:37 AM	Helium MFC set to  0.000000
3/9/2011	10:33:37 AM	H2 MFC set to  0.000000
3/9/2011	10:33:37 AM	BCl3 MFC set to  0.000000
3/9/2011	10:33:37 AM	PHl3 MFC set to  0.000000
3/9/2011	10:33:37 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:33:37 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:33:38 AM	Tube furnace set to 0
3/9/2011	10:34:38 AM	H2 valve closed
3/9/2011	10:34:38 AM	BCl3 valve closed
3/9/2011	10:34:38 AM	PH3 valve closed
3/9/2011	10:34:38 AM	SiCl4 pre valve closed
3/9/2011	10:34:38 AM	SiCl4 post valve closed
3/9/2011	10:34:38 AM	Bubbler valve closed
3/9/2011	10:34:38 AM	Helium valve opened
3/9/2011	10:34:38 AM	Main Vac valve opened
3/9/2011	10:34:38 AM	Bypass valve opened
3/9/2011	10:34:38 AM	Helium MFC set to  100.000000
3/9/2011	10:34:38 AM	H2 MFC set to  0.000000
3/9/2011	10:34:38 AM	BCl3 MFC set to  0.000000
3/9/2011	10:34:38 AM	PHl3 MFC set to  0.000000
3/9/2011	10:34:38 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:34:38 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:34:38 AM	Tube furnace set to 0
3/9/2011	10:35:38 AM	Helium valve closed
3/9/2011	10:35:38 AM	H2 valve closed
3/9/2011	10:35:38 AM	BCl3 valve closed
3/9/2011	10:35:38 AM	PH3 valve closed
3/9/2011	10:35:38 AM	SiCl4 pre valve closed
3/9/2011	10:35:38 AM	SiCl4 post valve closed
3/9/2011	10:35:38 AM	Bubbler valve closed
3/9/2011	10:35:38 AM	Main Vac valve opened
3/9/2011	10:35:38 AM	Bypass valve opened
3/9/2011	10:35:38 AM	Helium MFC set to  0.000000
3/9/2011	10:35:38 AM	H2 MFC set to  0.000000
3/9/2011	10:35:38 AM	BCl3 MFC set to  0.000000
3/9/2011	10:35:38 AM	PHl3 MFC set to  0.000000
3/9/2011	10:35:38 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:35:38 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:35:38 AM	Tube furnace set to 0
3/9/2011	10:36:38 AM	H2 valve closed
3/9/2011	10:36:38 AM	BCl3 valve closed
3/9/2011	10:36:38 AM	PH3 valve closed
3/9/2011	10:36:38 AM	SiCl4 pre valve closed
3/9/2011	10:36:38 AM	SiCl4 post valve closed
3/9/2011	10:36:38 AM	Bubbler valve closed
3/9/2011	10:36:38 AM	Helium valve opened
3/9/2011	10:36:38 AM	Main Vac valve opened
3/9/2011	10:36:38 AM	Bypass valve opened
3/9/2011	10:36:38 AM	Helium MFC set to  100.000000
3/9/2011	10:36:38 AM	H2 MFC set to  0.000000
3/9/2011	10:36:38 AM	BCl3 MFC set to  0.000000
3/9/2011	10:36:38 AM	PHl3 MFC set to  0.000000
3/9/2011	10:36:38 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:36:38 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:36:38 AM	Tube furnace set to 0
3/9/2011	10:37:38 AM	Helium valve closed
3/9/2011	10:37:38 AM	H2 valve closed
3/9/2011	10:37:38 AM	BCl3 valve closed
3/9/2011	10:37:38 AM	PH3 valve closed
3/9/2011	10:37:38 AM	SiCl4 pre valve closed
3/9/2011	10:37:38 AM	SiCl4 post valve closed
3/9/2011	10:37:38 AM	Bubbler valve closed
3/9/2011	10:37:38 AM	Main Vac valve opened
3/9/2011	10:37:38 AM	Bypass valve opened
3/9/2011	10:37:38 AM	Helium MFC set to  0.000000
3/9/2011	10:37:38 AM	H2 MFC set to  0.000000
3/9/2011	10:37:38 AM	BCl3 MFC set to  0.000000
3/9/2011	10:37:38 AM	PHl3 MFC set to  0.000000
3/9/2011	10:37:38 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:37:38 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:37:38 AM	Tube furnace set to 0
3/9/2011	10:38:38 AM	H2 valve closed
3/9/2011	10:38:38 AM	BCl3 valve closed
3/9/2011	10:38:38 AM	PH3 valve closed
3/9/2011	10:38:38 AM	SiCl4 pre valve closed
3/9/2011	10:38:38 AM	SiCl4 post valve closed
3/9/2011	10:38:38 AM	Bubbler valve closed
3/9/2011	10:38:38 AM	Helium valve opened
3/9/2011	10:38:38 AM	Main Vac valve opened
3/9/2011	10:38:38 AM	Bypass valve opened
3/9/2011	10:38:38 AM	Helium MFC set to  100.000000
3/9/2011	10:38:38 AM	H2 MFC set to  0.000000
3/9/2011	10:38:38 AM	BCl3 MFC set to  0.000000
3/9/2011	10:38:38 AM	PHl3 MFC set to  0.000000
3/9/2011	10:38:38 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:38:38 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:38:39 AM	Tube furnace set to 0
3/9/2011	10:39:39 AM	Helium valve closed
3/9/2011	10:39:39 AM	H2 valve closed
3/9/2011	10:39:39 AM	BCl3 valve closed
3/9/2011	10:39:39 AM	PH3 valve closed
3/9/2011	10:39:39 AM	SiCl4 pre valve closed
3/9/2011	10:39:39 AM	SiCl4 post valve closed
3/9/2011	10:39:39 AM	Bubbler valve closed
3/9/2011	10:39:39 AM	Main Vac valve opened
3/9/2011	10:39:39 AM	Bypass valve opened
3/9/2011	10:39:39 AM	Helium MFC set to  0.000000
3/9/2011	10:39:39 AM	H2 MFC set to  0.000000
3/9/2011	10:39:39 AM	BCl3 MFC set to  0.000000
3/9/2011	10:39:39 AM	PHl3 MFC set to  0.000000
3/9/2011	10:39:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:39:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:39:39 AM	Tube furnace set to 0
3/9/2011	10:40:39 AM	H2 valve closed
3/9/2011	10:40:39 AM	BCl3 valve closed
3/9/2011	10:40:39 AM	PH3 valve closed
3/9/2011	10:40:39 AM	SiCl4 pre valve closed
3/9/2011	10:40:39 AM	SiCl4 post valve closed
3/9/2011	10:40:39 AM	Bubbler valve closed
3/9/2011	10:40:39 AM	Helium valve opened
3/9/2011	10:40:39 AM	Main Vac valve opened
3/9/2011	10:40:39 AM	Bypass valve opened
3/9/2011	10:40:39 AM	Helium MFC set to  100.000000
3/9/2011	10:40:39 AM	H2 MFC set to  0.000000
3/9/2011	10:40:39 AM	BCl3 MFC set to  0.000000
3/9/2011	10:40:39 AM	PHl3 MFC set to  0.000000
3/9/2011	10:40:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:40:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:40:39 AM	Tube furnace set to 0
3/9/2011	10:41:39 AM	Helium valve closed
3/9/2011	10:41:39 AM	H2 valve closed
3/9/2011	10:41:39 AM	BCl3 valve closed
3/9/2011	10:41:39 AM	PH3 valve closed
3/9/2011	10:41:39 AM	SiCl4 pre valve closed
3/9/2011	10:41:39 AM	SiCl4 post valve closed
3/9/2011	10:41:39 AM	Bubbler valve closed
3/9/2011	10:41:39 AM	Main Vac valve opened
3/9/2011	10:41:39 AM	Bypass valve opened
3/9/2011	10:41:39 AM	Helium MFC set to  0.000000
3/9/2011	10:41:39 AM	H2 MFC set to  0.000000
3/9/2011	10:41:39 AM	BCl3 MFC set to  0.000000
3/9/2011	10:41:39 AM	PHl3 MFC set to  0.000000
3/9/2011	10:41:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:41:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:41:39 AM	Tube furnace set to 0
3/9/2011	10:42:39 AM	H2 valve closed
3/9/2011	10:42:39 AM	BCl3 valve closed
3/9/2011	10:42:39 AM	PH3 valve closed
3/9/2011	10:42:39 AM	SiCl4 pre valve closed
3/9/2011	10:42:39 AM	SiCl4 post valve closed
3/9/2011	10:42:39 AM	Bubbler valve closed
3/9/2011	10:42:39 AM	Helium valve opened
3/9/2011	10:42:39 AM	Main Vac valve opened
3/9/2011	10:42:39 AM	Bypass valve opened
3/9/2011	10:42:39 AM	Helium MFC set to  100.000000
3/9/2011	10:42:39 AM	H2 MFC set to  0.000000
3/9/2011	10:42:39 AM	BCl3 MFC set to  0.000000
3/9/2011	10:42:39 AM	PHl3 MFC set to  0.000000
3/9/2011	10:42:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:42:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:42:39 AM	Tube furnace set to 0
3/9/2011	10:43:39 AM	Helium valve closed
3/9/2011	10:43:39 AM	H2 valve closed
3/9/2011	10:43:39 AM	BCl3 valve closed
3/9/2011	10:43:39 AM	PH3 valve closed
3/9/2011	10:43:39 AM	SiCl4 pre valve closed
3/9/2011	10:43:39 AM	SiCl4 post valve closed
3/9/2011	10:43:39 AM	Bubbler valve closed
3/9/2011	10:43:39 AM	Main Vac valve opened
3/9/2011	10:43:39 AM	Bypass valve opened
3/9/2011	10:43:39 AM	Helium MFC set to  0.000000
3/9/2011	10:43:39 AM	H2 MFC set to  0.000000
3/9/2011	10:43:39 AM	BCl3 MFC set to  0.000000
3/9/2011	10:43:39 AM	PHl3 MFC set to  0.000000
3/9/2011	10:43:39 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:43:39 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:43:40 AM	Tube furnace set to 0
3/9/2011	10:44:40 AM	H2 valve closed
3/9/2011	10:44:40 AM	BCl3 valve closed
3/9/2011	10:44:40 AM	PH3 valve closed
3/9/2011	10:44:40 AM	SiCl4 pre valve closed
3/9/2011	10:44:40 AM	SiCl4 post valve closed
3/9/2011	10:44:40 AM	Bubbler valve closed
3/9/2011	10:44:40 AM	Helium valve opened
3/9/2011	10:44:40 AM	Main Vac valve opened
3/9/2011	10:44:40 AM	Bypass valve opened
3/9/2011	10:44:40 AM	Helium MFC set to  100.000000
3/9/2011	10:44:40 AM	H2 MFC set to  0.000000
3/9/2011	10:44:40 AM	BCl3 MFC set to  0.000000
3/9/2011	10:44:40 AM	PHl3 MFC set to  0.000000
3/9/2011	10:44:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:44:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:44:40 AM	Tube furnace set to 0
3/9/2011	10:45:40 AM	Helium valve closed
3/9/2011	10:45:40 AM	H2 valve closed
3/9/2011	10:45:40 AM	BCl3 valve closed
3/9/2011	10:45:40 AM	PH3 valve closed
3/9/2011	10:45:40 AM	SiCl4 pre valve closed
3/9/2011	10:45:40 AM	SiCl4 post valve closed
3/9/2011	10:45:40 AM	Bubbler valve closed
3/9/2011	10:45:40 AM	Main Vac valve opened
3/9/2011	10:45:40 AM	Bypass valve opened
3/9/2011	10:45:40 AM	Helium MFC set to  0.000000
3/9/2011	10:45:40 AM	H2 MFC set to  0.000000
3/9/2011	10:45:40 AM	BCl3 MFC set to  0.000000
3/9/2011	10:45:40 AM	PHl3 MFC set to  0.000000
3/9/2011	10:45:40 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:45:40 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:45:40 AM	Tube furnace set to 0
3/9/2011	10:46:34 AM	Run aborted at 10:46 AM
3/9/2011	10:46:34 AM	Helium valve closed
3/9/2011	10:46:34 AM	H2 valve closed
3/9/2011	10:46:34 AM	BCl3 valve closed
3/9/2011	10:46:34 AM	PH3 valve closed
3/9/2011	10:46:34 AM	SiCl4 pre valve closed
3/9/2011	10:46:34 AM	SiCl4 post valve closed
3/9/2011	10:46:34 AM	Bypass valve closed
3/9/2011	10:46:34 AM	Main Vac valve closed
3/9/2011	10:46:34 AM	Bubbler valve closed
3/9/2011	10:46:34 AM	Helium MFC set to  0.000000
3/9/2011	10:46:34 AM	H2 MFC set to  0.000000
3/9/2011	10:46:34 AM	BCl3 MFC set to  0.000000
3/9/2011	10:46:34 AM	PHl3 MFC set to  0.000000
3/9/2011	10:46:34 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:46:34 AM	Tube furnace set to 0
3/9/2011	10:46:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	10:46:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	10:46:41 AM	Recipe started at 10:46 AM
3/9/2011	10:46:41 AM	Helium valve closed
3/9/2011	10:46:41 AM	H2 valve closed
3/9/2011	10:46:41 AM	BCl3 valve closed
3/9/2011	10:46:41 AM	PH3 valve closed
3/9/2011	10:46:41 AM	SiCl4 pre valve closed
3/9/2011	10:46:41 AM	SiCl4 post valve closed
3/9/2011	10:46:41 AM	Main Vac valve closed
3/9/2011	10:46:41 AM	Bubbler valve closed
3/9/2011	10:46:41 AM	Bypass valve opened
3/9/2011	10:46:41 AM	Helium MFC set to  0.000000
3/9/2011	10:46:41 AM	H2 MFC set to  0.000000
3/9/2011	10:46:41 AM	BCl3 MFC set to  0.000000
3/9/2011	10:46:41 AM	PHl3 MFC set to  0.000000
3/9/2011	10:46:41 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:46:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:46:41 AM	Tube furnace set to 0
3/9/2011	10:46:41 AM	Helium valve closed
3/9/2011	10:46:41 AM	H2 valve closed
3/9/2011	10:46:41 AM	BCl3 valve closed
3/9/2011	10:46:41 AM	PH3 valve closed
3/9/2011	10:46:41 AM	SiCl4 pre valve closed
3/9/2011	10:46:41 AM	SiCl4 post valve closed
3/9/2011	10:46:41 AM	Bubbler valve closed
3/9/2011	10:46:41 AM	Main Vac valve opened
3/9/2011	10:46:41 AM	Bypass valve opened
3/9/2011	10:46:41 AM	Helium MFC set to  0.000000
3/9/2011	10:46:41 AM	H2 MFC set to  0.000000
3/9/2011	10:46:41 AM	BCl3 MFC set to  0.000000
3/9/2011	10:46:41 AM	PHl3 MFC set to  0.000000
3/9/2011	10:46:41 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:46:41 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:46:41 AM	Tube furnace set to 0
3/9/2011	10:46:42 AM	Run finished at 10:46 AM
3/9/2011	10:46:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	10:46:52 AM	Bypass valve closed
3/9/2011	10:46:53 AM	Main Vac valve closed
3/9/2011	10:47:08 AM	Main Vac valve opened
3/9/2011	10:47:08 AM	Bypass valve opened
3/9/2011	10:48:17 AM	Main Vac valve closed
3/9/2011	10:48:18 AM	Bypass valve closed
3/9/2011	10:48:25 AM	Helium MFC set to  100.000000
3/9/2011	10:48:32 AM	Helium valve opened
3/9/2011	10:48:55 AM	Helium valve closed
3/9/2011	10:48:58 AM	Helium MFC set to  0.000000
3/9/2011	10:49:00 AM	Bypass valve opened
3/9/2011	10:49:01 AM	Main Vac valve opened
3/9/2011	10:50:07 AM	Recipe started at 10:50 AM
3/9/2011	10:50:07 AM	Helium valve closed
3/9/2011	10:50:07 AM	BCl3 valve closed
3/9/2011	10:50:07 AM	PH3 valve closed
3/9/2011	10:50:07 AM	SiCl4 pre valve closed
3/9/2011	10:50:07 AM	SiCl4 post valve closed
3/9/2011	10:50:07 AM	Main Vac valve closed
3/9/2011	10:50:07 AM	Bypass valve closed
3/9/2011	10:50:07 AM	Bubbler valve closed
3/9/2011	10:50:07 AM	H2 valve opened
3/9/2011	10:50:07 AM	Helium MFC set to  0.000000
3/9/2011	10:50:07 AM	H2 MFC set to  500.000000
3/9/2011	10:50:07 AM	BCl3 MFC set to  0.000000
3/9/2011	10:50:07 AM	PHl3 MFC set to  0.000000
3/9/2011	10:50:07 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:50:07 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:50:07 AM	Tube furnace set to 0
3/9/2011	10:51:25 AM	Helium valve closed
3/9/2011	10:51:25 AM	BCl3 valve closed
3/9/2011	10:51:25 AM	PH3 valve closed
3/9/2011	10:51:25 AM	SiCl4 pre valve closed
3/9/2011	10:51:25 AM	SiCl4 post valve closed
3/9/2011	10:51:25 AM	Main Vac valve closed
3/9/2011	10:51:25 AM	Bypass valve closed
3/9/2011	10:51:25 AM	H2 valve opened
3/9/2011	10:51:25 AM	Bubbler valve opened
3/9/2011	10:51:25 AM	Helium MFC set to  0.000000
3/9/2011	10:51:25 AM	H2 MFC set to  500.000000
3/9/2011	10:51:25 AM	BCl3 MFC set to  0.000000
3/9/2011	10:51:25 AM	PHl3 MFC set to  0.000000
3/9/2011	10:51:25 AM	SiCl4 MFC set to  0.000000
3/9/2011	10:51:25 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:51:25 AM	Tube furnace set to 1000
3/9/2011	11:11:25 AM	Helium valve closed
3/9/2011	11:11:25 AM	PH3 valve closed
3/9/2011	11:11:25 AM	Main Vac valve closed
3/9/2011	11:11:25 AM	Bypass valve closed
3/9/2011	11:11:25 AM	H2 valve opened
3/9/2011	11:11:25 AM	BCl3 valve opened
3/9/2011	11:11:25 AM	SiCl4 pre valve opened
3/9/2011	11:11:25 AM	SiCl4 post valve opened
3/9/2011	11:11:25 AM	Bubbler valve opened
3/9/2011	11:11:25 AM	Helium MFC set to  0.000000
3/9/2011	11:11:25 AM	H2 MFC set to  500.000000
3/9/2011	11:11:25 AM	BCl3 MFC set to  3.000000
3/9/2011	11:11:25 AM	PHl3 MFC set to  0.000000
3/9/2011	11:11:25 AM	SiCl4 MFC set to  50.000000
3/9/2011	11:11:25 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:11:25 AM	Tube furnace set to 1000
3/9/2011	11:29:25 AM	H2 valve closed
3/9/2011	11:29:25 AM	BCl3 valve closed
3/9/2011	11:29:25 AM	PH3 valve closed
3/9/2011	11:29:25 AM	SiCl4 pre valve closed
3/9/2011	11:29:25 AM	SiCl4 post valve closed
3/9/2011	11:29:25 AM	Main Vac valve closed
3/9/2011	11:29:25 AM	Bypass valve closed
3/9/2011	11:29:25 AM	Helium valve opened
3/9/2011	11:29:25 AM	Bubbler valve opened
3/9/2011	11:29:25 AM	Helium MFC set to  500.000000
3/9/2011	11:29:25 AM	H2 MFC set to  0.000000
3/9/2011	11:29:25 AM	BCl3 MFC set to  0.000000
3/9/2011	11:29:25 AM	PHl3 MFC set to  0.000000
3/9/2011	11:29:25 AM	SiCl4 MFC set to  0.000000
3/9/2011	11:29:25 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:29:26 AM	Tube furnace set to 0
3/9/2011	11:49:26 AM	Helium valve closed
3/9/2011	11:49:26 AM	H2 valve closed
3/9/2011	11:49:26 AM	BCl3 valve closed
3/9/2011	11:49:26 AM	PH3 valve closed
3/9/2011	11:49:26 AM	SiCl4 pre valve closed
3/9/2011	11:49:26 AM	SiCl4 post valve closed
3/9/2011	11:49:26 AM	Main Vac valve closed
3/9/2011	11:49:26 AM	Bypass valve closed
3/9/2011	11:49:26 AM	Bubbler valve closed
3/9/2011	11:49:26 AM	Helium MFC set to  0.000000
3/9/2011	11:49:26 AM	H2 MFC set to  0.000000
3/9/2011	11:49:26 AM	BCl3 MFC set to  0.000000
3/9/2011	11:49:26 AM	PHl3 MFC set to  0.000000
3/9/2011	11:49:26 AM	SiCl4 MFC set to  0.000000
3/9/2011	11:49:26 AM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:49:26 AM	Tube furnace set to 0
3/9/2011	11:49:26 AM	Run finished at 11:49 AM
3/9/2011	12:16:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	12:16:37 PM	Recipe started at 12:16 PM
3/9/2011	12:16:37 PM	H2 valve closed
3/9/2011	12:16:37 PM	BCl3 valve closed
3/9/2011	12:16:37 PM	PH3 valve closed
3/9/2011	12:16:37 PM	SiCl4 pre valve closed
3/9/2011	12:16:37 PM	SiCl4 post valve closed
3/9/2011	12:16:37 PM	Main Vac valve closed
3/9/2011	12:16:37 PM	Bypass valve closed
3/9/2011	12:16:37 PM	Bubbler valve closed
3/9/2011	12:16:37 PM	Helium valve opened
3/9/2011	12:16:37 PM	Helium MFC set to  500.000000
3/9/2011	12:16:37 PM	H2 MFC set to  0.000000
3/9/2011	12:16:37 PM	BCl3 MFC set to  0.000000
3/9/2011	12:16:37 PM	PHl3 MFC set to  0.000000
3/9/2011	12:16:37 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:16:37 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:16:38 PM	Tube furnace set to 0
3/9/2011	12:16:45 PM	Helium valve closed
3/9/2011	12:16:45 PM	H2 valve closed
3/9/2011	12:16:45 PM	BCl3 valve closed
3/9/2011	12:16:45 PM	PH3 valve closed
3/9/2011	12:16:45 PM	SiCl4 pre valve closed
3/9/2011	12:16:45 PM	SiCl4 post valve closed
3/9/2011	12:16:45 PM	Main Vac valve closed
3/9/2011	12:16:45 PM	Bypass valve closed
3/9/2011	12:16:45 PM	Bubbler valve closed
3/9/2011	12:16:45 PM	Helium MFC set to  0.000000
3/9/2011	12:16:45 PM	H2 MFC set to  0.000000
3/9/2011	12:16:45 PM	BCl3 MFC set to  0.000000
3/9/2011	12:16:45 PM	PHl3 MFC set to  0.000000
3/9/2011	12:16:45 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:16:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:16:45 PM	Tube furnace set to 0
3/9/2011	12:16:46 PM	Run finished at 12:16 PM
3/9/2011	12:16:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	12:21:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	12:21:28 PM	Recipe started at 12:21 PM
3/9/2011	12:21:28 PM	Helium valve closed
3/9/2011	12:21:28 PM	H2 valve closed
3/9/2011	12:21:28 PM	BCl3 valve closed
3/9/2011	12:21:28 PM	PH3 valve closed
3/9/2011	12:21:28 PM	SiCl4 pre valve closed
3/9/2011	12:21:28 PM	SiCl4 post valve closed
3/9/2011	12:21:28 PM	Main Vac valve closed
3/9/2011	12:21:28 PM	Bubbler valve closed
3/9/2011	12:21:28 PM	Bypass valve opened
3/9/2011	12:21:28 PM	Helium MFC set to  0.000000
3/9/2011	12:21:28 PM	H2 MFC set to  0.000000
3/9/2011	12:21:28 PM	BCl3 MFC set to  0.000000
3/9/2011	12:21:28 PM	PHl3 MFC set to  0.000000
3/9/2011	12:21:28 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:21:28 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:21:28 PM	Tube furnace set to 0
3/9/2011	12:22:00 PM	Helium valve closed
3/9/2011	12:22:00 PM	H2 valve closed
3/9/2011	12:22:00 PM	BCl3 valve closed
3/9/2011	12:22:00 PM	PH3 valve closed
3/9/2011	12:22:00 PM	SiCl4 pre valve closed
3/9/2011	12:22:00 PM	SiCl4 post valve closed
3/9/2011	12:22:00 PM	Bubbler valve closed
3/9/2011	12:22:00 PM	Main Vac valve opened
3/9/2011	12:22:00 PM	Bypass valve opened
3/9/2011	12:22:01 PM	Helium MFC set to  0.000000
3/9/2011	12:22:01 PM	H2 MFC set to  0.000000
3/9/2011	12:22:01 PM	BCl3 MFC set to  0.000000
3/9/2011	12:22:01 PM	PHl3 MFC set to  0.000000
3/9/2011	12:22:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:22:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:22:01 PM	Tube furnace set to 0
3/9/2011	12:22:01 PM	Run finished at 12:22 PM
3/9/2011	12:22:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	12:24:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	12:24:51 PM	Recipe started at 12:24 PM
3/9/2011	12:24:51 PM	Helium valve closed
3/9/2011	12:24:51 PM	H2 valve closed
3/9/2011	12:24:51 PM	BCl3 valve closed
3/9/2011	12:24:51 PM	PH3 valve closed
3/9/2011	12:24:51 PM	SiCl4 pre valve closed
3/9/2011	12:24:51 PM	SiCl4 post valve closed
3/9/2011	12:24:51 PM	Main Vac valve closed
3/9/2011	12:24:51 PM	Bubbler valve closed
3/9/2011	12:24:51 PM	Bypass valve opened
3/9/2011	12:24:51 PM	Helium MFC set to  0.000000
3/9/2011	12:24:51 PM	H2 MFC set to  0.000000
3/9/2011	12:24:51 PM	BCl3 MFC set to  0.000000
3/9/2011	12:24:51 PM	PHl3 MFC set to  0.000000
3/9/2011	12:24:51 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:24:51 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:24:51 PM	Tube furnace set to 0
3/9/2011	12:24:51 PM	Helium valve closed
3/9/2011	12:24:51 PM	H2 valve closed
3/9/2011	12:24:51 PM	BCl3 valve closed
3/9/2011	12:24:51 PM	PH3 valve closed
3/9/2011	12:24:51 PM	SiCl4 pre valve closed
3/9/2011	12:24:51 PM	SiCl4 post valve closed
3/9/2011	12:24:51 PM	Bubbler valve closed
3/9/2011	12:24:51 PM	Main Vac valve opened
3/9/2011	12:24:51 PM	Bypass valve opened
3/9/2011	12:24:51 PM	Helium MFC set to  0.000000
3/9/2011	12:24:51 PM	H2 MFC set to  0.000000
3/9/2011	12:24:51 PM	BCl3 MFC set to  0.000000
3/9/2011	12:24:51 PM	PHl3 MFC set to  0.000000
3/9/2011	12:24:51 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:24:51 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:24:52 PM	Tube furnace set to 0
3/9/2011	12:25:52 PM	H2 valve closed
3/9/2011	12:25:52 PM	BCl3 valve closed
3/9/2011	12:25:52 PM	PH3 valve closed
3/9/2011	12:25:52 PM	SiCl4 pre valve closed
3/9/2011	12:25:52 PM	SiCl4 post valve closed
3/9/2011	12:25:52 PM	Bubbler valve closed
3/9/2011	12:25:52 PM	Helium valve opened
3/9/2011	12:25:52 PM	Main Vac valve opened
3/9/2011	12:25:52 PM	Bypass valve opened
3/9/2011	12:25:52 PM	Helium MFC set to  100.000000
3/9/2011	12:25:52 PM	H2 MFC set to  0.000000
3/9/2011	12:25:52 PM	BCl3 MFC set to  0.000000
3/9/2011	12:25:52 PM	PHl3 MFC set to  0.000000
3/9/2011	12:25:52 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:25:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:25:52 PM	Tube furnace set to 0
3/9/2011	12:26:52 PM	Helium valve closed
3/9/2011	12:26:52 PM	H2 valve closed
3/9/2011	12:26:52 PM	BCl3 valve closed
3/9/2011	12:26:52 PM	PH3 valve closed
3/9/2011	12:26:52 PM	SiCl4 pre valve closed
3/9/2011	12:26:52 PM	SiCl4 post valve closed
3/9/2011	12:26:52 PM	Bubbler valve closed
3/9/2011	12:26:52 PM	Main Vac valve opened
3/9/2011	12:26:52 PM	Bypass valve opened
3/9/2011	12:26:52 PM	Helium MFC set to  0.000000
3/9/2011	12:26:52 PM	H2 MFC set to  0.000000
3/9/2011	12:26:52 PM	BCl3 MFC set to  0.000000
3/9/2011	12:26:52 PM	PHl3 MFC set to  0.000000
3/9/2011	12:26:52 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:26:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:26:52 PM	Tube furnace set to 0
3/9/2011	12:27:52 PM	H2 valve closed
3/9/2011	12:27:52 PM	BCl3 valve closed
3/9/2011	12:27:52 PM	PH3 valve closed
3/9/2011	12:27:52 PM	SiCl4 pre valve closed
3/9/2011	12:27:52 PM	SiCl4 post valve closed
3/9/2011	12:27:52 PM	Bubbler valve closed
3/9/2011	12:27:52 PM	Helium valve opened
3/9/2011	12:27:52 PM	Main Vac valve opened
3/9/2011	12:27:52 PM	Bypass valve opened
3/9/2011	12:27:52 PM	Helium MFC set to  100.000000
3/9/2011	12:27:52 PM	H2 MFC set to  0.000000
3/9/2011	12:27:52 PM	BCl3 MFC set to  0.000000
3/9/2011	12:27:52 PM	PHl3 MFC set to  0.000000
3/9/2011	12:27:52 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:27:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:27:52 PM	Tube furnace set to 0
3/9/2011	12:28:52 PM	Helium valve closed
3/9/2011	12:28:52 PM	H2 valve closed
3/9/2011	12:28:52 PM	BCl3 valve closed
3/9/2011	12:28:52 PM	PH3 valve closed
3/9/2011	12:28:52 PM	SiCl4 pre valve closed
3/9/2011	12:28:52 PM	SiCl4 post valve closed
3/9/2011	12:28:52 PM	Bubbler valve closed
3/9/2011	12:28:52 PM	Main Vac valve opened
3/9/2011	12:28:52 PM	Bypass valve opened
3/9/2011	12:28:52 PM	Helium MFC set to  0.000000
3/9/2011	12:28:52 PM	H2 MFC set to  0.000000
3/9/2011	12:28:52 PM	BCl3 MFC set to  0.000000
3/9/2011	12:28:52 PM	PHl3 MFC set to  0.000000
3/9/2011	12:28:52 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:28:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:28:52 PM	Tube furnace set to 0
3/9/2011	12:29:52 PM	H2 valve closed
3/9/2011	12:29:52 PM	BCl3 valve closed
3/9/2011	12:29:52 PM	PH3 valve closed
3/9/2011	12:29:52 PM	SiCl4 pre valve closed
3/9/2011	12:29:52 PM	SiCl4 post valve closed
3/9/2011	12:29:52 PM	Bubbler valve closed
3/9/2011	12:29:52 PM	Helium valve opened
3/9/2011	12:29:52 PM	Main Vac valve opened
3/9/2011	12:29:52 PM	Bypass valve opened
3/9/2011	12:29:52 PM	Helium MFC set to  100.000000
3/9/2011	12:29:52 PM	H2 MFC set to  0.000000
3/9/2011	12:29:52 PM	BCl3 MFC set to  0.000000
3/9/2011	12:29:52 PM	PHl3 MFC set to  0.000000
3/9/2011	12:29:52 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:29:52 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:29:53 PM	Tube furnace set to 0
3/9/2011	12:30:53 PM	Helium valve closed
3/9/2011	12:30:53 PM	H2 valve closed
3/9/2011	12:30:53 PM	BCl3 valve closed
3/9/2011	12:30:53 PM	PH3 valve closed
3/9/2011	12:30:53 PM	SiCl4 pre valve closed
3/9/2011	12:30:53 PM	SiCl4 post valve closed
3/9/2011	12:30:53 PM	Bubbler valve closed
3/9/2011	12:30:53 PM	Main Vac valve opened
3/9/2011	12:30:53 PM	Bypass valve opened
3/9/2011	12:30:53 PM	Helium MFC set to  0.000000
3/9/2011	12:30:53 PM	H2 MFC set to  0.000000
3/9/2011	12:30:53 PM	BCl3 MFC set to  0.000000
3/9/2011	12:30:53 PM	PHl3 MFC set to  0.000000
3/9/2011	12:30:53 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:30:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:30:53 PM	Tube furnace set to 0
3/9/2011	12:31:53 PM	H2 valve closed
3/9/2011	12:31:53 PM	BCl3 valve closed
3/9/2011	12:31:53 PM	PH3 valve closed
3/9/2011	12:31:53 PM	SiCl4 pre valve closed
3/9/2011	12:31:53 PM	SiCl4 post valve closed
3/9/2011	12:31:53 PM	Bubbler valve closed
3/9/2011	12:31:53 PM	Helium valve opened
3/9/2011	12:31:53 PM	Main Vac valve opened
3/9/2011	12:31:53 PM	Bypass valve opened
3/9/2011	12:31:53 PM	Helium MFC set to  100.000000
3/9/2011	12:31:53 PM	H2 MFC set to  0.000000
3/9/2011	12:31:53 PM	BCl3 MFC set to  0.000000
3/9/2011	12:31:53 PM	PHl3 MFC set to  0.000000
3/9/2011	12:31:53 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:31:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:31:53 PM	Tube furnace set to 0
3/9/2011	12:32:53 PM	Helium valve closed
3/9/2011	12:32:53 PM	H2 valve closed
3/9/2011	12:32:53 PM	BCl3 valve closed
3/9/2011	12:32:53 PM	PH3 valve closed
3/9/2011	12:32:53 PM	SiCl4 pre valve closed
3/9/2011	12:32:53 PM	SiCl4 post valve closed
3/9/2011	12:32:53 PM	Bubbler valve closed
3/9/2011	12:32:53 PM	Main Vac valve opened
3/9/2011	12:32:53 PM	Bypass valve opened
3/9/2011	12:32:53 PM	Helium MFC set to  0.000000
3/9/2011	12:32:53 PM	H2 MFC set to  0.000000
3/9/2011	12:32:53 PM	BCl3 MFC set to  0.000000
3/9/2011	12:32:53 PM	PHl3 MFC set to  0.000000
3/9/2011	12:32:53 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:32:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:32:53 PM	Tube furnace set to 0
3/9/2011	12:33:53 PM	H2 valve closed
3/9/2011	12:33:53 PM	BCl3 valve closed
3/9/2011	12:33:53 PM	PH3 valve closed
3/9/2011	12:33:53 PM	SiCl4 pre valve closed
3/9/2011	12:33:53 PM	SiCl4 post valve closed
3/9/2011	12:33:53 PM	Bubbler valve closed
3/9/2011	12:33:53 PM	Helium valve opened
3/9/2011	12:33:53 PM	Main Vac valve opened
3/9/2011	12:33:53 PM	Bypass valve opened
3/9/2011	12:33:53 PM	Helium MFC set to  100.000000
3/9/2011	12:33:53 PM	H2 MFC set to  0.000000
3/9/2011	12:33:53 PM	BCl3 MFC set to  0.000000
3/9/2011	12:33:53 PM	PHl3 MFC set to  0.000000
3/9/2011	12:33:53 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:33:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:33:53 PM	Tube furnace set to 0
3/9/2011	12:34:53 PM	Helium valve closed
3/9/2011	12:34:53 PM	H2 valve closed
3/9/2011	12:34:53 PM	BCl3 valve closed
3/9/2011	12:34:53 PM	PH3 valve closed
3/9/2011	12:34:53 PM	SiCl4 pre valve closed
3/9/2011	12:34:53 PM	SiCl4 post valve closed
3/9/2011	12:34:53 PM	Bubbler valve closed
3/9/2011	12:34:53 PM	Main Vac valve opened
3/9/2011	12:34:53 PM	Bypass valve opened
3/9/2011	12:34:53 PM	Helium MFC set to  0.000000
3/9/2011	12:34:53 PM	H2 MFC set to  0.000000
3/9/2011	12:34:53 PM	BCl3 MFC set to  0.000000
3/9/2011	12:34:53 PM	PHl3 MFC set to  0.000000
3/9/2011	12:34:53 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:34:53 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:34:54 PM	Tube furnace set to 0
3/9/2011	12:35:54 PM	H2 valve closed
3/9/2011	12:35:54 PM	BCl3 valve closed
3/9/2011	12:35:54 PM	PH3 valve closed
3/9/2011	12:35:54 PM	SiCl4 pre valve closed
3/9/2011	12:35:54 PM	SiCl4 post valve closed
3/9/2011	12:35:54 PM	Bubbler valve closed
3/9/2011	12:35:54 PM	Helium valve opened
3/9/2011	12:35:54 PM	Main Vac valve opened
3/9/2011	12:35:54 PM	Bypass valve opened
3/9/2011	12:35:54 PM	Helium MFC set to  100.000000
3/9/2011	12:35:54 PM	H2 MFC set to  0.000000
3/9/2011	12:35:54 PM	BCl3 MFC set to  0.000000
3/9/2011	12:35:54 PM	PHl3 MFC set to  0.000000
3/9/2011	12:35:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:35:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:35:54 PM	Tube furnace set to 0
3/9/2011	12:36:54 PM	Helium valve closed
3/9/2011	12:36:54 PM	H2 valve closed
3/9/2011	12:36:54 PM	BCl3 valve closed
3/9/2011	12:36:54 PM	PH3 valve closed
3/9/2011	12:36:54 PM	SiCl4 pre valve closed
3/9/2011	12:36:54 PM	SiCl4 post valve closed
3/9/2011	12:36:54 PM	Bubbler valve closed
3/9/2011	12:36:54 PM	Main Vac valve opened
3/9/2011	12:36:54 PM	Bypass valve opened
3/9/2011	12:36:54 PM	Helium MFC set to  0.000000
3/9/2011	12:36:54 PM	H2 MFC set to  0.000000
3/9/2011	12:36:54 PM	BCl3 MFC set to  0.000000
3/9/2011	12:36:54 PM	PHl3 MFC set to  0.000000
3/9/2011	12:36:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:36:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:36:54 PM	Tube furnace set to 0
3/9/2011	12:37:54 PM	H2 valve closed
3/9/2011	12:37:54 PM	BCl3 valve closed
3/9/2011	12:37:54 PM	PH3 valve closed
3/9/2011	12:37:54 PM	SiCl4 pre valve closed
3/9/2011	12:37:54 PM	SiCl4 post valve closed
3/9/2011	12:37:54 PM	Bubbler valve closed
3/9/2011	12:37:54 PM	Helium valve opened
3/9/2011	12:37:54 PM	Main Vac valve opened
3/9/2011	12:37:54 PM	Bypass valve opened
3/9/2011	12:37:54 PM	Helium MFC set to  100.000000
3/9/2011	12:37:54 PM	H2 MFC set to  0.000000
3/9/2011	12:37:54 PM	BCl3 MFC set to  0.000000
3/9/2011	12:37:54 PM	PHl3 MFC set to  0.000000
3/9/2011	12:37:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:37:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:37:54 PM	Tube furnace set to 0
3/9/2011	12:38:54 PM	Helium valve closed
3/9/2011	12:38:54 PM	H2 valve closed
3/9/2011	12:38:54 PM	BCl3 valve closed
3/9/2011	12:38:54 PM	PH3 valve closed
3/9/2011	12:38:54 PM	SiCl4 pre valve closed
3/9/2011	12:38:54 PM	SiCl4 post valve closed
3/9/2011	12:38:54 PM	Bubbler valve closed
3/9/2011	12:38:54 PM	Main Vac valve opened
3/9/2011	12:38:54 PM	Bypass valve opened
3/9/2011	12:38:54 PM	Helium MFC set to  0.000000
3/9/2011	12:38:54 PM	H2 MFC set to  0.000000
3/9/2011	12:38:54 PM	BCl3 MFC set to  0.000000
3/9/2011	12:38:54 PM	PHl3 MFC set to  0.000000
3/9/2011	12:38:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:38:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:38:54 PM	Tube furnace set to 0
3/9/2011	12:39:54 PM	H2 valve closed
3/9/2011	12:39:54 PM	BCl3 valve closed
3/9/2011	12:39:54 PM	PH3 valve closed
3/9/2011	12:39:54 PM	SiCl4 pre valve closed
3/9/2011	12:39:54 PM	SiCl4 post valve closed
3/9/2011	12:39:54 PM	Bubbler valve closed
3/9/2011	12:39:54 PM	Helium valve opened
3/9/2011	12:39:54 PM	Main Vac valve opened
3/9/2011	12:39:54 PM	Bypass valve opened
3/9/2011	12:39:54 PM	Helium MFC set to  100.000000
3/9/2011	12:39:54 PM	H2 MFC set to  0.000000
3/9/2011	12:39:54 PM	BCl3 MFC set to  0.000000
3/9/2011	12:39:54 PM	PHl3 MFC set to  0.000000
3/9/2011	12:39:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:39:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:39:55 PM	Tube furnace set to 0
3/9/2011	12:40:55 PM	Helium valve closed
3/9/2011	12:40:55 PM	H2 valve closed
3/9/2011	12:40:55 PM	BCl3 valve closed
3/9/2011	12:40:55 PM	PH3 valve closed
3/9/2011	12:40:55 PM	SiCl4 pre valve closed
3/9/2011	12:40:55 PM	SiCl4 post valve closed
3/9/2011	12:40:55 PM	Bubbler valve closed
3/9/2011	12:40:55 PM	Main Vac valve opened
3/9/2011	12:40:55 PM	Bypass valve opened
3/9/2011	12:40:55 PM	Helium MFC set to  0.000000
3/9/2011	12:40:55 PM	H2 MFC set to  0.000000
3/9/2011	12:40:55 PM	BCl3 MFC set to  0.000000
3/9/2011	12:40:55 PM	PHl3 MFC set to  0.000000
3/9/2011	12:40:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:40:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:40:55 PM	Tube furnace set to 0
3/9/2011	12:41:55 PM	H2 valve closed
3/9/2011	12:41:55 PM	BCl3 valve closed
3/9/2011	12:41:55 PM	PH3 valve closed
3/9/2011	12:41:55 PM	SiCl4 pre valve closed
3/9/2011	12:41:55 PM	SiCl4 post valve closed
3/9/2011	12:41:55 PM	Bubbler valve closed
3/9/2011	12:41:55 PM	Helium valve opened
3/9/2011	12:41:55 PM	Main Vac valve opened
3/9/2011	12:41:55 PM	Bypass valve opened
3/9/2011	12:41:55 PM	Helium MFC set to  100.000000
3/9/2011	12:41:55 PM	H2 MFC set to  0.000000
3/9/2011	12:41:55 PM	BCl3 MFC set to  0.000000
3/9/2011	12:41:55 PM	PHl3 MFC set to  0.000000
3/9/2011	12:41:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:41:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:41:55 PM	Tube furnace set to 0
3/9/2011	12:42:55 PM	Helium valve closed
3/9/2011	12:42:55 PM	H2 valve closed
3/9/2011	12:42:55 PM	BCl3 valve closed
3/9/2011	12:42:55 PM	PH3 valve closed
3/9/2011	12:42:55 PM	SiCl4 pre valve closed
3/9/2011	12:42:55 PM	SiCl4 post valve closed
3/9/2011	12:42:55 PM	Bubbler valve closed
3/9/2011	12:42:55 PM	Main Vac valve opened
3/9/2011	12:42:55 PM	Bypass valve opened
3/9/2011	12:42:55 PM	Helium MFC set to  0.000000
3/9/2011	12:42:55 PM	H2 MFC set to  0.000000
3/9/2011	12:42:55 PM	BCl3 MFC set to  0.000000
3/9/2011	12:42:55 PM	PHl3 MFC set to  0.000000
3/9/2011	12:42:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:42:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:42:55 PM	Tube furnace set to 0
3/9/2011	12:43:55 PM	H2 valve closed
3/9/2011	12:43:55 PM	BCl3 valve closed
3/9/2011	12:43:55 PM	PH3 valve closed
3/9/2011	12:43:55 PM	SiCl4 pre valve closed
3/9/2011	12:43:55 PM	SiCl4 post valve closed
3/9/2011	12:43:55 PM	Bubbler valve closed
3/9/2011	12:43:55 PM	Helium valve opened
3/9/2011	12:43:55 PM	Main Vac valve opened
3/9/2011	12:43:55 PM	Bypass valve opened
3/9/2011	12:43:55 PM	Helium MFC set to  100.000000
3/9/2011	12:43:55 PM	H2 MFC set to  0.000000
3/9/2011	12:43:55 PM	BCl3 MFC set to  0.000000
3/9/2011	12:43:55 PM	PHl3 MFC set to  0.000000
3/9/2011	12:43:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:43:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:43:55 PM	Tube furnace set to 0
3/9/2011	12:44:55 PM	Helium valve closed
3/9/2011	12:44:55 PM	H2 valve closed
3/9/2011	12:44:55 PM	BCl3 valve closed
3/9/2011	12:44:55 PM	PH3 valve closed
3/9/2011	12:44:55 PM	SiCl4 pre valve closed
3/9/2011	12:44:55 PM	SiCl4 post valve closed
3/9/2011	12:44:55 PM	Bubbler valve closed
3/9/2011	12:44:55 PM	Main Vac valve opened
3/9/2011	12:44:55 PM	Bypass valve opened
3/9/2011	12:44:55 PM	Helium MFC set to  0.000000
3/9/2011	12:44:55 PM	H2 MFC set to  0.000000
3/9/2011	12:44:55 PM	BCl3 MFC set to  0.000000
3/9/2011	12:44:55 PM	PHl3 MFC set to  0.000000
3/9/2011	12:44:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	12:44:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	12:44:56 PM	Tube furnace set to 0
3/9/2011	12:44:57 PM	Run finished at 12:44 PM
3/9/2011	12:44:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	1:19:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	1:19:40 PM	Recipe started at 1:19 PM
3/9/2011	1:19:40 PM	Helium valve closed
3/9/2011	1:19:40 PM	H2 valve closed
3/9/2011	1:19:40 PM	BCl3 valve closed
3/9/2011	1:19:40 PM	PH3 valve closed
3/9/2011	1:19:40 PM	SiCl4 pre valve closed
3/9/2011	1:19:40 PM	SiCl4 post valve closed
3/9/2011	1:19:40 PM	Main Vac valve closed
3/9/2011	1:19:40 PM	Bubbler valve closed
3/9/2011	1:19:40 PM	Bypass valve opened
3/9/2011	1:19:40 PM	Helium MFC set to  0.000000
3/9/2011	1:19:40 PM	H2 MFC set to  0.000000
3/9/2011	1:19:40 PM	BCl3 MFC set to  0.000000
3/9/2011	1:19:40 PM	PHl3 MFC set to  0.000000
3/9/2011	1:19:40 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:19:40 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:19:40 PM	Tube furnace set to 0
3/9/2011	1:19:41 PM	Helium valve closed
3/9/2011	1:19:41 PM	H2 valve closed
3/9/2011	1:19:41 PM	BCl3 valve closed
3/9/2011	1:19:41 PM	PH3 valve closed
3/9/2011	1:19:41 PM	SiCl4 pre valve closed
3/9/2011	1:19:41 PM	SiCl4 post valve closed
3/9/2011	1:19:41 PM	Bubbler valve closed
3/9/2011	1:19:41 PM	Main Vac valve opened
3/9/2011	1:19:41 PM	Bypass valve opened
3/9/2011	1:19:41 PM	Helium MFC set to  0.000000
3/9/2011	1:19:41 PM	H2 MFC set to  0.000000
3/9/2011	1:19:41 PM	BCl3 MFC set to  0.000000
3/9/2011	1:19:41 PM	PHl3 MFC set to  0.000000
3/9/2011	1:19:41 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:19:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:19:41 PM	Tube furnace set to 0
3/9/2011	1:20:41 PM	H2 valve closed
3/9/2011	1:20:41 PM	BCl3 valve closed
3/9/2011	1:20:41 PM	PH3 valve closed
3/9/2011	1:20:41 PM	SiCl4 pre valve closed
3/9/2011	1:20:41 PM	SiCl4 post valve closed
3/9/2011	1:20:41 PM	Bubbler valve closed
3/9/2011	1:20:41 PM	Helium valve opened
3/9/2011	1:20:41 PM	Main Vac valve opened
3/9/2011	1:20:41 PM	Bypass valve opened
3/9/2011	1:20:41 PM	Helium MFC set to  100.000000
3/9/2011	1:20:41 PM	H2 MFC set to  0.000000
3/9/2011	1:20:41 PM	BCl3 MFC set to  0.000000
3/9/2011	1:20:41 PM	PHl3 MFC set to  0.000000
3/9/2011	1:20:41 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:20:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:20:41 PM	Tube furnace set to 0
3/9/2011	1:21:41 PM	Helium valve closed
3/9/2011	1:21:41 PM	H2 valve closed
3/9/2011	1:21:41 PM	BCl3 valve closed
3/9/2011	1:21:41 PM	PH3 valve closed
3/9/2011	1:21:41 PM	SiCl4 pre valve closed
3/9/2011	1:21:41 PM	SiCl4 post valve closed
3/9/2011	1:21:41 PM	Bubbler valve closed
3/9/2011	1:21:41 PM	Main Vac valve opened
3/9/2011	1:21:41 PM	Bypass valve opened
3/9/2011	1:21:41 PM	Helium MFC set to  0.000000
3/9/2011	1:21:41 PM	H2 MFC set to  0.000000
3/9/2011	1:21:41 PM	BCl3 MFC set to  0.000000
3/9/2011	1:21:41 PM	PHl3 MFC set to  0.000000
3/9/2011	1:21:41 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:21:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:21:41 PM	Tube furnace set to 0
3/9/2011	1:22:41 PM	H2 valve closed
3/9/2011	1:22:41 PM	BCl3 valve closed
3/9/2011	1:22:41 PM	PH3 valve closed
3/9/2011	1:22:41 PM	SiCl4 pre valve closed
3/9/2011	1:22:41 PM	SiCl4 post valve closed
3/9/2011	1:22:41 PM	Bubbler valve closed
3/9/2011	1:22:41 PM	Helium valve opened
3/9/2011	1:22:41 PM	Main Vac valve opened
3/9/2011	1:22:41 PM	Bypass valve opened
3/9/2011	1:22:41 PM	Helium MFC set to  100.000000
3/9/2011	1:22:41 PM	H2 MFC set to  0.000000
3/9/2011	1:22:41 PM	BCl3 MFC set to  0.000000
3/9/2011	1:22:41 PM	PHl3 MFC set to  0.000000
3/9/2011	1:22:41 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:22:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:22:41 PM	Tube furnace set to 0
3/9/2011	1:23:41 PM	Helium valve closed
3/9/2011	1:23:41 PM	H2 valve closed
3/9/2011	1:23:41 PM	BCl3 valve closed
3/9/2011	1:23:41 PM	PH3 valve closed
3/9/2011	1:23:41 PM	SiCl4 pre valve closed
3/9/2011	1:23:41 PM	SiCl4 post valve closed
3/9/2011	1:23:41 PM	Bubbler valve closed
3/9/2011	1:23:41 PM	Main Vac valve opened
3/9/2011	1:23:41 PM	Bypass valve opened
3/9/2011	1:23:41 PM	Helium MFC set to  0.000000
3/9/2011	1:23:41 PM	H2 MFC set to  0.000000
3/9/2011	1:23:41 PM	BCl3 MFC set to  0.000000
3/9/2011	1:23:41 PM	PHl3 MFC set to  0.000000
3/9/2011	1:23:41 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:23:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:23:42 PM	Tube furnace set to 0
3/9/2011	1:24:42 PM	H2 valve closed
3/9/2011	1:24:42 PM	BCl3 valve closed
3/9/2011	1:24:42 PM	PH3 valve closed
3/9/2011	1:24:42 PM	SiCl4 pre valve closed
3/9/2011	1:24:42 PM	SiCl4 post valve closed
3/9/2011	1:24:42 PM	Bubbler valve closed
3/9/2011	1:24:42 PM	Helium valve opened
3/9/2011	1:24:42 PM	Main Vac valve opened
3/9/2011	1:24:42 PM	Bypass valve opened
3/9/2011	1:24:42 PM	Helium MFC set to  100.000000
3/9/2011	1:24:42 PM	H2 MFC set to  0.000000
3/9/2011	1:24:42 PM	BCl3 MFC set to  0.000000
3/9/2011	1:24:42 PM	PHl3 MFC set to  0.000000
3/9/2011	1:24:42 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:24:42 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:24:42 PM	Tube furnace set to 0
3/9/2011	1:25:42 PM	Helium valve closed
3/9/2011	1:25:42 PM	H2 valve closed
3/9/2011	1:25:42 PM	BCl3 valve closed
3/9/2011	1:25:42 PM	PH3 valve closed
3/9/2011	1:25:42 PM	SiCl4 pre valve closed
3/9/2011	1:25:42 PM	SiCl4 post valve closed
3/9/2011	1:25:42 PM	Bubbler valve closed
3/9/2011	1:25:42 PM	Main Vac valve opened
3/9/2011	1:25:42 PM	Bypass valve opened
3/9/2011	1:25:42 PM	Helium MFC set to  0.000000
3/9/2011	1:25:42 PM	H2 MFC set to  0.000000
3/9/2011	1:25:42 PM	BCl3 MFC set to  0.000000
3/9/2011	1:25:42 PM	PHl3 MFC set to  0.000000
3/9/2011	1:25:42 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:25:42 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:25:42 PM	Tube furnace set to 0
3/9/2011	1:26:42 PM	H2 valve closed
3/9/2011	1:26:42 PM	BCl3 valve closed
3/9/2011	1:26:42 PM	PH3 valve closed
3/9/2011	1:26:42 PM	SiCl4 pre valve closed
3/9/2011	1:26:42 PM	SiCl4 post valve closed
3/9/2011	1:26:42 PM	Bubbler valve closed
3/9/2011	1:26:42 PM	Helium valve opened
3/9/2011	1:26:42 PM	Main Vac valve opened
3/9/2011	1:26:42 PM	Bypass valve opened
3/9/2011	1:26:42 PM	Helium MFC set to  100.000000
3/9/2011	1:26:42 PM	H2 MFC set to  0.000000
3/9/2011	1:26:42 PM	BCl3 MFC set to  0.000000
3/9/2011	1:26:42 PM	PHl3 MFC set to  0.000000
3/9/2011	1:26:42 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:26:42 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:26:42 PM	Tube furnace set to 0
3/9/2011	1:27:42 PM	Helium valve closed
3/9/2011	1:27:42 PM	H2 valve closed
3/9/2011	1:27:42 PM	BCl3 valve closed
3/9/2011	1:27:42 PM	PH3 valve closed
3/9/2011	1:27:42 PM	SiCl4 pre valve closed
3/9/2011	1:27:42 PM	SiCl4 post valve closed
3/9/2011	1:27:42 PM	Bubbler valve closed
3/9/2011	1:27:42 PM	Main Vac valve opened
3/9/2011	1:27:42 PM	Bypass valve opened
3/9/2011	1:27:42 PM	Helium MFC set to  0.000000
3/9/2011	1:27:42 PM	H2 MFC set to  0.000000
3/9/2011	1:27:42 PM	BCl3 MFC set to  0.000000
3/9/2011	1:27:42 PM	PHl3 MFC set to  0.000000
3/9/2011	1:27:42 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:27:42 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:27:42 PM	Tube furnace set to 0
3/9/2011	1:28:42 PM	H2 valve closed
3/9/2011	1:28:42 PM	BCl3 valve closed
3/9/2011	1:28:42 PM	PH3 valve closed
3/9/2011	1:28:42 PM	SiCl4 pre valve closed
3/9/2011	1:28:42 PM	SiCl4 post valve closed
3/9/2011	1:28:42 PM	Bubbler valve closed
3/9/2011	1:28:42 PM	Helium valve opened
3/9/2011	1:28:42 PM	Main Vac valve opened
3/9/2011	1:28:42 PM	Bypass valve opened
3/9/2011	1:28:42 PM	Helium MFC set to  100.000000
3/9/2011	1:28:42 PM	H2 MFC set to  0.000000
3/9/2011	1:28:42 PM	BCl3 MFC set to  0.000000
3/9/2011	1:28:42 PM	PHl3 MFC set to  0.000000
3/9/2011	1:28:42 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:28:42 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:28:43 PM	Tube furnace set to 0
3/9/2011	1:29:43 PM	Helium valve closed
3/9/2011	1:29:43 PM	H2 valve closed
3/9/2011	1:29:43 PM	BCl3 valve closed
3/9/2011	1:29:43 PM	PH3 valve closed
3/9/2011	1:29:43 PM	SiCl4 pre valve closed
3/9/2011	1:29:43 PM	SiCl4 post valve closed
3/9/2011	1:29:43 PM	Bubbler valve closed
3/9/2011	1:29:43 PM	Main Vac valve opened
3/9/2011	1:29:43 PM	Bypass valve opened
3/9/2011	1:29:43 PM	Helium MFC set to  0.000000
3/9/2011	1:29:43 PM	H2 MFC set to  0.000000
3/9/2011	1:29:43 PM	BCl3 MFC set to  0.000000
3/9/2011	1:29:43 PM	PHl3 MFC set to  0.000000
3/9/2011	1:29:43 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:29:43 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:29:43 PM	Tube furnace set to 0
3/9/2011	1:30:43 PM	H2 valve closed
3/9/2011	1:30:43 PM	BCl3 valve closed
3/9/2011	1:30:43 PM	PH3 valve closed
3/9/2011	1:30:43 PM	SiCl4 pre valve closed
3/9/2011	1:30:43 PM	SiCl4 post valve closed
3/9/2011	1:30:43 PM	Bubbler valve closed
3/9/2011	1:30:43 PM	Helium valve opened
3/9/2011	1:30:43 PM	Main Vac valve opened
3/9/2011	1:30:43 PM	Bypass valve opened
3/9/2011	1:30:43 PM	Helium MFC set to  100.000000
3/9/2011	1:30:43 PM	H2 MFC set to  0.000000
3/9/2011	1:30:43 PM	BCl3 MFC set to  0.000000
3/9/2011	1:30:43 PM	PHl3 MFC set to  0.000000
3/9/2011	1:30:43 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:30:43 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:30:43 PM	Tube furnace set to 0
3/9/2011	1:31:43 PM	Helium valve closed
3/9/2011	1:31:43 PM	H2 valve closed
3/9/2011	1:31:43 PM	BCl3 valve closed
3/9/2011	1:31:43 PM	PH3 valve closed
3/9/2011	1:31:43 PM	SiCl4 pre valve closed
3/9/2011	1:31:43 PM	SiCl4 post valve closed
3/9/2011	1:31:43 PM	Bubbler valve closed
3/9/2011	1:31:43 PM	Main Vac valve opened
3/9/2011	1:31:43 PM	Bypass valve opened
3/9/2011	1:31:43 PM	Helium MFC set to  0.000000
3/9/2011	1:31:43 PM	H2 MFC set to  0.000000
3/9/2011	1:31:43 PM	BCl3 MFC set to  0.000000
3/9/2011	1:31:43 PM	PHl3 MFC set to  0.000000
3/9/2011	1:31:43 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:31:43 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:31:43 PM	Tube furnace set to 0
3/9/2011	1:32:43 PM	H2 valve closed
3/9/2011	1:32:43 PM	BCl3 valve closed
3/9/2011	1:32:43 PM	PH3 valve closed
3/9/2011	1:32:43 PM	SiCl4 pre valve closed
3/9/2011	1:32:43 PM	SiCl4 post valve closed
3/9/2011	1:32:43 PM	Bubbler valve closed
3/9/2011	1:32:43 PM	Helium valve opened
3/9/2011	1:32:43 PM	Main Vac valve opened
3/9/2011	1:32:43 PM	Bypass valve opened
3/9/2011	1:32:43 PM	Helium MFC set to  100.000000
3/9/2011	1:32:43 PM	H2 MFC set to  0.000000
3/9/2011	1:32:43 PM	BCl3 MFC set to  0.000000
3/9/2011	1:32:43 PM	PHl3 MFC set to  0.000000
3/9/2011	1:32:43 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:32:43 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:32:43 PM	Tube furnace set to 0
3/9/2011	1:33:43 PM	Helium valve closed
3/9/2011	1:33:43 PM	H2 valve closed
3/9/2011	1:33:43 PM	BCl3 valve closed
3/9/2011	1:33:43 PM	PH3 valve closed
3/9/2011	1:33:43 PM	SiCl4 pre valve closed
3/9/2011	1:33:43 PM	SiCl4 post valve closed
3/9/2011	1:33:43 PM	Bubbler valve closed
3/9/2011	1:33:43 PM	Main Vac valve opened
3/9/2011	1:33:43 PM	Bypass valve opened
3/9/2011	1:33:43 PM	Helium MFC set to  0.000000
3/9/2011	1:33:43 PM	H2 MFC set to  0.000000
3/9/2011	1:33:43 PM	BCl3 MFC set to  0.000000
3/9/2011	1:33:43 PM	PHl3 MFC set to  0.000000
3/9/2011	1:33:43 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:33:43 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:33:44 PM	Tube furnace set to 0
3/9/2011	1:34:44 PM	H2 valve closed
3/9/2011	1:34:44 PM	BCl3 valve closed
3/9/2011	1:34:44 PM	PH3 valve closed
3/9/2011	1:34:44 PM	SiCl4 pre valve closed
3/9/2011	1:34:44 PM	SiCl4 post valve closed
3/9/2011	1:34:44 PM	Bubbler valve closed
3/9/2011	1:34:44 PM	Helium valve opened
3/9/2011	1:34:44 PM	Main Vac valve opened
3/9/2011	1:34:44 PM	Bypass valve opened
3/9/2011	1:34:44 PM	Helium MFC set to  100.000000
3/9/2011	1:34:44 PM	H2 MFC set to  0.000000
3/9/2011	1:34:44 PM	BCl3 MFC set to  0.000000
3/9/2011	1:34:44 PM	PHl3 MFC set to  0.000000
3/9/2011	1:34:44 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:34:44 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:34:44 PM	Tube furnace set to 0
3/9/2011	1:35:44 PM	Helium valve closed
3/9/2011	1:35:44 PM	H2 valve closed
3/9/2011	1:35:44 PM	BCl3 valve closed
3/9/2011	1:35:44 PM	PH3 valve closed
3/9/2011	1:35:44 PM	SiCl4 pre valve closed
3/9/2011	1:35:44 PM	SiCl4 post valve closed
3/9/2011	1:35:44 PM	Bubbler valve closed
3/9/2011	1:35:44 PM	Main Vac valve opened
3/9/2011	1:35:44 PM	Bypass valve opened
3/9/2011	1:35:44 PM	Helium MFC set to  0.000000
3/9/2011	1:35:44 PM	H2 MFC set to  0.000000
3/9/2011	1:35:44 PM	BCl3 MFC set to  0.000000
3/9/2011	1:35:44 PM	PHl3 MFC set to  0.000000
3/9/2011	1:35:44 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:35:44 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:35:44 PM	Tube furnace set to 0
3/9/2011	1:36:44 PM	H2 valve closed
3/9/2011	1:36:44 PM	BCl3 valve closed
3/9/2011	1:36:44 PM	PH3 valve closed
3/9/2011	1:36:44 PM	SiCl4 pre valve closed
3/9/2011	1:36:44 PM	SiCl4 post valve closed
3/9/2011	1:36:44 PM	Bubbler valve closed
3/9/2011	1:36:44 PM	Helium valve opened
3/9/2011	1:36:44 PM	Main Vac valve opened
3/9/2011	1:36:44 PM	Bypass valve opened
3/9/2011	1:36:44 PM	Helium MFC set to  100.000000
3/9/2011	1:36:44 PM	H2 MFC set to  0.000000
3/9/2011	1:36:44 PM	BCl3 MFC set to  0.000000
3/9/2011	1:36:44 PM	PHl3 MFC set to  0.000000
3/9/2011	1:36:44 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:36:44 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:36:44 PM	Tube furnace set to 0
3/9/2011	1:37:44 PM	Helium valve closed
3/9/2011	1:37:44 PM	H2 valve closed
3/9/2011	1:37:44 PM	BCl3 valve closed
3/9/2011	1:37:44 PM	PH3 valve closed
3/9/2011	1:37:44 PM	SiCl4 pre valve closed
3/9/2011	1:37:44 PM	SiCl4 post valve closed
3/9/2011	1:37:44 PM	Bubbler valve closed
3/9/2011	1:37:44 PM	Main Vac valve opened
3/9/2011	1:37:44 PM	Bypass valve opened
3/9/2011	1:37:44 PM	Helium MFC set to  0.000000
3/9/2011	1:37:44 PM	H2 MFC set to  0.000000
3/9/2011	1:37:44 PM	BCl3 MFC set to  0.000000
3/9/2011	1:37:44 PM	PHl3 MFC set to  0.000000
3/9/2011	1:37:44 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:37:44 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:37:44 PM	Tube furnace set to 0
3/9/2011	1:38:44 PM	H2 valve closed
3/9/2011	1:38:44 PM	BCl3 valve closed
3/9/2011	1:38:44 PM	PH3 valve closed
3/9/2011	1:38:44 PM	SiCl4 pre valve closed
3/9/2011	1:38:44 PM	SiCl4 post valve closed
3/9/2011	1:38:44 PM	Bubbler valve closed
3/9/2011	1:38:44 PM	Helium valve opened
3/9/2011	1:38:44 PM	Main Vac valve opened
3/9/2011	1:38:44 PM	Bypass valve opened
3/9/2011	1:38:44 PM	Helium MFC set to  100.000000
3/9/2011	1:38:44 PM	H2 MFC set to  0.000000
3/9/2011	1:38:44 PM	BCl3 MFC set to  0.000000
3/9/2011	1:38:44 PM	PHl3 MFC set to  0.000000
3/9/2011	1:38:44 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:38:44 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:38:45 PM	Tube furnace set to 0
3/9/2011	1:39:45 PM	Helium valve closed
3/9/2011	1:39:45 PM	H2 valve closed
3/9/2011	1:39:45 PM	BCl3 valve closed
3/9/2011	1:39:45 PM	PH3 valve closed
3/9/2011	1:39:45 PM	SiCl4 pre valve closed
3/9/2011	1:39:45 PM	SiCl4 post valve closed
3/9/2011	1:39:45 PM	Bubbler valve closed
3/9/2011	1:39:45 PM	Main Vac valve opened
3/9/2011	1:39:45 PM	Bypass valve opened
3/9/2011	1:39:45 PM	Helium MFC set to  0.000000
3/9/2011	1:39:45 PM	H2 MFC set to  0.000000
3/9/2011	1:39:45 PM	BCl3 MFC set to  0.000000
3/9/2011	1:39:45 PM	PHl3 MFC set to  0.000000
3/9/2011	1:39:45 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:39:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:39:45 PM	Tube furnace set to 0
3/9/2011	1:39:46 PM	Run finished at 1:39 PM
3/9/2011	1:39:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	1:45:34 PM	Recipe started at 1:45 PM
3/9/2011	1:45:34 PM	Helium valve closed
3/9/2011	1:45:34 PM	BCl3 valve closed
3/9/2011	1:45:34 PM	PH3 valve closed
3/9/2011	1:45:34 PM	SiCl4 pre valve closed
3/9/2011	1:45:34 PM	SiCl4 post valve closed
3/9/2011	1:45:34 PM	Main Vac valve closed
3/9/2011	1:45:34 PM	Bypass valve closed
3/9/2011	1:45:34 PM	Bubbler valve closed
3/9/2011	1:45:34 PM	H2 valve opened
3/9/2011	1:45:34 PM	Helium MFC set to  0.000000
3/9/2011	1:45:34 PM	H2 MFC set to  500.000000
3/9/2011	1:45:34 PM	BCl3 MFC set to  0.000000
3/9/2011	1:45:34 PM	PHl3 MFC set to  0.000000
3/9/2011	1:45:34 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:45:34 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:45:34 PM	Tube furnace set to 0
3/9/2011	1:46:54 PM	Helium valve closed
3/9/2011	1:46:54 PM	BCl3 valve closed
3/9/2011	1:46:54 PM	PH3 valve closed
3/9/2011	1:46:54 PM	SiCl4 pre valve closed
3/9/2011	1:46:54 PM	SiCl4 post valve closed
3/9/2011	1:46:54 PM	Main Vac valve closed
3/9/2011	1:46:54 PM	Bypass valve closed
3/9/2011	1:46:54 PM	H2 valve opened
3/9/2011	1:46:54 PM	Bubbler valve opened
3/9/2011	1:46:54 PM	Helium MFC set to  0.000000
3/9/2011	1:46:54 PM	H2 MFC set to  500.000000
3/9/2011	1:46:54 PM	BCl3 MFC set to  0.000000
3/9/2011	1:46:54 PM	PHl3 MFC set to  0.000000
3/9/2011	1:46:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	1:46:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	1:46:54 PM	Tube furnace set to 1000
3/9/2011	2:06:54 PM	Helium valve closed
3/9/2011	2:06:54 PM	PH3 valve closed
3/9/2011	2:06:54 PM	Main Vac valve closed
3/9/2011	2:06:54 PM	Bypass valve closed
3/9/2011	2:06:54 PM	H2 valve opened
3/9/2011	2:06:54 PM	BCl3 valve opened
3/9/2011	2:06:54 PM	SiCl4 pre valve opened
3/9/2011	2:06:54 PM	SiCl4 post valve opened
3/9/2011	2:06:54 PM	Bubbler valve opened
3/9/2011	2:06:54 PM	Helium MFC set to  0.000000
3/9/2011	2:06:54 PM	H2 MFC set to  500.000000
3/9/2011	2:06:54 PM	BCl3 MFC set to  3.000000
3/9/2011	2:06:54 PM	PHl3 MFC set to  0.000000
3/9/2011	2:06:54 PM	SiCl4 MFC set to  50.000000
3/9/2011	2:06:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:06:55 PM	Tube furnace set to 1000
3/9/2011	2:24:55 PM	H2 valve closed
3/9/2011	2:24:55 PM	BCl3 valve closed
3/9/2011	2:24:55 PM	PH3 valve closed
3/9/2011	2:24:55 PM	SiCl4 pre valve closed
3/9/2011	2:24:55 PM	SiCl4 post valve closed
3/9/2011	2:24:55 PM	Main Vac valve closed
3/9/2011	2:24:55 PM	Bypass valve closed
3/9/2011	2:24:55 PM	Helium valve opened
3/9/2011	2:24:55 PM	Bubbler valve opened
3/9/2011	2:24:55 PM	Helium MFC set to  500.000000
3/9/2011	2:24:55 PM	H2 MFC set to  0.000000
3/9/2011	2:24:55 PM	BCl3 MFC set to  0.000000
3/9/2011	2:24:55 PM	PHl3 MFC set to  0.000000
3/9/2011	2:24:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:24:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:24:55 PM	Tube furnace set to 0
3/9/2011	2:44:55 PM	Helium valve closed
3/9/2011	2:44:55 PM	H2 valve closed
3/9/2011	2:44:55 PM	BCl3 valve closed
3/9/2011	2:44:55 PM	PH3 valve closed
3/9/2011	2:44:55 PM	SiCl4 pre valve closed
3/9/2011	2:44:55 PM	SiCl4 post valve closed
3/9/2011	2:44:55 PM	Main Vac valve closed
3/9/2011	2:44:55 PM	Bypass valve closed
3/9/2011	2:44:55 PM	Bubbler valve closed
3/9/2011	2:44:55 PM	Helium MFC set to  0.000000
3/9/2011	2:44:55 PM	H2 MFC set to  0.000000
3/9/2011	2:44:55 PM	BCl3 MFC set to  0.000000
3/9/2011	2:44:55 PM	PHl3 MFC set to  0.000000
3/9/2011	2:44:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:44:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:44:55 PM	Tube furnace set to 0
3/9/2011	2:44:55 PM	Run finished at 2:44 PM
3/9/2011	2:48:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	2:48:02 PM	Recipe started at 2:48 PM
3/9/2011	2:48:02 PM	H2 valve closed
3/9/2011	2:48:02 PM	BCl3 valve closed
3/9/2011	2:48:02 PM	PH3 valve closed
3/9/2011	2:48:02 PM	SiCl4 pre valve closed
3/9/2011	2:48:02 PM	SiCl4 post valve closed
3/9/2011	2:48:02 PM	Main Vac valve closed
3/9/2011	2:48:02 PM	Bypass valve closed
3/9/2011	2:48:02 PM	Bubbler valve closed
3/9/2011	2:48:02 PM	Helium valve opened
3/9/2011	2:48:02 PM	Helium MFC set to  500.000000
3/9/2011	2:48:02 PM	H2 MFC set to  0.000000
3/9/2011	2:48:02 PM	BCl3 MFC set to  0.000000
3/9/2011	2:48:02 PM	PHl3 MFC set to  0.000000
3/9/2011	2:48:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:48:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:48:02 PM	Tube furnace set to 0
3/9/2011	2:48:03 PM	Helium valve closed
3/9/2011	2:48:03 PM	H2 valve closed
3/9/2011	2:48:03 PM	BCl3 valve closed
3/9/2011	2:48:03 PM	PH3 valve closed
3/9/2011	2:48:03 PM	SiCl4 pre valve closed
3/9/2011	2:48:03 PM	SiCl4 post valve closed
3/9/2011	2:48:03 PM	Main Vac valve closed
3/9/2011	2:48:03 PM	Bypass valve closed
3/9/2011	2:48:03 PM	Bubbler valve closed
3/9/2011	2:48:03 PM	Helium MFC set to  0.000000
3/9/2011	2:48:03 PM	H2 MFC set to  0.000000
3/9/2011	2:48:03 PM	BCl3 MFC set to  0.000000
3/9/2011	2:48:03 PM	PHl3 MFC set to  0.000000
3/9/2011	2:48:03 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:48:03 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:48:03 PM	Tube furnace set to 0
3/9/2011	2:48:03 PM	Run finished at 2:48 PM
3/9/2011	2:48:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	2:49:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	2:49:57 PM	Recipe started at 2:49 PM
3/9/2011	2:49:57 PM	H2 valve closed
3/9/2011	2:49:57 PM	BCl3 valve closed
3/9/2011	2:49:57 PM	PH3 valve closed
3/9/2011	2:49:57 PM	SiCl4 pre valve closed
3/9/2011	2:49:57 PM	SiCl4 post valve closed
3/9/2011	2:49:57 PM	Main Vac valve closed
3/9/2011	2:49:57 PM	Bypass valve closed
3/9/2011	2:49:57 PM	Bubbler valve closed
3/9/2011	2:49:57 PM	Helium valve opened
3/9/2011	2:49:57 PM	Helium MFC set to  500.000000
3/9/2011	2:49:57 PM	H2 MFC set to  0.000000
3/9/2011	2:49:57 PM	BCl3 MFC set to  0.000000
3/9/2011	2:49:57 PM	PHl3 MFC set to  0.000000
3/9/2011	2:49:57 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:49:57 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:49:57 PM	Tube furnace set to 0
3/9/2011	2:49:57 PM	Helium valve closed
3/9/2011	2:49:57 PM	H2 valve closed
3/9/2011	2:49:57 PM	BCl3 valve closed
3/9/2011	2:49:57 PM	PH3 valve closed
3/9/2011	2:49:58 PM	SiCl4 pre valve closed
3/9/2011	2:49:58 PM	SiCl4 post valve closed
3/9/2011	2:49:58 PM	Main Vac valve closed
3/9/2011	2:49:58 PM	Bypass valve closed
3/9/2011	2:49:58 PM	Bubbler valve closed
3/9/2011	2:49:58 PM	Helium MFC set to  0.000000
3/9/2011	2:49:58 PM	H2 MFC set to  0.000000
3/9/2011	2:49:58 PM	BCl3 MFC set to  0.000000
3/9/2011	2:49:58 PM	PHl3 MFC set to  0.000000
3/9/2011	2:49:58 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:49:58 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:49:58 PM	Tube furnace set to 0
3/9/2011	2:49:58 PM	Run finished at 2:49 PM
3/9/2011	2:49:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	2:56:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	2:56:01 PM	Recipe started at 2:56 PM
3/9/2011	2:56:01 PM	Helium valve closed
3/9/2011	2:56:01 PM	H2 valve closed
3/9/2011	2:56:01 PM	BCl3 valve closed
3/9/2011	2:56:01 PM	PH3 valve closed
3/9/2011	2:56:01 PM	SiCl4 pre valve closed
3/9/2011	2:56:01 PM	SiCl4 post valve closed
3/9/2011	2:56:01 PM	Main Vac valve closed
3/9/2011	2:56:01 PM	Bubbler valve closed
3/9/2011	2:56:01 PM	Bypass valve opened
3/9/2011	2:56:01 PM	Helium MFC set to  0.000000
3/9/2011	2:56:01 PM	H2 MFC set to  0.000000
3/9/2011	2:56:01 PM	BCl3 MFC set to  0.000000
3/9/2011	2:56:01 PM	PHl3 MFC set to  0.000000
3/9/2011	2:56:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:56:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:56:01 PM	Tube furnace set to 0
3/9/2011	2:56:33 PM	Helium valve closed
3/9/2011	2:56:33 PM	H2 valve closed
3/9/2011	2:56:33 PM	BCl3 valve closed
3/9/2011	2:56:33 PM	PH3 valve closed
3/9/2011	2:56:33 PM	SiCl4 pre valve closed
3/9/2011	2:56:33 PM	SiCl4 post valve closed
3/9/2011	2:56:33 PM	Bubbler valve closed
3/9/2011	2:56:33 PM	Main Vac valve opened
3/9/2011	2:56:33 PM	Bypass valve opened
3/9/2011	2:56:33 PM	Helium MFC set to  0.000000
3/9/2011	2:56:33 PM	H2 MFC set to  0.000000
3/9/2011	2:56:33 PM	BCl3 MFC set to  0.000000
3/9/2011	2:56:33 PM	PHl3 MFC set to  0.000000
3/9/2011	2:56:33 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:56:33 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:56:33 PM	Tube furnace set to 0
3/9/2011	2:56:33 PM	Run finished at 2:56 PM
3/9/2011	2:56:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	2:58:07 PM	Bypass valve closed
3/9/2011	2:58:10 PM	Main Vac valve closed
3/9/2011	2:58:18 PM	Main Vac valve opened
3/9/2011	2:58:21 PM	Bypass valve opened
3/9/2011	2:59:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	2:59:14 PM	Recipe started at 2:59 PM
3/9/2011	2:59:14 PM	Helium valve closed
3/9/2011	2:59:14 PM	H2 valve closed
3/9/2011	2:59:14 PM	BCl3 valve closed
3/9/2011	2:59:14 PM	PH3 valve closed
3/9/2011	2:59:14 PM	SiCl4 pre valve closed
3/9/2011	2:59:14 PM	SiCl4 post valve closed
3/9/2011	2:59:14 PM	Main Vac valve closed
3/9/2011	2:59:14 PM	Bubbler valve closed
3/9/2011	2:59:14 PM	Bypass valve opened
3/9/2011	2:59:14 PM	Helium MFC set to  0.000000
3/9/2011	2:59:14 PM	H2 MFC set to  0.000000
3/9/2011	2:59:14 PM	BCl3 MFC set to  0.000000
3/9/2011	2:59:14 PM	PHl3 MFC set to  0.000000
3/9/2011	2:59:14 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:59:14 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:59:14 PM	Tube furnace set to 0
3/9/2011	2:59:14 PM	Helium valve closed
3/9/2011	2:59:14 PM	H2 valve closed
3/9/2011	2:59:14 PM	BCl3 valve closed
3/9/2011	2:59:14 PM	PH3 valve closed
3/9/2011	2:59:14 PM	SiCl4 pre valve closed
3/9/2011	2:59:14 PM	SiCl4 post valve closed
3/9/2011	2:59:14 PM	Bubbler valve closed
3/9/2011	2:59:14 PM	Main Vac valve opened
3/9/2011	2:59:14 PM	Bypass valve opened
3/9/2011	2:59:14 PM	Helium MFC set to  0.000000
3/9/2011	2:59:14 PM	H2 MFC set to  0.000000
3/9/2011	2:59:14 PM	BCl3 MFC set to  0.000000
3/9/2011	2:59:14 PM	PHl3 MFC set to  0.000000
3/9/2011	2:59:14 PM	SiCl4 MFC set to  0.000000
3/9/2011	2:59:14 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	2:59:14 PM	Tube furnace set to 0
3/9/2011	3:00:14 PM	H2 valve closed
3/9/2011	3:00:14 PM	BCl3 valve closed
3/9/2011	3:00:14 PM	PH3 valve closed
3/9/2011	3:00:14 PM	SiCl4 pre valve closed
3/9/2011	3:00:14 PM	SiCl4 post valve closed
3/9/2011	3:00:14 PM	Bubbler valve closed
3/9/2011	3:00:14 PM	Helium valve opened
3/9/2011	3:00:14 PM	Main Vac valve opened
3/9/2011	3:00:14 PM	Bypass valve opened
3/9/2011	3:00:14 PM	Helium MFC set to  100.000000
3/9/2011	3:00:14 PM	H2 MFC set to  0.000000
3/9/2011	3:00:14 PM	BCl3 MFC set to  0.000000
3/9/2011	3:00:14 PM	PHl3 MFC set to  0.000000
3/9/2011	3:00:14 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:00:14 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:00:15 PM	Tube furnace set to 0
3/9/2011	3:01:15 PM	Helium valve closed
3/9/2011	3:01:15 PM	H2 valve closed
3/9/2011	3:01:15 PM	BCl3 valve closed
3/9/2011	3:01:15 PM	PH3 valve closed
3/9/2011	3:01:15 PM	SiCl4 pre valve closed
3/9/2011	3:01:15 PM	SiCl4 post valve closed
3/9/2011	3:01:15 PM	Bubbler valve closed
3/9/2011	3:01:15 PM	Main Vac valve opened
3/9/2011	3:01:15 PM	Bypass valve opened
3/9/2011	3:01:15 PM	Helium MFC set to  0.000000
3/9/2011	3:01:15 PM	H2 MFC set to  0.000000
3/9/2011	3:01:15 PM	BCl3 MFC set to  0.000000
3/9/2011	3:01:15 PM	PHl3 MFC set to  0.000000
3/9/2011	3:01:15 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:01:15 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:01:15 PM	Tube furnace set to 0
3/9/2011	3:02:15 PM	H2 valve closed
3/9/2011	3:02:15 PM	BCl3 valve closed
3/9/2011	3:02:15 PM	PH3 valve closed
3/9/2011	3:02:15 PM	SiCl4 pre valve closed
3/9/2011	3:02:15 PM	SiCl4 post valve closed
3/9/2011	3:02:15 PM	Bubbler valve closed
3/9/2011	3:02:15 PM	Helium valve opened
3/9/2011	3:02:15 PM	Main Vac valve opened
3/9/2011	3:02:15 PM	Bypass valve opened
3/9/2011	3:02:15 PM	Helium MFC set to  100.000000
3/9/2011	3:02:15 PM	H2 MFC set to  0.000000
3/9/2011	3:02:15 PM	BCl3 MFC set to  0.000000
3/9/2011	3:02:15 PM	PHl3 MFC set to  0.000000
3/9/2011	3:02:15 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:02:15 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:02:15 PM	Tube furnace set to 0
3/9/2011	3:03:15 PM	Helium valve closed
3/9/2011	3:03:15 PM	H2 valve closed
3/9/2011	3:03:15 PM	BCl3 valve closed
3/9/2011	3:03:15 PM	PH3 valve closed
3/9/2011	3:03:15 PM	SiCl4 pre valve closed
3/9/2011	3:03:15 PM	SiCl4 post valve closed
3/9/2011	3:03:15 PM	Bubbler valve closed
3/9/2011	3:03:15 PM	Main Vac valve opened
3/9/2011	3:03:15 PM	Bypass valve opened
3/9/2011	3:03:15 PM	Helium MFC set to  0.000000
3/9/2011	3:03:15 PM	H2 MFC set to  0.000000
3/9/2011	3:03:15 PM	BCl3 MFC set to  0.000000
3/9/2011	3:03:15 PM	PHl3 MFC set to  0.000000
3/9/2011	3:03:15 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:03:15 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:03:15 PM	Tube furnace set to 0
3/9/2011	3:04:15 PM	H2 valve closed
3/9/2011	3:04:15 PM	BCl3 valve closed
3/9/2011	3:04:15 PM	PH3 valve closed
3/9/2011	3:04:15 PM	SiCl4 pre valve closed
3/9/2011	3:04:15 PM	SiCl4 post valve closed
3/9/2011	3:04:15 PM	Bubbler valve closed
3/9/2011	3:04:15 PM	Helium valve opened
3/9/2011	3:04:15 PM	Main Vac valve opened
3/9/2011	3:04:15 PM	Bypass valve opened
3/9/2011	3:04:15 PM	Helium MFC set to  100.000000
3/9/2011	3:04:15 PM	H2 MFC set to  0.000000
3/9/2011	3:04:15 PM	BCl3 MFC set to  0.000000
3/9/2011	3:04:15 PM	PHl3 MFC set to  0.000000
3/9/2011	3:04:15 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:04:15 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:04:15 PM	Tube furnace set to 0
3/9/2011	3:05:15 PM	Helium valve closed
3/9/2011	3:05:15 PM	H2 valve closed
3/9/2011	3:05:15 PM	BCl3 valve closed
3/9/2011	3:05:15 PM	PH3 valve closed
3/9/2011	3:05:15 PM	SiCl4 pre valve closed
3/9/2011	3:05:15 PM	SiCl4 post valve closed
3/9/2011	3:05:15 PM	Bubbler valve closed
3/9/2011	3:05:15 PM	Main Vac valve opened
3/9/2011	3:05:15 PM	Bypass valve opened
3/9/2011	3:05:15 PM	Helium MFC set to  0.000000
3/9/2011	3:05:15 PM	H2 MFC set to  0.000000
3/9/2011	3:05:15 PM	BCl3 MFC set to  0.000000
3/9/2011	3:05:15 PM	PHl3 MFC set to  0.000000
3/9/2011	3:05:15 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:05:15 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:05:16 PM	Tube furnace set to 0
3/9/2011	3:06:16 PM	H2 valve closed
3/9/2011	3:06:16 PM	BCl3 valve closed
3/9/2011	3:06:16 PM	PH3 valve closed
3/9/2011	3:06:16 PM	SiCl4 pre valve closed
3/9/2011	3:06:16 PM	SiCl4 post valve closed
3/9/2011	3:06:16 PM	Bubbler valve closed
3/9/2011	3:06:16 PM	Helium valve opened
3/9/2011	3:06:16 PM	Main Vac valve opened
3/9/2011	3:06:16 PM	Bypass valve opened
3/9/2011	3:06:16 PM	Helium MFC set to  100.000000
3/9/2011	3:06:16 PM	H2 MFC set to  0.000000
3/9/2011	3:06:16 PM	BCl3 MFC set to  0.000000
3/9/2011	3:06:16 PM	PHl3 MFC set to  0.000000
3/9/2011	3:06:16 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:06:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:06:16 PM	Tube furnace set to 0
3/9/2011	3:07:16 PM	Helium valve closed
3/9/2011	3:07:16 PM	H2 valve closed
3/9/2011	3:07:16 PM	BCl3 valve closed
3/9/2011	3:07:16 PM	PH3 valve closed
3/9/2011	3:07:16 PM	SiCl4 pre valve closed
3/9/2011	3:07:16 PM	SiCl4 post valve closed
3/9/2011	3:07:16 PM	Bubbler valve closed
3/9/2011	3:07:16 PM	Main Vac valve opened
3/9/2011	3:07:16 PM	Bypass valve opened
3/9/2011	3:07:16 PM	Helium MFC set to  0.000000
3/9/2011	3:07:16 PM	H2 MFC set to  0.000000
3/9/2011	3:07:16 PM	BCl3 MFC set to  0.000000
3/9/2011	3:07:16 PM	PHl3 MFC set to  0.000000
3/9/2011	3:07:16 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:07:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:07:16 PM	Tube furnace set to 0
3/9/2011	3:08:16 PM	H2 valve closed
3/9/2011	3:08:16 PM	BCl3 valve closed
3/9/2011	3:08:16 PM	PH3 valve closed
3/9/2011	3:08:16 PM	SiCl4 pre valve closed
3/9/2011	3:08:16 PM	SiCl4 post valve closed
3/9/2011	3:08:16 PM	Bubbler valve closed
3/9/2011	3:08:16 PM	Helium valve opened
3/9/2011	3:08:16 PM	Main Vac valve opened
3/9/2011	3:08:16 PM	Bypass valve opened
3/9/2011	3:08:16 PM	Helium MFC set to  100.000000
3/9/2011	3:08:16 PM	H2 MFC set to  0.000000
3/9/2011	3:08:16 PM	BCl3 MFC set to  0.000000
3/9/2011	3:08:16 PM	PHl3 MFC set to  0.000000
3/9/2011	3:08:16 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:08:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:08:16 PM	Tube furnace set to 0
3/9/2011	3:09:16 PM	Helium valve closed
3/9/2011	3:09:16 PM	H2 valve closed
3/9/2011	3:09:16 PM	BCl3 valve closed
3/9/2011	3:09:16 PM	PH3 valve closed
3/9/2011	3:09:16 PM	SiCl4 pre valve closed
3/9/2011	3:09:16 PM	SiCl4 post valve closed
3/9/2011	3:09:16 PM	Bubbler valve closed
3/9/2011	3:09:16 PM	Main Vac valve opened
3/9/2011	3:09:16 PM	Bypass valve opened
3/9/2011	3:09:16 PM	Helium MFC set to  0.000000
3/9/2011	3:09:16 PM	H2 MFC set to  0.000000
3/9/2011	3:09:16 PM	BCl3 MFC set to  0.000000
3/9/2011	3:09:16 PM	PHl3 MFC set to  0.000000
3/9/2011	3:09:16 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:09:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:09:16 PM	Tube furnace set to 0
3/9/2011	3:10:16 PM	H2 valve closed
3/9/2011	3:10:16 PM	BCl3 valve closed
3/9/2011	3:10:16 PM	PH3 valve closed
3/9/2011	3:10:16 PM	SiCl4 pre valve closed
3/9/2011	3:10:16 PM	SiCl4 post valve closed
3/9/2011	3:10:16 PM	Bubbler valve closed
3/9/2011	3:10:16 PM	Helium valve opened
3/9/2011	3:10:16 PM	Main Vac valve opened
3/9/2011	3:10:16 PM	Bypass valve opened
3/9/2011	3:10:16 PM	Helium MFC set to  100.000000
3/9/2011	3:10:16 PM	H2 MFC set to  0.000000
3/9/2011	3:10:16 PM	BCl3 MFC set to  0.000000
3/9/2011	3:10:16 PM	PHl3 MFC set to  0.000000
3/9/2011	3:10:16 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:10:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:10:17 PM	Tube furnace set to 0
3/9/2011	3:11:17 PM	Helium valve closed
3/9/2011	3:11:17 PM	H2 valve closed
3/9/2011	3:11:17 PM	BCl3 valve closed
3/9/2011	3:11:17 PM	PH3 valve closed
3/9/2011	3:11:17 PM	SiCl4 pre valve closed
3/9/2011	3:11:17 PM	SiCl4 post valve closed
3/9/2011	3:11:17 PM	Bubbler valve closed
3/9/2011	3:11:17 PM	Main Vac valve opened
3/9/2011	3:11:17 PM	Bypass valve opened
3/9/2011	3:11:17 PM	Helium MFC set to  0.000000
3/9/2011	3:11:17 PM	H2 MFC set to  0.000000
3/9/2011	3:11:17 PM	BCl3 MFC set to  0.000000
3/9/2011	3:11:17 PM	PHl3 MFC set to  0.000000
3/9/2011	3:11:17 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:11:17 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:11:17 PM	Tube furnace set to 0
3/9/2011	3:12:17 PM	H2 valve closed
3/9/2011	3:12:17 PM	BCl3 valve closed
3/9/2011	3:12:17 PM	PH3 valve closed
3/9/2011	3:12:17 PM	SiCl4 pre valve closed
3/9/2011	3:12:17 PM	SiCl4 post valve closed
3/9/2011	3:12:17 PM	Bubbler valve closed
3/9/2011	3:12:17 PM	Helium valve opened
3/9/2011	3:12:17 PM	Main Vac valve opened
3/9/2011	3:12:17 PM	Bypass valve opened
3/9/2011	3:12:17 PM	Helium MFC set to  100.000000
3/9/2011	3:12:17 PM	H2 MFC set to  0.000000
3/9/2011	3:12:17 PM	BCl3 MFC set to  0.000000
3/9/2011	3:12:17 PM	PHl3 MFC set to  0.000000
3/9/2011	3:12:17 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:12:17 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:12:17 PM	Tube furnace set to 0
3/9/2011	3:13:17 PM	Helium valve closed
3/9/2011	3:13:17 PM	H2 valve closed
3/9/2011	3:13:17 PM	BCl3 valve closed
3/9/2011	3:13:17 PM	PH3 valve closed
3/9/2011	3:13:17 PM	SiCl4 pre valve closed
3/9/2011	3:13:17 PM	SiCl4 post valve closed
3/9/2011	3:13:17 PM	Bubbler valve closed
3/9/2011	3:13:17 PM	Main Vac valve opened
3/9/2011	3:13:17 PM	Bypass valve opened
3/9/2011	3:13:17 PM	Helium MFC set to  0.000000
3/9/2011	3:13:17 PM	H2 MFC set to  0.000000
3/9/2011	3:13:17 PM	BCl3 MFC set to  0.000000
3/9/2011	3:13:17 PM	PHl3 MFC set to  0.000000
3/9/2011	3:13:17 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:13:17 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:13:17 PM	Tube furnace set to 0
3/9/2011	3:14:17 PM	H2 valve closed
3/9/2011	3:14:17 PM	BCl3 valve closed
3/9/2011	3:14:17 PM	PH3 valve closed
3/9/2011	3:14:17 PM	SiCl4 pre valve closed
3/9/2011	3:14:17 PM	SiCl4 post valve closed
3/9/2011	3:14:17 PM	Bubbler valve closed
3/9/2011	3:14:17 PM	Helium valve opened
3/9/2011	3:14:17 PM	Main Vac valve opened
3/9/2011	3:14:17 PM	Bypass valve opened
3/9/2011	3:14:17 PM	Helium MFC set to  100.000000
3/9/2011	3:14:17 PM	H2 MFC set to  0.000000
3/9/2011	3:14:17 PM	BCl3 MFC set to  0.000000
3/9/2011	3:14:17 PM	PHl3 MFC set to  0.000000
3/9/2011	3:14:17 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:14:17 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:14:17 PM	Tube furnace set to 0
3/9/2011	3:15:17 PM	Helium valve closed
3/9/2011	3:15:17 PM	H2 valve closed
3/9/2011	3:15:17 PM	BCl3 valve closed
3/9/2011	3:15:17 PM	PH3 valve closed
3/9/2011	3:15:17 PM	SiCl4 pre valve closed
3/9/2011	3:15:17 PM	SiCl4 post valve closed
3/9/2011	3:15:17 PM	Bubbler valve closed
3/9/2011	3:15:17 PM	Main Vac valve opened
3/9/2011	3:15:17 PM	Bypass valve opened
3/9/2011	3:15:17 PM	Helium MFC set to  0.000000
3/9/2011	3:15:17 PM	H2 MFC set to  0.000000
3/9/2011	3:15:17 PM	BCl3 MFC set to  0.000000
3/9/2011	3:15:17 PM	PHl3 MFC set to  0.000000
3/9/2011	3:15:17 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:15:17 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:15:18 PM	Tube furnace set to 0
3/9/2011	3:16:18 PM	H2 valve closed
3/9/2011	3:16:18 PM	BCl3 valve closed
3/9/2011	3:16:18 PM	PH3 valve closed
3/9/2011	3:16:18 PM	SiCl4 pre valve closed
3/9/2011	3:16:18 PM	SiCl4 post valve closed
3/9/2011	3:16:18 PM	Bubbler valve closed
3/9/2011	3:16:18 PM	Helium valve opened
3/9/2011	3:16:18 PM	Main Vac valve opened
3/9/2011	3:16:18 PM	Bypass valve opened
3/9/2011	3:16:18 PM	Helium MFC set to  100.000000
3/9/2011	3:16:18 PM	H2 MFC set to  0.000000
3/9/2011	3:16:18 PM	BCl3 MFC set to  0.000000
3/9/2011	3:16:18 PM	PHl3 MFC set to  0.000000
3/9/2011	3:16:18 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:16:18 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:16:18 PM	Tube furnace set to 0
3/9/2011	3:17:18 PM	Helium valve closed
3/9/2011	3:17:18 PM	H2 valve closed
3/9/2011	3:17:18 PM	BCl3 valve closed
3/9/2011	3:17:18 PM	PH3 valve closed
3/9/2011	3:17:18 PM	SiCl4 pre valve closed
3/9/2011	3:17:18 PM	SiCl4 post valve closed
3/9/2011	3:17:18 PM	Bubbler valve closed
3/9/2011	3:17:18 PM	Main Vac valve opened
3/9/2011	3:17:18 PM	Bypass valve opened
3/9/2011	3:17:18 PM	Helium MFC set to  0.000000
3/9/2011	3:17:18 PM	H2 MFC set to  0.000000
3/9/2011	3:17:18 PM	BCl3 MFC set to  0.000000
3/9/2011	3:17:18 PM	PHl3 MFC set to  0.000000
3/9/2011	3:17:18 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:17:18 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:17:18 PM	Tube furnace set to 0
3/9/2011	3:18:18 PM	H2 valve closed
3/9/2011	3:18:18 PM	BCl3 valve closed
3/9/2011	3:18:18 PM	PH3 valve closed
3/9/2011	3:18:18 PM	SiCl4 pre valve closed
3/9/2011	3:18:18 PM	SiCl4 post valve closed
3/9/2011	3:18:18 PM	Bubbler valve closed
3/9/2011	3:18:18 PM	Helium valve opened
3/9/2011	3:18:18 PM	Main Vac valve opened
3/9/2011	3:18:18 PM	Bypass valve opened
3/9/2011	3:18:18 PM	Helium MFC set to  100.000000
3/9/2011	3:18:18 PM	H2 MFC set to  0.000000
3/9/2011	3:18:18 PM	BCl3 MFC set to  0.000000
3/9/2011	3:18:18 PM	PHl3 MFC set to  0.000000
3/9/2011	3:18:18 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:18:18 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:18:18 PM	Tube furnace set to 0
3/9/2011	3:19:18 PM	Helium valve closed
3/9/2011	3:19:18 PM	H2 valve closed
3/9/2011	3:19:18 PM	BCl3 valve closed
3/9/2011	3:19:18 PM	PH3 valve closed
3/9/2011	3:19:18 PM	SiCl4 pre valve closed
3/9/2011	3:19:18 PM	SiCl4 post valve closed
3/9/2011	3:19:18 PM	Bubbler valve closed
3/9/2011	3:19:18 PM	Main Vac valve opened
3/9/2011	3:19:18 PM	Bypass valve opened
3/9/2011	3:19:18 PM	Helium MFC set to  0.000000
3/9/2011	3:19:18 PM	H2 MFC set to  0.000000
3/9/2011	3:19:18 PM	BCl3 MFC set to  0.000000
3/9/2011	3:19:18 PM	PHl3 MFC set to  0.000000
3/9/2011	3:19:18 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:19:18 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:19:18 PM	Tube furnace set to 0
3/9/2011	3:19:19 PM	Run finished at 3:19 PM
3/9/2011	3:19:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	3:22:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	3:22:54 PM	Recipe started at 3:22 PM
3/9/2011	3:22:54 PM	Helium valve closed
3/9/2011	3:22:54 PM	H2 valve closed
3/9/2011	3:22:54 PM	BCl3 valve closed
3/9/2011	3:22:54 PM	PH3 valve closed
3/9/2011	3:22:54 PM	SiCl4 pre valve closed
3/9/2011	3:22:54 PM	SiCl4 post valve closed
3/9/2011	3:22:54 PM	Main Vac valve closed
3/9/2011	3:22:54 PM	Bubbler valve closed
3/9/2011	3:22:54 PM	Bypass valve opened
3/9/2011	3:22:54 PM	Helium MFC set to  0.000000
3/9/2011	3:22:54 PM	H2 MFC set to  0.000000
3/9/2011	3:22:54 PM	BCl3 MFC set to  0.000000
3/9/2011	3:22:54 PM	PHl3 MFC set to  0.000000
3/9/2011	3:22:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:22:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:22:54 PM	Tube furnace set to 0
3/9/2011	3:22:54 PM	Helium valve closed
3/9/2011	3:22:54 PM	H2 valve closed
3/9/2011	3:22:54 PM	BCl3 valve closed
3/9/2011	3:22:54 PM	PH3 valve closed
3/9/2011	3:22:54 PM	SiCl4 pre valve closed
3/9/2011	3:22:54 PM	SiCl4 post valve closed
3/9/2011	3:22:54 PM	Bubbler valve closed
3/9/2011	3:22:54 PM	Main Vac valve opened
3/9/2011	3:22:54 PM	Bypass valve opened
3/9/2011	3:22:54 PM	Helium MFC set to  0.000000
3/9/2011	3:22:54 PM	H2 MFC set to  0.000000
3/9/2011	3:22:54 PM	BCl3 MFC set to  0.000000
3/9/2011	3:22:54 PM	PHl3 MFC set to  0.000000
3/9/2011	3:22:54 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:22:54 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:22:55 PM	Tube furnace set to 0
3/9/2011	3:23:55 PM	H2 valve closed
3/9/2011	3:23:55 PM	BCl3 valve closed
3/9/2011	3:23:55 PM	PH3 valve closed
3/9/2011	3:23:55 PM	SiCl4 pre valve closed
3/9/2011	3:23:55 PM	SiCl4 post valve closed
3/9/2011	3:23:55 PM	Bubbler valve closed
3/9/2011	3:23:55 PM	Helium valve opened
3/9/2011	3:23:55 PM	Main Vac valve opened
3/9/2011	3:23:55 PM	Bypass valve opened
3/9/2011	3:23:55 PM	Helium MFC set to  100.000000
3/9/2011	3:23:55 PM	H2 MFC set to  0.000000
3/9/2011	3:23:55 PM	BCl3 MFC set to  0.000000
3/9/2011	3:23:55 PM	PHl3 MFC set to  0.000000
3/9/2011	3:23:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:23:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:23:55 PM	Tube furnace set to 0
3/9/2011	3:24:55 PM	Helium valve closed
3/9/2011	3:24:55 PM	H2 valve closed
3/9/2011	3:24:55 PM	BCl3 valve closed
3/9/2011	3:24:55 PM	PH3 valve closed
3/9/2011	3:24:55 PM	SiCl4 pre valve closed
3/9/2011	3:24:55 PM	SiCl4 post valve closed
3/9/2011	3:24:55 PM	Bubbler valve closed
3/9/2011	3:24:55 PM	Main Vac valve opened
3/9/2011	3:24:55 PM	Bypass valve opened
3/9/2011	3:24:55 PM	Helium MFC set to  0.000000
3/9/2011	3:24:55 PM	H2 MFC set to  0.000000
3/9/2011	3:24:55 PM	BCl3 MFC set to  0.000000
3/9/2011	3:24:55 PM	PHl3 MFC set to  0.000000
3/9/2011	3:24:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:24:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:24:55 PM	Tube furnace set to 0
3/9/2011	3:25:55 PM	H2 valve closed
3/9/2011	3:25:55 PM	BCl3 valve closed
3/9/2011	3:25:55 PM	PH3 valve closed
3/9/2011	3:25:55 PM	SiCl4 pre valve closed
3/9/2011	3:25:55 PM	SiCl4 post valve closed
3/9/2011	3:25:55 PM	Bubbler valve closed
3/9/2011	3:25:55 PM	Helium valve opened
3/9/2011	3:25:55 PM	Main Vac valve opened
3/9/2011	3:25:55 PM	Bypass valve opened
3/9/2011	3:25:55 PM	Helium MFC set to  100.000000
3/9/2011	3:25:55 PM	H2 MFC set to  0.000000
3/9/2011	3:25:55 PM	BCl3 MFC set to  0.000000
3/9/2011	3:25:55 PM	PHl3 MFC set to  0.000000
3/9/2011	3:25:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:25:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:25:55 PM	Tube furnace set to 0
3/9/2011	3:26:55 PM	Helium valve closed
3/9/2011	3:26:55 PM	H2 valve closed
3/9/2011	3:26:55 PM	BCl3 valve closed
3/9/2011	3:26:55 PM	PH3 valve closed
3/9/2011	3:26:55 PM	SiCl4 pre valve closed
3/9/2011	3:26:55 PM	SiCl4 post valve closed
3/9/2011	3:26:55 PM	Bubbler valve closed
3/9/2011	3:26:55 PM	Main Vac valve opened
3/9/2011	3:26:55 PM	Bypass valve opened
3/9/2011	3:26:55 PM	Helium MFC set to  0.000000
3/9/2011	3:26:55 PM	H2 MFC set to  0.000000
3/9/2011	3:26:55 PM	BCl3 MFC set to  0.000000
3/9/2011	3:26:55 PM	PHl3 MFC set to  0.000000
3/9/2011	3:26:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:26:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:26:55 PM	Tube furnace set to 0
3/9/2011	3:27:55 PM	H2 valve closed
3/9/2011	3:27:55 PM	BCl3 valve closed
3/9/2011	3:27:55 PM	PH3 valve closed
3/9/2011	3:27:55 PM	SiCl4 pre valve closed
3/9/2011	3:27:55 PM	SiCl4 post valve closed
3/9/2011	3:27:55 PM	Bubbler valve closed
3/9/2011	3:27:55 PM	Helium valve opened
3/9/2011	3:27:55 PM	Main Vac valve opened
3/9/2011	3:27:55 PM	Bypass valve opened
3/9/2011	3:27:55 PM	Helium MFC set to  100.000000
3/9/2011	3:27:55 PM	H2 MFC set to  0.000000
3/9/2011	3:27:55 PM	BCl3 MFC set to  0.000000
3/9/2011	3:27:55 PM	PHl3 MFC set to  0.000000
3/9/2011	3:27:55 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:27:55 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:27:56 PM	Tube furnace set to 0
3/9/2011	3:28:56 PM	Helium valve closed
3/9/2011	3:28:56 PM	H2 valve closed
3/9/2011	3:28:56 PM	BCl3 valve closed
3/9/2011	3:28:56 PM	PH3 valve closed
3/9/2011	3:28:56 PM	SiCl4 pre valve closed
3/9/2011	3:28:56 PM	SiCl4 post valve closed
3/9/2011	3:28:56 PM	Bubbler valve closed
3/9/2011	3:28:56 PM	Main Vac valve opened
3/9/2011	3:28:56 PM	Bypass valve opened
3/9/2011	3:28:56 PM	Helium MFC set to  0.000000
3/9/2011	3:28:56 PM	H2 MFC set to  0.000000
3/9/2011	3:28:56 PM	BCl3 MFC set to  0.000000
3/9/2011	3:28:56 PM	PHl3 MFC set to  0.000000
3/9/2011	3:28:56 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:28:56 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:28:56 PM	Tube furnace set to 0
3/9/2011	3:29:12 PM	Run aborted at 3:29 PM
3/9/2011	3:29:12 PM	Helium valve closed
3/9/2011	3:29:12 PM	H2 valve closed
3/9/2011	3:29:12 PM	BCl3 valve closed
3/9/2011	3:29:12 PM	PH3 valve closed
3/9/2011	3:29:12 PM	SiCl4 pre valve closed
3/9/2011	3:29:12 PM	SiCl4 post valve closed
3/9/2011	3:29:12 PM	Bypass valve closed
3/9/2011	3:29:12 PM	Main Vac valve closed
3/9/2011	3:29:12 PM	Bubbler valve closed
3/9/2011	3:29:12 PM	Helium MFC set to  0.000000
3/9/2011	3:29:12 PM	H2 MFC set to  0.000000
3/9/2011	3:29:12 PM	BCl3 MFC set to  0.000000
3/9/2011	3:29:12 PM	PHl3 MFC set to  0.000000
3/9/2011	3:29:12 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:29:12 PM	Tube furnace set to 0
3/9/2011	3:29:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	3:29:21 PM	Bypass valve opened
3/9/2011	3:29:22 PM	Main Vac valve opened
3/9/2011	3:30:27 PM	Recipe started at 3:30 PM
3/9/2011	3:30:27 PM	Helium valve closed
3/9/2011	3:30:27 PM	BCl3 valve closed
3/9/2011	3:30:27 PM	PH3 valve closed
3/9/2011	3:30:27 PM	SiCl4 pre valve closed
3/9/2011	3:30:27 PM	SiCl4 post valve closed
3/9/2011	3:30:27 PM	Main Vac valve closed
3/9/2011	3:30:27 PM	Bypass valve closed
3/9/2011	3:30:27 PM	Bubbler valve closed
3/9/2011	3:30:27 PM	H2 valve opened
3/9/2011	3:30:27 PM	Helium MFC set to  0.000000
3/9/2011	3:30:27 PM	H2 MFC set to  500.000000
3/9/2011	3:30:27 PM	BCl3 MFC set to  0.000000
3/9/2011	3:30:27 PM	PHl3 MFC set to  0.000000
3/9/2011	3:30:27 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:30:27 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:30:27 PM	Tube furnace set to 0
3/9/2011	3:31:44 PM	Helium valve closed
3/9/2011	3:31:44 PM	BCl3 valve closed
3/9/2011	3:31:44 PM	PH3 valve closed
3/9/2011	3:31:45 PM	SiCl4 pre valve closed
3/9/2011	3:31:45 PM	SiCl4 post valve closed
3/9/2011	3:31:45 PM	Main Vac valve closed
3/9/2011	3:31:45 PM	Bypass valve closed
3/9/2011	3:31:45 PM	H2 valve opened
3/9/2011	3:31:45 PM	Bubbler valve opened
3/9/2011	3:31:45 PM	Helium MFC set to  0.000000
3/9/2011	3:31:45 PM	H2 MFC set to  500.000000
3/9/2011	3:31:45 PM	BCl3 MFC set to  0.000000
3/9/2011	3:31:45 PM	PHl3 MFC set to  0.000000
3/9/2011	3:31:45 PM	SiCl4 MFC set to  0.000000
3/9/2011	3:31:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:31:45 PM	Tube furnace set to 1050
3/9/2011	3:51:45 PM	Helium valve closed
3/9/2011	3:51:45 PM	PH3 valve closed
3/9/2011	3:51:45 PM	Main Vac valve closed
3/9/2011	3:51:45 PM	Bypass valve closed
3/9/2011	3:51:45 PM	H2 valve opened
3/9/2011	3:51:45 PM	BCl3 valve opened
3/9/2011	3:51:45 PM	SiCl4 pre valve opened
3/9/2011	3:51:45 PM	SiCl4 post valve opened
3/9/2011	3:51:45 PM	Bubbler valve opened
3/9/2011	3:51:45 PM	Helium MFC set to  0.000000
3/9/2011	3:51:45 PM	H2 MFC set to  500.000000
3/9/2011	3:51:45 PM	BCl3 MFC set to  3.000000
3/9/2011	3:51:45 PM	PHl3 MFC set to  0.000000
3/9/2011	3:51:45 PM	SiCl4 MFC set to  50.000000
3/9/2011	3:51:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	3:51:45 PM	Tube furnace set to 1050
3/9/2011	4:11:45 PM	H2 valve closed
3/9/2011	4:11:45 PM	BCl3 valve closed
3/9/2011	4:11:45 PM	PH3 valve closed
3/9/2011	4:11:45 PM	SiCl4 pre valve closed
3/9/2011	4:11:45 PM	SiCl4 post valve closed
3/9/2011	4:11:45 PM	Main Vac valve closed
3/9/2011	4:11:45 PM	Bypass valve closed
3/9/2011	4:11:45 PM	Helium valve opened
3/9/2011	4:11:45 PM	Bubbler valve opened
3/9/2011	4:11:45 PM	Helium MFC set to  500.000000
3/9/2011	4:11:45 PM	H2 MFC set to  0.000000
3/9/2011	4:11:45 PM	BCl3 MFC set to  0.000000
3/9/2011	4:11:45 PM	PHl3 MFC set to  0.000000
3/9/2011	4:11:45 PM	SiCl4 MFC set to  0.000000
3/9/2011	4:11:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:11:45 PM	Tube furnace set to 0
3/9/2011	4:31:45 PM	Helium valve closed
3/9/2011	4:31:45 PM	H2 valve closed
3/9/2011	4:31:45 PM	BCl3 valve closed
3/9/2011	4:31:45 PM	PH3 valve closed
3/9/2011	4:31:45 PM	SiCl4 pre valve closed
3/9/2011	4:31:45 PM	SiCl4 post valve closed
3/9/2011	4:31:45 PM	Main Vac valve closed
3/9/2011	4:31:45 PM	Bypass valve closed
3/9/2011	4:31:45 PM	Bubbler valve closed
3/9/2011	4:31:45 PM	Helium MFC set to  0.000000
3/9/2011	4:31:45 PM	H2 MFC set to  0.000000
3/9/2011	4:31:45 PM	BCl3 MFC set to  0.000000
3/9/2011	4:31:45 PM	PHl3 MFC set to  0.000000
3/9/2011	4:31:45 PM	SiCl4 MFC set to  0.000000
3/9/2011	4:31:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:31:45 PM	Tube furnace set to 0
3/9/2011	4:31:45 PM	Run finished at 4:31 PM
3/9/2011	4:56:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	4:56:49 PM	Recipe started at 4:56 PM
3/9/2011	4:56:49 PM	H2 valve closed
3/9/2011	4:56:49 PM	BCl3 valve closed
3/9/2011	4:56:49 PM	PH3 valve closed
3/9/2011	4:56:49 PM	SiCl4 pre valve closed
3/9/2011	4:56:49 PM	SiCl4 post valve closed
3/9/2011	4:56:49 PM	Main Vac valve closed
3/9/2011	4:56:49 PM	Bypass valve closed
3/9/2011	4:56:49 PM	Bubbler valve closed
3/9/2011	4:56:49 PM	Helium valve opened
3/9/2011	4:56:49 PM	Helium MFC set to  500.000000
3/9/2011	4:56:49 PM	H2 MFC set to  0.000000
3/9/2011	4:56:49 PM	BCl3 MFC set to  0.000000
3/9/2011	4:56:49 PM	PHl3 MFC set to  0.000000
3/9/2011	4:56:49 PM	SiCl4 MFC set to  0.000000
3/9/2011	4:56:49 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:56:49 PM	Tube furnace set to 0
3/9/2011	4:56:56 PM	Helium valve closed
3/9/2011	4:56:56 PM	H2 valve closed
3/9/2011	4:56:56 PM	BCl3 valve closed
3/9/2011	4:56:56 PM	PH3 valve closed
3/9/2011	4:56:56 PM	SiCl4 pre valve closed
3/9/2011	4:56:56 PM	SiCl4 post valve closed
3/9/2011	4:56:56 PM	Main Vac valve closed
3/9/2011	4:56:56 PM	Bypass valve closed
3/9/2011	4:56:56 PM	Bubbler valve closed
3/9/2011	4:56:56 PM	Helium MFC set to  0.000000
3/9/2011	4:56:56 PM	H2 MFC set to  0.000000
3/9/2011	4:56:56 PM	BCl3 MFC set to  0.000000
3/9/2011	4:56:56 PM	PHl3 MFC set to  0.000000
3/9/2011	4:56:56 PM	SiCl4 MFC set to  0.000000
3/9/2011	4:56:56 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	4:56:57 PM	Tube furnace set to 0
3/9/2011	4:56:57 PM	Run finished at 4:56 PM
3/9/2011	4:56:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	5:01:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	5:01:44 PM	Recipe started at 5:01 PM
3/9/2011	5:01:44 PM	Helium valve closed
3/9/2011	5:01:44 PM	H2 valve closed
3/9/2011	5:01:44 PM	BCl3 valve closed
3/9/2011	5:01:44 PM	PH3 valve closed
3/9/2011	5:01:44 PM	SiCl4 pre valve closed
3/9/2011	5:01:44 PM	SiCl4 post valve closed
3/9/2011	5:01:44 PM	Main Vac valve closed
3/9/2011	5:01:44 PM	Bubbler valve closed
3/9/2011	5:01:44 PM	Bypass valve opened
3/9/2011	5:01:44 PM	Helium MFC set to  0.000000
3/9/2011	5:01:44 PM	H2 MFC set to  0.000000
3/9/2011	5:01:44 PM	BCl3 MFC set to  0.000000
3/9/2011	5:01:44 PM	PHl3 MFC set to  0.000000
3/9/2011	5:01:44 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:01:44 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:01:44 PM	Tube furnace set to 0
3/9/2011	5:02:16 PM	Helium valve closed
3/9/2011	5:02:16 PM	H2 valve closed
3/9/2011	5:02:16 PM	BCl3 valve closed
3/9/2011	5:02:16 PM	PH3 valve closed
3/9/2011	5:02:16 PM	SiCl4 pre valve closed
3/9/2011	5:02:16 PM	SiCl4 post valve closed
3/9/2011	5:02:16 PM	Bubbler valve closed
3/9/2011	5:02:16 PM	Main Vac valve opened
3/9/2011	5:02:16 PM	Bypass valve opened
3/9/2011	5:02:16 PM	Helium MFC set to  0.000000
3/9/2011	5:02:16 PM	H2 MFC set to  0.000000
3/9/2011	5:02:16 PM	BCl3 MFC set to  0.000000
3/9/2011	5:02:16 PM	PHl3 MFC set to  0.000000
3/9/2011	5:02:16 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:02:16 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:02:16 PM	Tube furnace set to 0
3/9/2011	5:02:16 PM	Run finished at 5:02 PM
3/9/2011	5:02:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	5:03:32 PM	Bypass valve closed
3/9/2011	5:03:33 PM	Main Vac valve closed
3/9/2011	5:03:40 PM	Main Vac valve opened
3/9/2011	5:03:41 PM	Bypass valve opened
3/9/2011	5:03:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	5:04:00 PM	Recipe started at 5:03 PM
3/9/2011	5:04:00 PM	Helium valve closed
3/9/2011	5:04:00 PM	H2 valve closed
3/9/2011	5:04:00 PM	BCl3 valve closed
3/9/2011	5:04:00 PM	PH3 valve closed
3/9/2011	5:04:00 PM	SiCl4 pre valve closed
3/9/2011	5:04:00 PM	SiCl4 post valve closed
3/9/2011	5:04:00 PM	Main Vac valve closed
3/9/2011	5:04:00 PM	Bubbler valve closed
3/9/2011	5:04:00 PM	Bypass valve opened
3/9/2011	5:04:00 PM	Helium MFC set to  0.000000
3/9/2011	5:04:00 PM	H2 MFC set to  0.000000
3/9/2011	5:04:00 PM	BCl3 MFC set to  0.000000
3/9/2011	5:04:00 PM	PHl3 MFC set to  0.000000
3/9/2011	5:04:00 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:04:00 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:04:00 PM	Tube furnace set to 0
3/9/2011	5:04:00 PM	Helium valve closed
3/9/2011	5:04:00 PM	H2 valve closed
3/9/2011	5:04:00 PM	BCl3 valve closed
3/9/2011	5:04:00 PM	PH3 valve closed
3/9/2011	5:04:00 PM	SiCl4 pre valve closed
3/9/2011	5:04:00 PM	SiCl4 post valve closed
3/9/2011	5:04:00 PM	Bubbler valve closed
3/9/2011	5:04:00 PM	Main Vac valve opened
3/9/2011	5:04:00 PM	Bypass valve opened
3/9/2011	5:04:00 PM	Helium MFC set to  0.000000
3/9/2011	5:04:00 PM	H2 MFC set to  0.000000
3/9/2011	5:04:00 PM	BCl3 MFC set to  0.000000
3/9/2011	5:04:00 PM	PHl3 MFC set to  0.000000
3/9/2011	5:04:00 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:04:00 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:04:01 PM	Tube furnace set to 0
3/9/2011	5:05:01 PM	H2 valve closed
3/9/2011	5:05:01 PM	BCl3 valve closed
3/9/2011	5:05:01 PM	PH3 valve closed
3/9/2011	5:05:01 PM	SiCl4 pre valve closed
3/9/2011	5:05:01 PM	SiCl4 post valve closed
3/9/2011	5:05:01 PM	Bubbler valve closed
3/9/2011	5:05:01 PM	Helium valve opened
3/9/2011	5:05:01 PM	Main Vac valve opened
3/9/2011	5:05:01 PM	Bypass valve opened
3/9/2011	5:05:01 PM	Helium MFC set to  100.000000
3/9/2011	5:05:01 PM	H2 MFC set to  0.000000
3/9/2011	5:05:01 PM	BCl3 MFC set to  0.000000
3/9/2011	5:05:01 PM	PHl3 MFC set to  0.000000
3/9/2011	5:05:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:05:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:05:01 PM	Tube furnace set to 0
3/9/2011	5:06:01 PM	Helium valve closed
3/9/2011	5:06:01 PM	H2 valve closed
3/9/2011	5:06:01 PM	BCl3 valve closed
3/9/2011	5:06:01 PM	PH3 valve closed
3/9/2011	5:06:01 PM	SiCl4 pre valve closed
3/9/2011	5:06:01 PM	SiCl4 post valve closed
3/9/2011	5:06:01 PM	Bubbler valve closed
3/9/2011	5:06:01 PM	Main Vac valve opened
3/9/2011	5:06:01 PM	Bypass valve opened
3/9/2011	5:06:01 PM	Helium MFC set to  0.000000
3/9/2011	5:06:01 PM	H2 MFC set to  0.000000
3/9/2011	5:06:01 PM	BCl3 MFC set to  0.000000
3/9/2011	5:06:01 PM	PHl3 MFC set to  0.000000
3/9/2011	5:06:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:06:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:06:01 PM	Tube furnace set to 0
3/9/2011	5:07:01 PM	H2 valve closed
3/9/2011	5:07:01 PM	BCl3 valve closed
3/9/2011	5:07:01 PM	PH3 valve closed
3/9/2011	5:07:01 PM	SiCl4 pre valve closed
3/9/2011	5:07:01 PM	SiCl4 post valve closed
3/9/2011	5:07:01 PM	Bubbler valve closed
3/9/2011	5:07:01 PM	Helium valve opened
3/9/2011	5:07:01 PM	Main Vac valve opened
3/9/2011	5:07:01 PM	Bypass valve opened
3/9/2011	5:07:01 PM	Helium MFC set to  100.000000
3/9/2011	5:07:01 PM	H2 MFC set to  0.000000
3/9/2011	5:07:01 PM	BCl3 MFC set to  0.000000
3/9/2011	5:07:01 PM	PHl3 MFC set to  0.000000
3/9/2011	5:07:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:07:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:07:01 PM	Tube furnace set to 0
3/9/2011	5:08:01 PM	Helium valve closed
3/9/2011	5:08:01 PM	H2 valve closed
3/9/2011	5:08:01 PM	BCl3 valve closed
3/9/2011	5:08:01 PM	PH3 valve closed
3/9/2011	5:08:01 PM	SiCl4 pre valve closed
3/9/2011	5:08:01 PM	SiCl4 post valve closed
3/9/2011	5:08:01 PM	Bubbler valve closed
3/9/2011	5:08:01 PM	Main Vac valve opened
3/9/2011	5:08:01 PM	Bypass valve opened
3/9/2011	5:08:01 PM	Helium MFC set to  0.000000
3/9/2011	5:08:01 PM	H2 MFC set to  0.000000
3/9/2011	5:08:01 PM	BCl3 MFC set to  0.000000
3/9/2011	5:08:01 PM	PHl3 MFC set to  0.000000
3/9/2011	5:08:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:08:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:08:01 PM	Tube furnace set to 0
3/9/2011	5:09:01 PM	H2 valve closed
3/9/2011	5:09:01 PM	BCl3 valve closed
3/9/2011	5:09:01 PM	PH3 valve closed
3/9/2011	5:09:01 PM	SiCl4 pre valve closed
3/9/2011	5:09:01 PM	SiCl4 post valve closed
3/9/2011	5:09:01 PM	Bubbler valve closed
3/9/2011	5:09:01 PM	Helium valve opened
3/9/2011	5:09:01 PM	Main Vac valve opened
3/9/2011	5:09:01 PM	Bypass valve opened
3/9/2011	5:09:01 PM	Helium MFC set to  100.000000
3/9/2011	5:09:01 PM	H2 MFC set to  0.000000
3/9/2011	5:09:01 PM	BCl3 MFC set to  0.000000
3/9/2011	5:09:01 PM	PHl3 MFC set to  0.000000
3/9/2011	5:09:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:09:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:09:02 PM	Tube furnace set to 0
3/9/2011	5:10:02 PM	Helium valve closed
3/9/2011	5:10:02 PM	H2 valve closed
3/9/2011	5:10:02 PM	BCl3 valve closed
3/9/2011	5:10:02 PM	PH3 valve closed
3/9/2011	5:10:02 PM	SiCl4 pre valve closed
3/9/2011	5:10:02 PM	SiCl4 post valve closed
3/9/2011	5:10:02 PM	Bubbler valve closed
3/9/2011	5:10:02 PM	Main Vac valve opened
3/9/2011	5:10:02 PM	Bypass valve opened
3/9/2011	5:10:02 PM	Helium MFC set to  0.000000
3/9/2011	5:10:02 PM	H2 MFC set to  0.000000
3/9/2011	5:10:02 PM	BCl3 MFC set to  0.000000
3/9/2011	5:10:02 PM	PHl3 MFC set to  0.000000
3/9/2011	5:10:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:10:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:10:02 PM	Tube furnace set to 0
3/9/2011	5:11:02 PM	H2 valve closed
3/9/2011	5:11:02 PM	BCl3 valve closed
3/9/2011	5:11:02 PM	PH3 valve closed
3/9/2011	5:11:02 PM	SiCl4 pre valve closed
3/9/2011	5:11:02 PM	SiCl4 post valve closed
3/9/2011	5:11:02 PM	Bubbler valve closed
3/9/2011	5:11:02 PM	Helium valve opened
3/9/2011	5:11:02 PM	Main Vac valve opened
3/9/2011	5:11:02 PM	Bypass valve opened
3/9/2011	5:11:02 PM	Helium MFC set to  100.000000
3/9/2011	5:11:02 PM	H2 MFC set to  0.000000
3/9/2011	5:11:02 PM	BCl3 MFC set to  0.000000
3/9/2011	5:11:02 PM	PHl3 MFC set to  0.000000
3/9/2011	5:11:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:11:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:11:02 PM	Tube furnace set to 0
3/9/2011	5:12:02 PM	Helium valve closed
3/9/2011	5:12:02 PM	H2 valve closed
3/9/2011	5:12:02 PM	BCl3 valve closed
3/9/2011	5:12:02 PM	PH3 valve closed
3/9/2011	5:12:02 PM	SiCl4 pre valve closed
3/9/2011	5:12:02 PM	SiCl4 post valve closed
3/9/2011	5:12:02 PM	Bubbler valve closed
3/9/2011	5:12:02 PM	Main Vac valve opened
3/9/2011	5:12:02 PM	Bypass valve opened
3/9/2011	5:12:02 PM	Helium MFC set to  0.000000
3/9/2011	5:12:02 PM	H2 MFC set to  0.000000
3/9/2011	5:12:02 PM	BCl3 MFC set to  0.000000
3/9/2011	5:12:02 PM	PHl3 MFC set to  0.000000
3/9/2011	5:12:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:12:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:12:02 PM	Tube furnace set to 0
3/9/2011	5:13:02 PM	H2 valve closed
3/9/2011	5:13:02 PM	BCl3 valve closed
3/9/2011	5:13:02 PM	PH3 valve closed
3/9/2011	5:13:02 PM	SiCl4 pre valve closed
3/9/2011	5:13:02 PM	SiCl4 post valve closed
3/9/2011	5:13:02 PM	Bubbler valve closed
3/9/2011	5:13:02 PM	Helium valve opened
3/9/2011	5:13:02 PM	Main Vac valve opened
3/9/2011	5:13:02 PM	Bypass valve opened
3/9/2011	5:13:02 PM	Helium MFC set to  100.000000
3/9/2011	5:13:02 PM	H2 MFC set to  0.000000
3/9/2011	5:13:02 PM	BCl3 MFC set to  0.000000
3/9/2011	5:13:02 PM	PHl3 MFC set to  0.000000
3/9/2011	5:13:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:13:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:13:02 PM	Tube furnace set to 0
3/9/2011	5:14:02 PM	Helium valve closed
3/9/2011	5:14:02 PM	H2 valve closed
3/9/2011	5:14:02 PM	BCl3 valve closed
3/9/2011	5:14:02 PM	PH3 valve closed
3/9/2011	5:14:02 PM	SiCl4 pre valve closed
3/9/2011	5:14:02 PM	SiCl4 post valve closed
3/9/2011	5:14:02 PM	Bubbler valve closed
3/9/2011	5:14:02 PM	Main Vac valve opened
3/9/2011	5:14:02 PM	Bypass valve opened
3/9/2011	5:14:02 PM	Helium MFC set to  0.000000
3/9/2011	5:14:02 PM	H2 MFC set to  0.000000
3/9/2011	5:14:02 PM	BCl3 MFC set to  0.000000
3/9/2011	5:14:02 PM	PHl3 MFC set to  0.000000
3/9/2011	5:14:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:14:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:14:02 PM	Tube furnace set to 0
3/9/2011	5:15:03 PM	H2 valve closed
3/9/2011	5:15:03 PM	BCl3 valve closed
3/9/2011	5:15:03 PM	PH3 valve closed
3/9/2011	5:15:03 PM	SiCl4 pre valve closed
3/9/2011	5:15:03 PM	SiCl4 post valve closed
3/9/2011	5:15:03 PM	Bubbler valve closed
3/9/2011	5:15:03 PM	Helium valve opened
3/9/2011	5:15:03 PM	Main Vac valve opened
3/9/2011	5:15:03 PM	Bypass valve opened
3/9/2011	5:15:03 PM	Helium MFC set to  100.000000
3/9/2011	5:15:03 PM	H2 MFC set to  0.000000
3/9/2011	5:15:03 PM	BCl3 MFC set to  0.000000
3/9/2011	5:15:03 PM	PHl3 MFC set to  0.000000
3/9/2011	5:15:03 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:15:03 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:15:03 PM	Tube furnace set to 0
3/9/2011	5:16:03 PM	Helium valve closed
3/9/2011	5:16:03 PM	H2 valve closed
3/9/2011	5:16:03 PM	BCl3 valve closed
3/9/2011	5:16:03 PM	PH3 valve closed
3/9/2011	5:16:03 PM	SiCl4 pre valve closed
3/9/2011	5:16:03 PM	SiCl4 post valve closed
3/9/2011	5:16:03 PM	Bubbler valve closed
3/9/2011	5:16:03 PM	Main Vac valve opened
3/9/2011	5:16:03 PM	Bypass valve opened
3/9/2011	5:16:03 PM	Helium MFC set to  0.000000
3/9/2011	5:16:03 PM	H2 MFC set to  0.000000
3/9/2011	5:16:03 PM	BCl3 MFC set to  0.000000
3/9/2011	5:16:03 PM	PHl3 MFC set to  0.000000
3/9/2011	5:16:03 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:16:03 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:16:03 PM	Tube furnace set to 0
3/9/2011	5:17:03 PM	H2 valve closed
3/9/2011	5:17:03 PM	BCl3 valve closed
3/9/2011	5:17:03 PM	PH3 valve closed
3/9/2011	5:17:03 PM	SiCl4 pre valve closed
3/9/2011	5:17:03 PM	SiCl4 post valve closed
3/9/2011	5:17:03 PM	Bubbler valve closed
3/9/2011	5:17:03 PM	Helium valve opened
3/9/2011	5:17:03 PM	Main Vac valve opened
3/9/2011	5:17:03 PM	Bypass valve opened
3/9/2011	5:17:03 PM	Helium MFC set to  100.000000
3/9/2011	5:17:03 PM	H2 MFC set to  0.000000
3/9/2011	5:17:03 PM	BCl3 MFC set to  0.000000
3/9/2011	5:17:03 PM	PHl3 MFC set to  0.000000
3/9/2011	5:17:03 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:17:03 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:17:03 PM	Tube furnace set to 0
3/9/2011	5:18:03 PM	Helium valve closed
3/9/2011	5:18:03 PM	H2 valve closed
3/9/2011	5:18:03 PM	BCl3 valve closed
3/9/2011	5:18:03 PM	PH3 valve closed
3/9/2011	5:18:03 PM	SiCl4 pre valve closed
3/9/2011	5:18:03 PM	SiCl4 post valve closed
3/9/2011	5:18:03 PM	Bubbler valve closed
3/9/2011	5:18:03 PM	Main Vac valve opened
3/9/2011	5:18:03 PM	Bypass valve opened
3/9/2011	5:18:03 PM	Helium MFC set to  0.000000
3/9/2011	5:18:03 PM	H2 MFC set to  0.000000
3/9/2011	5:18:03 PM	BCl3 MFC set to  0.000000
3/9/2011	5:18:03 PM	PHl3 MFC set to  0.000000
3/9/2011	5:18:03 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:18:03 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:18:03 PM	Tube furnace set to 0
3/9/2011	5:19:03 PM	H2 valve closed
3/9/2011	5:19:03 PM	BCl3 valve closed
3/9/2011	5:19:03 PM	PH3 valve closed
3/9/2011	5:19:03 PM	SiCl4 pre valve closed
3/9/2011	5:19:03 PM	SiCl4 post valve closed
3/9/2011	5:19:03 PM	Bubbler valve closed
3/9/2011	5:19:03 PM	Helium valve opened
3/9/2011	5:19:03 PM	Main Vac valve opened
3/9/2011	5:19:03 PM	Bypass valve opened
3/9/2011	5:19:03 PM	Helium MFC set to  100.000000
3/9/2011	5:19:03 PM	H2 MFC set to  0.000000
3/9/2011	5:19:03 PM	BCl3 MFC set to  0.000000
3/9/2011	5:19:03 PM	PHl3 MFC set to  0.000000
3/9/2011	5:19:03 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:19:03 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:19:03 PM	Tube furnace set to 0
3/9/2011	5:19:30 PM	Run aborted at 5:19 PM
3/9/2011	5:19:30 PM	Helium valve closed
3/9/2011	5:19:30 PM	H2 valve closed
3/9/2011	5:19:30 PM	BCl3 valve closed
3/9/2011	5:19:30 PM	PH3 valve closed
3/9/2011	5:19:30 PM	SiCl4 pre valve closed
3/9/2011	5:19:30 PM	SiCl4 post valve closed
3/9/2011	5:19:30 PM	Bypass valve closed
3/9/2011	5:19:30 PM	Main Vac valve closed
3/9/2011	5:19:30 PM	Bubbler valve closed
3/9/2011	5:19:30 PM	Helium MFC set to  0.000000
3/9/2011	5:19:30 PM	H2 MFC set to  0.000000
3/9/2011	5:19:30 PM	BCl3 MFC set to  0.000000
3/9/2011	5:19:30 PM	PHl3 MFC set to  0.000000
3/9/2011	5:19:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:19:30 PM	Tube furnace set to 0
3/9/2011	5:19:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	5:19:31 PM	Bypass valve opened
3/9/2011	5:19:32 PM	Main Vac valve opened
3/9/2011	5:21:11 PM	Recipe started at 5:21 PM
3/9/2011	5:21:11 PM	Helium valve closed
3/9/2011	5:21:11 PM	BCl3 valve closed
3/9/2011	5:21:11 PM	PH3 valve closed
3/9/2011	5:21:11 PM	SiCl4 pre valve closed
3/9/2011	5:21:11 PM	SiCl4 post valve closed
3/9/2011	5:21:11 PM	Main Vac valve closed
3/9/2011	5:21:11 PM	Bypass valve closed
3/9/2011	5:21:11 PM	Bubbler valve closed
3/9/2011	5:21:11 PM	H2 valve opened
3/9/2011	5:21:11 PM	Helium MFC set to  0.000000
3/9/2011	5:21:11 PM	H2 MFC set to  500.000000
3/9/2011	5:21:11 PM	BCl3 MFC set to  0.000000
3/9/2011	5:21:11 PM	PHl3 MFC set to  0.000000
3/9/2011	5:21:11 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:21:11 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:21:11 PM	Tube furnace set to 0
3/9/2011	5:22:29 PM	Helium valve closed
3/9/2011	5:22:29 PM	BCl3 valve closed
3/9/2011	5:22:29 PM	PH3 valve closed
3/9/2011	5:22:29 PM	SiCl4 pre valve closed
3/9/2011	5:22:29 PM	SiCl4 post valve closed
3/9/2011	5:22:29 PM	Main Vac valve closed
3/9/2011	5:22:29 PM	Bypass valve closed
3/9/2011	5:22:29 PM	H2 valve opened
3/9/2011	5:22:29 PM	Bubbler valve opened
3/9/2011	5:22:29 PM	Helium MFC set to  0.000000
3/9/2011	5:22:29 PM	H2 MFC set to  500.000000
3/9/2011	5:22:29 PM	BCl3 MFC set to  0.000000
3/9/2011	5:22:29 PM	PHl3 MFC set to  0.000000
3/9/2011	5:22:29 PM	SiCl4 MFC set to  0.000000
3/9/2011	5:22:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:22:30 PM	Tube furnace set to 1050
3/9/2011	5:42:30 PM	Helium valve closed
3/9/2011	5:42:30 PM	PH3 valve closed
3/9/2011	5:42:30 PM	Main Vac valve closed
3/9/2011	5:42:30 PM	Bypass valve closed
3/9/2011	5:42:30 PM	H2 valve opened
3/9/2011	5:42:30 PM	BCl3 valve opened
3/9/2011	5:42:30 PM	SiCl4 pre valve opened
3/9/2011	5:42:30 PM	SiCl4 post valve opened
3/9/2011	5:42:30 PM	Bubbler valve opened
3/9/2011	5:42:30 PM	Helium MFC set to  0.000000
3/9/2011	5:42:30 PM	H2 MFC set to  500.000000
3/9/2011	5:42:30 PM	BCl3 MFC set to  3.000000
3/9/2011	5:42:30 PM	PHl3 MFC set to  0.000000
3/9/2011	5:42:30 PM	SiCl4 MFC set to  50.000000
3/9/2011	5:42:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	5:42:30 PM	Tube furnace set to 1050
3/9/2011	6:02:30 PM	H2 valve closed
3/9/2011	6:02:30 PM	BCl3 valve closed
3/9/2011	6:02:30 PM	PH3 valve closed
3/9/2011	6:02:30 PM	SiCl4 pre valve closed
3/9/2011	6:02:30 PM	SiCl4 post valve closed
3/9/2011	6:02:30 PM	Main Vac valve closed
3/9/2011	6:02:30 PM	Bypass valve closed
3/9/2011	6:02:30 PM	Helium valve opened
3/9/2011	6:02:30 PM	Bubbler valve opened
3/9/2011	6:02:30 PM	Helium MFC set to  500.000000
3/9/2011	6:02:30 PM	H2 MFC set to  0.000000
3/9/2011	6:02:30 PM	BCl3 MFC set to  0.000000
3/9/2011	6:02:30 PM	PHl3 MFC set to  0.000000
3/9/2011	6:02:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	6:02:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	6:02:30 PM	Tube furnace set to 0
3/9/2011	6:22:30 PM	Helium valve closed
3/9/2011	6:22:30 PM	H2 valve closed
3/9/2011	6:22:30 PM	BCl3 valve closed
3/9/2011	6:22:30 PM	PH3 valve closed
3/9/2011	6:22:30 PM	SiCl4 pre valve closed
3/9/2011	6:22:30 PM	SiCl4 post valve closed
3/9/2011	6:22:30 PM	Main Vac valve closed
3/9/2011	6:22:30 PM	Bypass valve closed
3/9/2011	6:22:30 PM	Bubbler valve closed
3/9/2011	6:22:30 PM	Helium MFC set to  0.000000
3/9/2011	6:22:30 PM	H2 MFC set to  0.000000
3/9/2011	6:22:30 PM	BCl3 MFC set to  0.000000
3/9/2011	6:22:30 PM	PHl3 MFC set to  0.000000
3/9/2011	6:22:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	6:22:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	6:22:30 PM	Tube furnace set to 0
3/9/2011	6:22:30 PM	Run finished at 6:22 PM
3/9/2011	8:09:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	8:09:41 PM	Recipe started at 8:09 PM
3/9/2011	8:09:41 PM	H2 valve closed
3/9/2011	8:09:41 PM	BCl3 valve closed
3/9/2011	8:09:41 PM	PH3 valve closed
3/9/2011	8:09:41 PM	SiCl4 pre valve closed
3/9/2011	8:09:41 PM	SiCl4 post valve closed
3/9/2011	8:09:41 PM	Main Vac valve closed
3/9/2011	8:09:41 PM	Bypass valve closed
3/9/2011	8:09:41 PM	Bubbler valve closed
3/9/2011	8:09:41 PM	Helium valve opened
3/9/2011	8:09:41 PM	Helium MFC set to  500.000000
3/9/2011	8:09:41 PM	H2 MFC set to  0.000000
3/9/2011	8:09:41 PM	BCl3 MFC set to  0.000000
3/9/2011	8:09:41 PM	PHl3 MFC set to  0.000000
3/9/2011	8:09:41 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:09:41 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:09:41 PM	Tube furnace set to 0
3/9/2011	8:09:46 PM	Helium valve closed
3/9/2011	8:09:46 PM	H2 valve closed
3/9/2011	8:09:46 PM	BCl3 valve closed
3/9/2011	8:09:46 PM	PH3 valve closed
3/9/2011	8:09:46 PM	SiCl4 pre valve closed
3/9/2011	8:09:46 PM	SiCl4 post valve closed
3/9/2011	8:09:46 PM	Main Vac valve closed
3/9/2011	8:09:46 PM	Bypass valve closed
3/9/2011	8:09:46 PM	Bubbler valve closed
3/9/2011	8:09:46 PM	Helium MFC set to  0.000000
3/9/2011	8:09:46 PM	H2 MFC set to  0.000000
3/9/2011	8:09:46 PM	BCl3 MFC set to  0.000000
3/9/2011	8:09:46 PM	PHl3 MFC set to  0.000000
3/9/2011	8:09:46 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:09:46 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:09:46 PM	Tube furnace set to 0
3/9/2011	8:09:46 PM	Run finished at 8:09 PM
3/9/2011	8:09:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	8:13:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	8:13:48 PM	Recipe started at 8:13 PM
3/9/2011	8:13:48 PM	Helium valve closed
3/9/2011	8:13:48 PM	H2 valve closed
3/9/2011	8:13:48 PM	BCl3 valve closed
3/9/2011	8:13:48 PM	PH3 valve closed
3/9/2011	8:13:48 PM	SiCl4 pre valve closed
3/9/2011	8:13:48 PM	SiCl4 post valve closed
3/9/2011	8:13:48 PM	Main Vac valve closed
3/9/2011	8:13:48 PM	Bubbler valve closed
3/9/2011	8:13:48 PM	Bypass valve opened
3/9/2011	8:13:48 PM	Helium MFC set to  0.000000
3/9/2011	8:13:48 PM	H2 MFC set to  0.000000
3/9/2011	8:13:48 PM	BCl3 MFC set to  0.000000
3/9/2011	8:13:48 PM	PHl3 MFC set to  0.000000
3/9/2011	8:13:48 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:13:48 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:13:48 PM	Tube furnace set to 0
3/9/2011	8:14:19 PM	Helium valve closed
3/9/2011	8:14:19 PM	H2 valve closed
3/9/2011	8:14:19 PM	BCl3 valve closed
3/9/2011	8:14:19 PM	PH3 valve closed
3/9/2011	8:14:19 PM	SiCl4 pre valve closed
3/9/2011	8:14:19 PM	SiCl4 post valve closed
3/9/2011	8:14:19 PM	Bubbler valve closed
3/9/2011	8:14:19 PM	Main Vac valve opened
3/9/2011	8:14:19 PM	Bypass valve opened
3/9/2011	8:14:19 PM	Helium MFC set to  0.000000
3/9/2011	8:14:19 PM	H2 MFC set to  0.000000
3/9/2011	8:14:19 PM	BCl3 MFC set to  0.000000
3/9/2011	8:14:19 PM	PHl3 MFC set to  0.000000
3/9/2011	8:14:19 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:14:19 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:14:19 PM	Tube furnace set to 0
3/9/2011	8:14:20 PM	Run finished at 8:14 PM
3/9/2011	8:14:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	8:14:55 PM	Tube furnace set to 400
3/9/2011	8:15:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	8:15:19 PM	Recipe started at 8:15 PM
3/9/2011	8:15:19 PM	Helium valve closed
3/9/2011	8:15:19 PM	H2 valve closed
3/9/2011	8:15:19 PM	BCl3 valve closed
3/9/2011	8:15:19 PM	PH3 valve closed
3/9/2011	8:15:19 PM	SiCl4 pre valve closed
3/9/2011	8:15:19 PM	SiCl4 post valve closed
3/9/2011	8:15:19 PM	Main Vac valve closed
3/9/2011	8:15:19 PM	Bubbler valve closed
3/9/2011	8:15:19 PM	Bypass valve opened
3/9/2011	8:15:19 PM	Helium MFC set to  0.000000
3/9/2011	8:15:19 PM	H2 MFC set to  0.000000
3/9/2011	8:15:19 PM	BCl3 MFC set to  0.000000
3/9/2011	8:15:19 PM	PHl3 MFC set to  0.000000
3/9/2011	8:15:19 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:15:19 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:15:19 PM	Tube furnace set to 0
3/9/2011	8:15:19 PM	Helium valve closed
3/9/2011	8:15:19 PM	H2 valve closed
3/9/2011	8:15:19 PM	BCl3 valve closed
3/9/2011	8:15:19 PM	PH3 valve closed
3/9/2011	8:15:19 PM	SiCl4 pre valve closed
3/9/2011	8:15:19 PM	SiCl4 post valve closed
3/9/2011	8:15:19 PM	Bubbler valve closed
3/9/2011	8:15:19 PM	Main Vac valve opened
3/9/2011	8:15:19 PM	Bypass valve opened
3/9/2011	8:15:19 PM	Helium MFC set to  0.000000
3/9/2011	8:15:19 PM	H2 MFC set to  0.000000
3/9/2011	8:15:19 PM	BCl3 MFC set to  0.000000
3/9/2011	8:15:19 PM	PHl3 MFC set to  0.000000
3/9/2011	8:15:19 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:15:19 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:15:19 PM	Tube furnace set to 0
3/9/2011	8:16:19 PM	H2 valve closed
3/9/2011	8:16:19 PM	BCl3 valve closed
3/9/2011	8:16:19 PM	PH3 valve closed
3/9/2011	8:16:19 PM	SiCl4 pre valve closed
3/9/2011	8:16:19 PM	SiCl4 post valve closed
3/9/2011	8:16:19 PM	Bubbler valve closed
3/9/2011	8:16:19 PM	Helium valve opened
3/9/2011	8:16:19 PM	Main Vac valve opened
3/9/2011	8:16:19 PM	Bypass valve opened
3/9/2011	8:16:19 PM	Helium MFC set to  100.000000
3/9/2011	8:16:19 PM	H2 MFC set to  0.000000
3/9/2011	8:16:19 PM	BCl3 MFC set to  0.000000
3/9/2011	8:16:19 PM	PHl3 MFC set to  0.000000
3/9/2011	8:16:19 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:16:19 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:16:19 PM	Tube furnace set to 0
3/9/2011	8:17:19 PM	Helium valve closed
3/9/2011	8:17:19 PM	H2 valve closed
3/9/2011	8:17:19 PM	BCl3 valve closed
3/9/2011	8:17:19 PM	PH3 valve closed
3/9/2011	8:17:19 PM	SiCl4 pre valve closed
3/9/2011	8:17:19 PM	SiCl4 post valve closed
3/9/2011	8:17:20 PM	Bubbler valve closed
3/9/2011	8:17:20 PM	Main Vac valve opened
3/9/2011	8:17:20 PM	Bypass valve opened
3/9/2011	8:17:20 PM	Helium MFC set to  0.000000
3/9/2011	8:17:20 PM	H2 MFC set to  0.000000
3/9/2011	8:17:20 PM	BCl3 MFC set to  0.000000
3/9/2011	8:17:20 PM	PHl3 MFC set to  0.000000
3/9/2011	8:17:20 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:17:20 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:17:20 PM	Tube furnace set to 0
3/9/2011	8:18:20 PM	H2 valve closed
3/9/2011	8:18:20 PM	BCl3 valve closed
3/9/2011	8:18:20 PM	PH3 valve closed
3/9/2011	8:18:20 PM	SiCl4 pre valve closed
3/9/2011	8:18:20 PM	SiCl4 post valve closed
3/9/2011	8:18:20 PM	Bubbler valve closed
3/9/2011	8:18:20 PM	Helium valve opened
3/9/2011	8:18:20 PM	Main Vac valve opened
3/9/2011	8:18:20 PM	Bypass valve opened
3/9/2011	8:18:20 PM	Helium MFC set to  100.000000
3/9/2011	8:18:20 PM	H2 MFC set to  0.000000
3/9/2011	8:18:20 PM	BCl3 MFC set to  0.000000
3/9/2011	8:18:20 PM	PHl3 MFC set to  0.000000
3/9/2011	8:18:20 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:18:20 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:18:20 PM	Tube furnace set to 0
3/9/2011	8:19:20 PM	Helium valve closed
3/9/2011	8:19:20 PM	H2 valve closed
3/9/2011	8:19:20 PM	BCl3 valve closed
3/9/2011	8:19:20 PM	PH3 valve closed
3/9/2011	8:19:20 PM	SiCl4 pre valve closed
3/9/2011	8:19:20 PM	SiCl4 post valve closed
3/9/2011	8:19:20 PM	Bubbler valve closed
3/9/2011	8:19:20 PM	Main Vac valve opened
3/9/2011	8:19:20 PM	Bypass valve opened
3/9/2011	8:19:20 PM	Helium MFC set to  0.000000
3/9/2011	8:19:20 PM	H2 MFC set to  0.000000
3/9/2011	8:19:20 PM	BCl3 MFC set to  0.000000
3/9/2011	8:19:20 PM	PHl3 MFC set to  0.000000
3/9/2011	8:19:20 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:19:20 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:19:20 PM	Tube furnace set to 0
3/9/2011	8:20:20 PM	H2 valve closed
3/9/2011	8:20:20 PM	BCl3 valve closed
3/9/2011	8:20:20 PM	PH3 valve closed
3/9/2011	8:20:20 PM	SiCl4 pre valve closed
3/9/2011	8:20:20 PM	SiCl4 post valve closed
3/9/2011	8:20:20 PM	Bubbler valve closed
3/9/2011	8:20:20 PM	Helium valve opened
3/9/2011	8:20:20 PM	Main Vac valve opened
3/9/2011	8:20:20 PM	Bypass valve opened
3/9/2011	8:20:20 PM	Helium MFC set to  100.000000
3/9/2011	8:20:20 PM	H2 MFC set to  0.000000
3/9/2011	8:20:20 PM	BCl3 MFC set to  0.000000
3/9/2011	8:20:20 PM	PHl3 MFC set to  0.000000
3/9/2011	8:20:20 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:20:20 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:20:20 PM	Tube furnace set to 0
3/9/2011	8:21:20 PM	Helium valve closed
3/9/2011	8:21:20 PM	H2 valve closed
3/9/2011	8:21:20 PM	BCl3 valve closed
3/9/2011	8:21:20 PM	PH3 valve closed
3/9/2011	8:21:20 PM	SiCl4 pre valve closed
3/9/2011	8:21:20 PM	SiCl4 post valve closed
3/9/2011	8:21:20 PM	Bubbler valve closed
3/9/2011	8:21:20 PM	Main Vac valve opened
3/9/2011	8:21:20 PM	Bypass valve opened
3/9/2011	8:21:20 PM	Helium MFC set to  0.000000
3/9/2011	8:21:20 PM	H2 MFC set to  0.000000
3/9/2011	8:21:20 PM	BCl3 MFC set to  0.000000
3/9/2011	8:21:20 PM	PHl3 MFC set to  0.000000
3/9/2011	8:21:20 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:21:20 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:21:20 PM	Tube furnace set to 0
3/9/2011	8:22:20 PM	H2 valve closed
3/9/2011	8:22:20 PM	BCl3 valve closed
3/9/2011	8:22:20 PM	PH3 valve closed
3/9/2011	8:22:20 PM	SiCl4 pre valve closed
3/9/2011	8:22:20 PM	SiCl4 post valve closed
3/9/2011	8:22:20 PM	Bubbler valve closed
3/9/2011	8:22:20 PM	Helium valve opened
3/9/2011	8:22:20 PM	Main Vac valve opened
3/9/2011	8:22:20 PM	Bypass valve opened
3/9/2011	8:22:20 PM	Helium MFC set to  100.000000
3/9/2011	8:22:20 PM	H2 MFC set to  0.000000
3/9/2011	8:22:20 PM	BCl3 MFC set to  0.000000
3/9/2011	8:22:20 PM	PHl3 MFC set to  0.000000
3/9/2011	8:22:20 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:22:21 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:22:21 PM	Tube furnace set to 0
3/9/2011	8:23:21 PM	Helium valve closed
3/9/2011	8:23:21 PM	H2 valve closed
3/9/2011	8:23:21 PM	BCl3 valve closed
3/9/2011	8:23:21 PM	PH3 valve closed
3/9/2011	8:23:21 PM	SiCl4 pre valve closed
3/9/2011	8:23:21 PM	SiCl4 post valve closed
3/9/2011	8:23:21 PM	Bubbler valve closed
3/9/2011	8:23:21 PM	Main Vac valve opened
3/9/2011	8:23:21 PM	Bypass valve opened
3/9/2011	8:23:21 PM	Helium MFC set to  0.000000
3/9/2011	8:23:21 PM	H2 MFC set to  0.000000
3/9/2011	8:23:21 PM	BCl3 MFC set to  0.000000
3/9/2011	8:23:21 PM	PHl3 MFC set to  0.000000
3/9/2011	8:23:21 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:23:21 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:23:21 PM	Tube furnace set to 0
3/9/2011	8:24:21 PM	H2 valve closed
3/9/2011	8:24:21 PM	BCl3 valve closed
3/9/2011	8:24:21 PM	PH3 valve closed
3/9/2011	8:24:21 PM	SiCl4 pre valve closed
3/9/2011	8:24:21 PM	SiCl4 post valve closed
3/9/2011	8:24:21 PM	Bubbler valve closed
3/9/2011	8:24:21 PM	Helium valve opened
3/9/2011	8:24:21 PM	Main Vac valve opened
3/9/2011	8:24:21 PM	Bypass valve opened
3/9/2011	8:24:21 PM	Helium MFC set to  100.000000
3/9/2011	8:24:21 PM	H2 MFC set to  0.000000
3/9/2011	8:24:21 PM	BCl3 MFC set to  0.000000
3/9/2011	8:24:21 PM	PHl3 MFC set to  0.000000
3/9/2011	8:24:21 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:24:21 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:24:21 PM	Tube furnace set to 0
3/9/2011	8:25:21 PM	Helium valve closed
3/9/2011	8:25:21 PM	H2 valve closed
3/9/2011	8:25:21 PM	BCl3 valve closed
3/9/2011	8:25:21 PM	PH3 valve closed
3/9/2011	8:25:21 PM	SiCl4 pre valve closed
3/9/2011	8:25:21 PM	SiCl4 post valve closed
3/9/2011	8:25:21 PM	Bubbler valve closed
3/9/2011	8:25:21 PM	Main Vac valve opened
3/9/2011	8:25:21 PM	Bypass valve opened
3/9/2011	8:25:21 PM	Helium MFC set to  0.000000
3/9/2011	8:25:21 PM	H2 MFC set to  0.000000
3/9/2011	8:25:21 PM	BCl3 MFC set to  0.000000
3/9/2011	8:25:21 PM	PHl3 MFC set to  0.000000
3/9/2011	8:25:21 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:25:21 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:25:21 PM	Tube furnace set to 0
3/9/2011	8:26:21 PM	H2 valve closed
3/9/2011	8:26:21 PM	BCl3 valve closed
3/9/2011	8:26:21 PM	PH3 valve closed
3/9/2011	8:26:21 PM	SiCl4 pre valve closed
3/9/2011	8:26:21 PM	SiCl4 post valve closed
3/9/2011	8:26:21 PM	Bubbler valve closed
3/9/2011	8:26:21 PM	Helium valve opened
3/9/2011	8:26:21 PM	Main Vac valve opened
3/9/2011	8:26:21 PM	Bypass valve opened
3/9/2011	8:26:21 PM	Helium MFC set to  100.000000
3/9/2011	8:26:21 PM	H2 MFC set to  0.000000
3/9/2011	8:26:21 PM	BCl3 MFC set to  0.000000
3/9/2011	8:26:21 PM	PHl3 MFC set to  0.000000
3/9/2011	8:26:21 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:26:21 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:26:21 PM	Tube furnace set to 0
3/9/2011	8:27:21 PM	Helium valve closed
3/9/2011	8:27:21 PM	H2 valve closed
3/9/2011	8:27:21 PM	BCl3 valve closed
3/9/2011	8:27:21 PM	PH3 valve closed
3/9/2011	8:27:21 PM	SiCl4 pre valve closed
3/9/2011	8:27:21 PM	SiCl4 post valve closed
3/9/2011	8:27:21 PM	Bubbler valve closed
3/9/2011	8:27:21 PM	Main Vac valve opened
3/9/2011	8:27:21 PM	Bypass valve opened
3/9/2011	8:27:21 PM	Helium MFC set to  0.000000
3/9/2011	8:27:21 PM	H2 MFC set to  0.000000
3/9/2011	8:27:21 PM	BCl3 MFC set to  0.000000
3/9/2011	8:27:21 PM	PHl3 MFC set to  0.000000
3/9/2011	8:27:21 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:27:21 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:27:22 PM	Tube furnace set to 0
3/9/2011	8:28:22 PM	H2 valve closed
3/9/2011	8:28:22 PM	BCl3 valve closed
3/9/2011	8:28:22 PM	PH3 valve closed
3/9/2011	8:28:22 PM	SiCl4 pre valve closed
3/9/2011	8:28:22 PM	SiCl4 post valve closed
3/9/2011	8:28:22 PM	Bubbler valve closed
3/9/2011	8:28:22 PM	Helium valve opened
3/9/2011	8:28:22 PM	Main Vac valve opened
3/9/2011	8:28:22 PM	Bypass valve opened
3/9/2011	8:28:22 PM	Helium MFC set to  100.000000
3/9/2011	8:28:22 PM	H2 MFC set to  0.000000
3/9/2011	8:28:22 PM	BCl3 MFC set to  0.000000
3/9/2011	8:28:22 PM	PHl3 MFC set to  0.000000
3/9/2011	8:28:22 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:28:22 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:28:22 PM	Tube furnace set to 0
3/9/2011	8:29:22 PM	Helium valve closed
3/9/2011	8:29:22 PM	H2 valve closed
3/9/2011	8:29:22 PM	BCl3 valve closed
3/9/2011	8:29:22 PM	PH3 valve closed
3/9/2011	8:29:22 PM	SiCl4 pre valve closed
3/9/2011	8:29:22 PM	SiCl4 post valve closed
3/9/2011	8:29:22 PM	Bubbler valve closed
3/9/2011	8:29:22 PM	Main Vac valve opened
3/9/2011	8:29:22 PM	Bypass valve opened
3/9/2011	8:29:22 PM	Helium MFC set to  0.000000
3/9/2011	8:29:22 PM	H2 MFC set to  0.000000
3/9/2011	8:29:22 PM	BCl3 MFC set to  0.000000
3/9/2011	8:29:22 PM	PHl3 MFC set to  0.000000
3/9/2011	8:29:22 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:29:22 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:29:22 PM	Tube furnace set to 0
3/9/2011	8:30:22 PM	H2 valve closed
3/9/2011	8:30:22 PM	BCl3 valve closed
3/9/2011	8:30:22 PM	PH3 valve closed
3/9/2011	8:30:22 PM	SiCl4 pre valve closed
3/9/2011	8:30:22 PM	SiCl4 post valve closed
3/9/2011	8:30:22 PM	Bubbler valve closed
3/9/2011	8:30:22 PM	Helium valve opened
3/9/2011	8:30:22 PM	Main Vac valve opened
3/9/2011	8:30:22 PM	Bypass valve opened
3/9/2011	8:30:22 PM	Helium MFC set to  100.000000
3/9/2011	8:30:22 PM	H2 MFC set to  0.000000
3/9/2011	8:30:22 PM	BCl3 MFC set to  0.000000
3/9/2011	8:30:22 PM	PHl3 MFC set to  0.000000
3/9/2011	8:30:22 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:30:22 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:30:22 PM	Tube furnace set to 0
3/9/2011	8:31:22 PM	Helium valve closed
3/9/2011	8:31:22 PM	H2 valve closed
3/9/2011	8:31:22 PM	BCl3 valve closed
3/9/2011	8:31:22 PM	PH3 valve closed
3/9/2011	8:31:22 PM	SiCl4 pre valve closed
3/9/2011	8:31:22 PM	SiCl4 post valve closed
3/9/2011	8:31:22 PM	Bubbler valve closed
3/9/2011	8:31:22 PM	Main Vac valve opened
3/9/2011	8:31:22 PM	Bypass valve opened
3/9/2011	8:31:22 PM	Helium MFC set to  0.000000
3/9/2011	8:31:22 PM	H2 MFC set to  0.000000
3/9/2011	8:31:22 PM	BCl3 MFC set to  0.000000
3/9/2011	8:31:22 PM	PHl3 MFC set to  0.000000
3/9/2011	8:31:22 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:31:22 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:31:22 PM	Tube furnace set to 0
3/9/2011	8:32:22 PM	H2 valve closed
3/9/2011	8:32:22 PM	BCl3 valve closed
3/9/2011	8:32:22 PM	PH3 valve closed
3/9/2011	8:32:22 PM	SiCl4 pre valve closed
3/9/2011	8:32:22 PM	SiCl4 post valve closed
3/9/2011	8:32:22 PM	Bubbler valve closed
3/9/2011	8:32:22 PM	Helium valve opened
3/9/2011	8:32:22 PM	Main Vac valve opened
3/9/2011	8:32:22 PM	Bypass valve opened
3/9/2011	8:32:22 PM	Helium MFC set to  100.000000
3/9/2011	8:32:23 PM	H2 MFC set to  0.000000
3/9/2011	8:32:23 PM	BCl3 MFC set to  0.000000
3/9/2011	8:32:23 PM	PHl3 MFC set to  0.000000
3/9/2011	8:32:23 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:32:23 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:32:23 PM	Tube furnace set to 0
3/9/2011	8:33:23 PM	Helium valve closed
3/9/2011	8:33:23 PM	H2 valve closed
3/9/2011	8:33:23 PM	BCl3 valve closed
3/9/2011	8:33:23 PM	PH3 valve closed
3/9/2011	8:33:23 PM	SiCl4 pre valve closed
3/9/2011	8:33:23 PM	SiCl4 post valve closed
3/9/2011	8:33:23 PM	Bubbler valve closed
3/9/2011	8:33:23 PM	Main Vac valve opened
3/9/2011	8:33:23 PM	Bypass valve opened
3/9/2011	8:33:23 PM	Helium MFC set to  0.000000
3/9/2011	8:33:23 PM	H2 MFC set to  0.000000
3/9/2011	8:33:23 PM	BCl3 MFC set to  0.000000
3/9/2011	8:33:23 PM	PHl3 MFC set to  0.000000
3/9/2011	8:33:23 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:33:23 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:33:23 PM	Tube furnace set to 0
3/9/2011	8:34:23 PM	H2 valve closed
3/9/2011	8:34:23 PM	BCl3 valve closed
3/9/2011	8:34:23 PM	PH3 valve closed
3/9/2011	8:34:23 PM	SiCl4 pre valve closed
3/9/2011	8:34:23 PM	SiCl4 post valve closed
3/9/2011	8:34:23 PM	Bubbler valve closed
3/9/2011	8:34:23 PM	Helium valve opened
3/9/2011	8:34:23 PM	Main Vac valve opened
3/9/2011	8:34:23 PM	Bypass valve opened
3/9/2011	8:34:23 PM	Helium MFC set to  100.000000
3/9/2011	8:34:23 PM	H2 MFC set to  0.000000
3/9/2011	8:34:23 PM	BCl3 MFC set to  0.000000
3/9/2011	8:34:23 PM	PHl3 MFC set to  0.000000
3/9/2011	8:34:23 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:34:23 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:34:23 PM	Tube furnace set to 0
3/9/2011	8:35:23 PM	Helium valve closed
3/9/2011	8:35:23 PM	H2 valve closed
3/9/2011	8:35:23 PM	BCl3 valve closed
3/9/2011	8:35:23 PM	PH3 valve closed
3/9/2011	8:35:23 PM	SiCl4 pre valve closed
3/9/2011	8:35:23 PM	SiCl4 post valve closed
3/9/2011	8:35:23 PM	Bubbler valve closed
3/9/2011	8:35:23 PM	Main Vac valve opened
3/9/2011	8:35:23 PM	Bypass valve opened
3/9/2011	8:35:23 PM	Helium MFC set to  0.000000
3/9/2011	8:35:23 PM	H2 MFC set to  0.000000
3/9/2011	8:35:23 PM	BCl3 MFC set to  0.000000
3/9/2011	8:35:23 PM	PHl3 MFC set to  0.000000
3/9/2011	8:35:23 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:35:23 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:35:23 PM	Tube furnace set to 0
3/9/2011	8:35:24 PM	Run finished at 8:35 PM
3/9/2011	8:35:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	8:39:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	8:40:06 PM	Recipe started at 8:40 PM
3/9/2011	8:40:06 PM	Helium valve closed
3/9/2011	8:40:06 PM	H2 valve closed
3/9/2011	8:40:06 PM	BCl3 valve closed
3/9/2011	8:40:06 PM	PH3 valve closed
3/9/2011	8:40:06 PM	SiCl4 pre valve closed
3/9/2011	8:40:06 PM	SiCl4 post valve closed
3/9/2011	8:40:06 PM	Main Vac valve closed
3/9/2011	8:40:06 PM	Bubbler valve closed
3/9/2011	8:40:06 PM	Bypass valve opened
3/9/2011	8:40:06 PM	Helium MFC set to  0.000000
3/9/2011	8:40:06 PM	H2 MFC set to  0.000000
3/9/2011	8:40:06 PM	BCl3 MFC set to  0.000000
3/9/2011	8:40:06 PM	PHl3 MFC set to  0.000000
3/9/2011	8:40:06 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:40:06 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:40:07 PM	Tube furnace set to 0
3/9/2011	8:40:07 PM	Helium valve closed
3/9/2011	8:40:07 PM	H2 valve closed
3/9/2011	8:40:07 PM	BCl3 valve closed
3/9/2011	8:40:07 PM	PH3 valve closed
3/9/2011	8:40:07 PM	SiCl4 pre valve closed
3/9/2011	8:40:07 PM	SiCl4 post valve closed
3/9/2011	8:40:07 PM	Bubbler valve closed
3/9/2011	8:40:07 PM	Main Vac valve opened
3/9/2011	8:40:07 PM	Bypass valve opened
3/9/2011	8:40:07 PM	Helium MFC set to  0.000000
3/9/2011	8:40:07 PM	H2 MFC set to  0.000000
3/9/2011	8:40:07 PM	BCl3 MFC set to  0.000000
3/9/2011	8:40:07 PM	PHl3 MFC set to  0.000000
3/9/2011	8:40:07 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:40:07 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:40:07 PM	Tube furnace set to 0
3/9/2011	8:41:07 PM	H2 valve closed
3/9/2011	8:41:07 PM	BCl3 valve closed
3/9/2011	8:41:07 PM	PH3 valve closed
3/9/2011	8:41:07 PM	SiCl4 pre valve closed
3/9/2011	8:41:07 PM	SiCl4 post valve closed
3/9/2011	8:41:07 PM	Bubbler valve closed
3/9/2011	8:41:07 PM	Helium valve opened
3/9/2011	8:41:07 PM	Main Vac valve opened
3/9/2011	8:41:07 PM	Bypass valve opened
3/9/2011	8:41:07 PM	Helium MFC set to  100.000000
3/9/2011	8:41:07 PM	H2 MFC set to  0.000000
3/9/2011	8:41:07 PM	BCl3 MFC set to  0.000000
3/9/2011	8:41:07 PM	PHl3 MFC set to  0.000000
3/9/2011	8:41:07 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:41:07 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:41:07 PM	Tube furnace set to 0
3/9/2011	8:42:07 PM	Helium valve closed
3/9/2011	8:42:07 PM	H2 valve closed
3/9/2011	8:42:07 PM	BCl3 valve closed
3/9/2011	8:42:07 PM	PH3 valve closed
3/9/2011	8:42:07 PM	SiCl4 pre valve closed
3/9/2011	8:42:07 PM	SiCl4 post valve closed
3/9/2011	8:42:07 PM	Bubbler valve closed
3/9/2011	8:42:07 PM	Main Vac valve opened
3/9/2011	8:42:07 PM	Bypass valve opened
3/9/2011	8:42:07 PM	Helium MFC set to  0.000000
3/9/2011	8:42:07 PM	H2 MFC set to  0.000000
3/9/2011	8:42:07 PM	BCl3 MFC set to  0.000000
3/9/2011	8:42:07 PM	PHl3 MFC set to  0.000000
3/9/2011	8:42:07 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:42:07 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:42:07 PM	Tube furnace set to 0
3/9/2011	8:43:07 PM	H2 valve closed
3/9/2011	8:43:07 PM	BCl3 valve closed
3/9/2011	8:43:07 PM	PH3 valve closed
3/9/2011	8:43:07 PM	SiCl4 pre valve closed
3/9/2011	8:43:07 PM	SiCl4 post valve closed
3/9/2011	8:43:07 PM	Bubbler valve closed
3/9/2011	8:43:07 PM	Helium valve opened
3/9/2011	8:43:07 PM	Main Vac valve opened
3/9/2011	8:43:07 PM	Bypass valve opened
3/9/2011	8:43:07 PM	Helium MFC set to  100.000000
3/9/2011	8:43:07 PM	H2 MFC set to  0.000000
3/9/2011	8:43:07 PM	BCl3 MFC set to  0.000000
3/9/2011	8:43:07 PM	PHl3 MFC set to  0.000000
3/9/2011	8:43:07 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:43:07 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:43:08 PM	Tube furnace set to 0
3/9/2011	8:44:08 PM	Helium valve closed
3/9/2011	8:44:08 PM	H2 valve closed
3/9/2011	8:44:08 PM	BCl3 valve closed
3/9/2011	8:44:08 PM	PH3 valve closed
3/9/2011	8:44:08 PM	SiCl4 pre valve closed
3/9/2011	8:44:08 PM	SiCl4 post valve closed
3/9/2011	8:44:08 PM	Bubbler valve closed
3/9/2011	8:44:08 PM	Main Vac valve opened
3/9/2011	8:44:08 PM	Bypass valve opened
3/9/2011	8:44:08 PM	Helium MFC set to  0.000000
3/9/2011	8:44:08 PM	H2 MFC set to  0.000000
3/9/2011	8:44:08 PM	BCl3 MFC set to  0.000000
3/9/2011	8:44:08 PM	PHl3 MFC set to  0.000000
3/9/2011	8:44:08 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:44:08 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:44:08 PM	Tube furnace set to 0
3/9/2011	8:45:08 PM	H2 valve closed
3/9/2011	8:45:08 PM	BCl3 valve closed
3/9/2011	8:45:08 PM	PH3 valve closed
3/9/2011	8:45:08 PM	SiCl4 pre valve closed
3/9/2011	8:45:08 PM	SiCl4 post valve closed
3/9/2011	8:45:08 PM	Bubbler valve closed
3/9/2011	8:45:08 PM	Helium valve opened
3/9/2011	8:45:08 PM	Main Vac valve opened
3/9/2011	8:45:08 PM	Bypass valve opened
3/9/2011	8:45:08 PM	Helium MFC set to  100.000000
3/9/2011	8:45:08 PM	H2 MFC set to  0.000000
3/9/2011	8:45:08 PM	BCl3 MFC set to  0.000000
3/9/2011	8:45:08 PM	PHl3 MFC set to  0.000000
3/9/2011	8:45:08 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:45:08 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:45:08 PM	Tube furnace set to 0
3/9/2011	8:46:08 PM	Helium valve closed
3/9/2011	8:46:08 PM	H2 valve closed
3/9/2011	8:46:08 PM	BCl3 valve closed
3/9/2011	8:46:08 PM	PH3 valve closed
3/9/2011	8:46:08 PM	SiCl4 pre valve closed
3/9/2011	8:46:08 PM	SiCl4 post valve closed
3/9/2011	8:46:08 PM	Bubbler valve closed
3/9/2011	8:46:08 PM	Main Vac valve opened
3/9/2011	8:46:08 PM	Bypass valve opened
3/9/2011	8:46:08 PM	Helium MFC set to  0.000000
3/9/2011	8:46:08 PM	H2 MFC set to  0.000000
3/9/2011	8:46:08 PM	BCl3 MFC set to  0.000000
3/9/2011	8:46:08 PM	PHl3 MFC set to  0.000000
3/9/2011	8:46:08 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:46:08 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:46:08 PM	Tube furnace set to 0
3/9/2011	8:47:08 PM	H2 valve closed
3/9/2011	8:47:08 PM	BCl3 valve closed
3/9/2011	8:47:08 PM	PH3 valve closed
3/9/2011	8:47:08 PM	SiCl4 pre valve closed
3/9/2011	8:47:08 PM	SiCl4 post valve closed
3/9/2011	8:47:08 PM	Bubbler valve closed
3/9/2011	8:47:08 PM	Helium valve opened
3/9/2011	8:47:08 PM	Main Vac valve opened
3/9/2011	8:47:08 PM	Bypass valve opened
3/9/2011	8:47:08 PM	Helium MFC set to  100.000000
3/9/2011	8:47:08 PM	H2 MFC set to  0.000000
3/9/2011	8:47:08 PM	BCl3 MFC set to  0.000000
3/9/2011	8:47:08 PM	PHl3 MFC set to  0.000000
3/9/2011	8:47:08 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:47:08 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:47:08 PM	Tube furnace set to 0
3/9/2011	8:48:08 PM	Helium valve closed
3/9/2011	8:48:08 PM	H2 valve closed
3/9/2011	8:48:08 PM	BCl3 valve closed
3/9/2011	8:48:08 PM	PH3 valve closed
3/9/2011	8:48:08 PM	SiCl4 pre valve closed
3/9/2011	8:48:08 PM	SiCl4 post valve closed
3/9/2011	8:48:08 PM	Bubbler valve closed
3/9/2011	8:48:08 PM	Main Vac valve opened
3/9/2011	8:48:08 PM	Bypass valve opened
3/9/2011	8:48:08 PM	Helium MFC set to  0.000000
3/9/2011	8:48:08 PM	H2 MFC set to  0.000000
3/9/2011	8:48:08 PM	BCl3 MFC set to  0.000000
3/9/2011	8:48:08 PM	PHl3 MFC set to  0.000000
3/9/2011	8:48:08 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:48:08 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:48:09 PM	Tube furnace set to 0
3/9/2011	8:49:09 PM	H2 valve closed
3/9/2011	8:49:09 PM	BCl3 valve closed
3/9/2011	8:49:09 PM	PH3 valve closed
3/9/2011	8:49:09 PM	SiCl4 pre valve closed
3/9/2011	8:49:09 PM	SiCl4 post valve closed
3/9/2011	8:49:09 PM	Bubbler valve closed
3/9/2011	8:49:09 PM	Helium valve opened
3/9/2011	8:49:09 PM	Main Vac valve opened
3/9/2011	8:49:09 PM	Bypass valve opened
3/9/2011	8:49:09 PM	Helium MFC set to  100.000000
3/9/2011	8:49:09 PM	H2 MFC set to  0.000000
3/9/2011	8:49:09 PM	BCl3 MFC set to  0.000000
3/9/2011	8:49:09 PM	PHl3 MFC set to  0.000000
3/9/2011	8:49:09 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:49:09 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:49:09 PM	Tube furnace set to 0
3/9/2011	8:50:09 PM	Helium valve closed
3/9/2011	8:50:09 PM	H2 valve closed
3/9/2011	8:50:09 PM	BCl3 valve closed
3/9/2011	8:50:09 PM	PH3 valve closed
3/9/2011	8:50:09 PM	SiCl4 pre valve closed
3/9/2011	8:50:09 PM	SiCl4 post valve closed
3/9/2011	8:50:09 PM	Bubbler valve closed
3/9/2011	8:50:09 PM	Main Vac valve opened
3/9/2011	8:50:09 PM	Bypass valve opened
3/9/2011	8:50:09 PM	Helium MFC set to  0.000000
3/9/2011	8:50:09 PM	H2 MFC set to  0.000000
3/9/2011	8:50:09 PM	BCl3 MFC set to  0.000000
3/9/2011	8:50:09 PM	PHl3 MFC set to  0.000000
3/9/2011	8:50:09 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:50:09 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:50:09 PM	Tube furnace set to 0
3/9/2011	8:51:09 PM	H2 valve closed
3/9/2011	8:51:09 PM	BCl3 valve closed
3/9/2011	8:51:09 PM	PH3 valve closed
3/9/2011	8:51:09 PM	SiCl4 pre valve closed
3/9/2011	8:51:09 PM	SiCl4 post valve closed
3/9/2011	8:51:09 PM	Bubbler valve closed
3/9/2011	8:51:09 PM	Helium valve opened
3/9/2011	8:51:09 PM	Main Vac valve opened
3/9/2011	8:51:09 PM	Bypass valve opened
3/9/2011	8:51:09 PM	Helium MFC set to  100.000000
3/9/2011	8:51:09 PM	H2 MFC set to  0.000000
3/9/2011	8:51:09 PM	BCl3 MFC set to  0.000000
3/9/2011	8:51:09 PM	PHl3 MFC set to  0.000000
3/9/2011	8:51:09 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:51:09 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:51:09 PM	Tube furnace set to 0
3/9/2011	8:52:09 PM	Helium valve closed
3/9/2011	8:52:09 PM	H2 valve closed
3/9/2011	8:52:09 PM	BCl3 valve closed
3/9/2011	8:52:09 PM	PH3 valve closed
3/9/2011	8:52:09 PM	SiCl4 pre valve closed
3/9/2011	8:52:09 PM	SiCl4 post valve closed
3/9/2011	8:52:09 PM	Bubbler valve closed
3/9/2011	8:52:09 PM	Main Vac valve opened
3/9/2011	8:52:09 PM	Bypass valve opened
3/9/2011	8:52:09 PM	Helium MFC set to  0.000000
3/9/2011	8:52:09 PM	H2 MFC set to  0.000000
3/9/2011	8:52:09 PM	BCl3 MFC set to  0.000000
3/9/2011	8:52:09 PM	PHl3 MFC set to  0.000000
3/9/2011	8:52:09 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:52:09 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:52:09 PM	Tube furnace set to 0
3/9/2011	8:53:09 PM	H2 valve closed
3/9/2011	8:53:09 PM	BCl3 valve closed
3/9/2011	8:53:09 PM	PH3 valve closed
3/9/2011	8:53:09 PM	SiCl4 pre valve closed
3/9/2011	8:53:09 PM	SiCl4 post valve closed
3/9/2011	8:53:09 PM	Bubbler valve closed
3/9/2011	8:53:09 PM	Helium valve opened
3/9/2011	8:53:09 PM	Main Vac valve opened
3/9/2011	8:53:09 PM	Bypass valve opened
3/9/2011	8:53:09 PM	Helium MFC set to  100.000000
3/9/2011	8:53:09 PM	H2 MFC set to  0.000000
3/9/2011	8:53:09 PM	BCl3 MFC set to  0.000000
3/9/2011	8:53:09 PM	PHl3 MFC set to  0.000000
3/9/2011	8:53:09 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:53:09 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:53:10 PM	Tube furnace set to 0
3/9/2011	8:54:10 PM	Helium valve closed
3/9/2011	8:54:10 PM	H2 valve closed
3/9/2011	8:54:10 PM	BCl3 valve closed
3/9/2011	8:54:10 PM	PH3 valve closed
3/9/2011	8:54:10 PM	SiCl4 pre valve closed
3/9/2011	8:54:10 PM	SiCl4 post valve closed
3/9/2011	8:54:10 PM	Bubbler valve closed
3/9/2011	8:54:10 PM	Main Vac valve opened
3/9/2011	8:54:10 PM	Bypass valve opened
3/9/2011	8:54:10 PM	Helium MFC set to  0.000000
3/9/2011	8:54:10 PM	H2 MFC set to  0.000000
3/9/2011	8:54:10 PM	BCl3 MFC set to  0.000000
3/9/2011	8:54:10 PM	PHl3 MFC set to  0.000000
3/9/2011	8:54:10 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:54:10 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:54:10 PM	Tube furnace set to 0
3/9/2011	8:54:17 PM	Run aborted at 8:54 PM
3/9/2011	8:54:17 PM	Helium valve closed
3/9/2011	8:54:17 PM	H2 valve closed
3/9/2011	8:54:17 PM	BCl3 valve closed
3/9/2011	8:54:17 PM	PH3 valve closed
3/9/2011	8:54:17 PM	SiCl4 pre valve closed
3/9/2011	8:54:17 PM	SiCl4 post valve closed
3/9/2011	8:54:17 PM	Bypass valve closed
3/9/2011	8:54:17 PM	Main Vac valve closed
3/9/2011	8:54:17 PM	Bubbler valve closed
3/9/2011	8:54:17 PM	Helium MFC set to  0.000000
3/9/2011	8:54:17 PM	H2 MFC set to  0.000000
3/9/2011	8:54:17 PM	BCl3 MFC set to  0.000000
3/9/2011	8:54:17 PM	PHl3 MFC set to  0.000000
3/9/2011	8:54:17 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:54:17 PM	Tube furnace set to 0
3/9/2011	8:54:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	8:54:19 PM	Bypass valve opened
3/9/2011	8:54:21 PM	Main Vac valve opened
3/9/2011	8:54:57 PM	Recipe started at 8:54 PM
3/9/2011	8:54:58 PM	Helium valve closed
3/9/2011	8:54:58 PM	BCl3 valve closed
3/9/2011	8:54:58 PM	PH3 valve closed
3/9/2011	8:54:58 PM	SiCl4 pre valve closed
3/9/2011	8:54:58 PM	SiCl4 post valve closed
3/9/2011	8:54:58 PM	Main Vac valve closed
3/9/2011	8:54:58 PM	Bypass valve closed
3/9/2011	8:54:58 PM	Bubbler valve closed
3/9/2011	8:54:58 PM	H2 valve opened
3/9/2011	8:54:58 PM	Helium MFC set to  0.000000
3/9/2011	8:54:58 PM	H2 MFC set to  500.000000
3/9/2011	8:54:58 PM	BCl3 MFC set to  0.000000
3/9/2011	8:54:58 PM	PHl3 MFC set to  0.000000
3/9/2011	8:54:58 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:54:58 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:54:58 PM	Tube furnace set to 0
3/9/2011	8:56:17 PM	Helium valve closed
3/9/2011	8:56:17 PM	BCl3 valve closed
3/9/2011	8:56:17 PM	PH3 valve closed
3/9/2011	8:56:17 PM	SiCl4 pre valve closed
3/9/2011	8:56:17 PM	SiCl4 post valve closed
3/9/2011	8:56:17 PM	Main Vac valve closed
3/9/2011	8:56:17 PM	Bypass valve closed
3/9/2011	8:56:17 PM	H2 valve opened
3/9/2011	8:56:17 PM	Bubbler valve opened
3/9/2011	8:56:17 PM	Helium MFC set to  0.000000
3/9/2011	8:56:17 PM	H2 MFC set to  500.000000
3/9/2011	8:56:17 PM	BCl3 MFC set to  0.000000
3/9/2011	8:56:17 PM	PHl3 MFC set to  0.000000
3/9/2011	8:56:17 PM	SiCl4 MFC set to  0.000000
3/9/2011	8:56:17 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	8:56:17 PM	Tube furnace set to 1000
3/9/2011	9:16:17 PM	Helium valve closed
3/9/2011	9:16:17 PM	PH3 valve closed
3/9/2011	9:16:17 PM	Main Vac valve closed
3/9/2011	9:16:17 PM	Bypass valve closed
3/9/2011	9:16:17 PM	H2 valve opened
3/9/2011	9:16:17 PM	BCl3 valve opened
3/9/2011	9:16:17 PM	SiCl4 pre valve opened
3/9/2011	9:16:17 PM	SiCl4 post valve opened
3/9/2011	9:16:17 PM	Bubbler valve opened
3/9/2011	9:16:17 PM	Helium MFC set to  0.000000
3/9/2011	9:16:17 PM	H2 MFC set to  500.000000
3/9/2011	9:16:17 PM	BCl3 MFC set to  3.000000
3/9/2011	9:16:17 PM	PHl3 MFC set to  0.000000
3/9/2011	9:16:17 PM	SiCl4 MFC set to  50.000000
3/9/2011	9:16:17 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	9:16:18 PM	Tube furnace set to 1000
3/9/2011	9:34:18 PM	H2 valve closed
3/9/2011	9:34:18 PM	BCl3 valve closed
3/9/2011	9:34:18 PM	PH3 valve closed
3/9/2011	9:34:18 PM	SiCl4 pre valve closed
3/9/2011	9:34:18 PM	SiCl4 post valve closed
3/9/2011	9:34:18 PM	Main Vac valve closed
3/9/2011	9:34:18 PM	Bypass valve closed
3/9/2011	9:34:18 PM	Helium valve opened
3/9/2011	9:34:18 PM	Bubbler valve opened
3/9/2011	9:34:18 PM	Helium MFC set to  500.000000
3/9/2011	9:34:18 PM	H2 MFC set to  0.000000
3/9/2011	9:34:18 PM	BCl3 MFC set to  0.000000
3/9/2011	9:34:18 PM	PHl3 MFC set to  0.000000
3/9/2011	9:34:18 PM	SiCl4 MFC set to  0.000000
3/9/2011	9:34:18 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	9:34:18 PM	Tube furnace set to 0
3/9/2011	9:54:18 PM	Helium valve closed
3/9/2011	9:54:18 PM	H2 valve closed
3/9/2011	9:54:18 PM	BCl3 valve closed
3/9/2011	9:54:18 PM	PH3 valve closed
3/9/2011	9:54:18 PM	SiCl4 pre valve closed
3/9/2011	9:54:18 PM	SiCl4 post valve closed
3/9/2011	9:54:18 PM	Main Vac valve closed
3/9/2011	9:54:18 PM	Bypass valve closed
3/9/2011	9:54:18 PM	Bubbler valve closed
3/9/2011	9:54:18 PM	Helium MFC set to  0.000000
3/9/2011	9:54:18 PM	H2 MFC set to  0.000000
3/9/2011	9:54:18 PM	BCl3 MFC set to  0.000000
3/9/2011	9:54:18 PM	PHl3 MFC set to  0.000000
3/9/2011	9:54:18 PM	SiCl4 MFC set to  0.000000
3/9/2011	9:54:18 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	9:54:18 PM	Tube furnace set to 0
3/9/2011	9:54:18 PM	Run finished at 9:54 PM
3/9/2011	10:19:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	10:19:01 PM	Recipe started at 10:19 PM
3/9/2011	10:19:01 PM	H2 valve closed
3/9/2011	10:19:01 PM	BCl3 valve closed
3/9/2011	10:19:01 PM	PH3 valve closed
3/9/2011	10:19:01 PM	SiCl4 pre valve closed
3/9/2011	10:19:01 PM	SiCl4 post valve closed
3/9/2011	10:19:01 PM	Main Vac valve closed
3/9/2011	10:19:01 PM	Bypass valve closed
3/9/2011	10:19:01 PM	Bubbler valve closed
3/9/2011	10:19:01 PM	Helium valve opened
3/9/2011	10:19:01 PM	Helium MFC set to  500.000000
3/9/2011	10:19:01 PM	H2 MFC set to  0.000000
3/9/2011	10:19:01 PM	BCl3 MFC set to  0.000000
3/9/2011	10:19:01 PM	PHl3 MFC set to  0.000000
3/9/2011	10:19:01 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:19:01 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:19:02 PM	Tube furnace set to 0
3/9/2011	10:19:02 PM	Helium valve closed
3/9/2011	10:19:02 PM	H2 valve closed
3/9/2011	10:19:02 PM	BCl3 valve closed
3/9/2011	10:19:02 PM	PH3 valve closed
3/9/2011	10:19:02 PM	SiCl4 pre valve closed
3/9/2011	10:19:02 PM	SiCl4 post valve closed
3/9/2011	10:19:02 PM	Main Vac valve closed
3/9/2011	10:19:02 PM	Bypass valve closed
3/9/2011	10:19:02 PM	Bubbler valve closed
3/9/2011	10:19:02 PM	Helium MFC set to  0.000000
3/9/2011	10:19:02 PM	H2 MFC set to  0.000000
3/9/2011	10:19:02 PM	BCl3 MFC set to  0.000000
3/9/2011	10:19:02 PM	PHl3 MFC set to  0.000000
3/9/2011	10:19:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:19:02 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:19:02 PM	Tube furnace set to 0
3/9/2011	10:19:02 PM	Run finished at 10:19 PM
3/9/2011	10:19:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/9/2011	10:25:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	10:25:34 PM	Recipe started at 10:25 PM
3/9/2011	10:25:34 PM	Helium valve closed
3/9/2011	10:25:34 PM	H2 valve closed
3/9/2011	10:25:34 PM	BCl3 valve closed
3/9/2011	10:25:34 PM	PH3 valve closed
3/9/2011	10:25:34 PM	SiCl4 pre valve closed
3/9/2011	10:25:34 PM	SiCl4 post valve closed
3/9/2011	10:25:34 PM	Main Vac valve closed
3/9/2011	10:25:34 PM	Bubbler valve closed
3/9/2011	10:25:34 PM	Bypass valve opened
3/9/2011	10:25:34 PM	Helium MFC set to  0.000000
3/9/2011	10:25:34 PM	H2 MFC set to  0.000000
3/9/2011	10:25:34 PM	BCl3 MFC set to  0.000000
3/9/2011	10:25:34 PM	PHl3 MFC set to  0.000000
3/9/2011	10:25:34 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:25:34 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:25:35 PM	Tube furnace set to 0
3/9/2011	10:26:06 PM	Helium valve closed
3/9/2011	10:26:06 PM	H2 valve closed
3/9/2011	10:26:06 PM	BCl3 valve closed
3/9/2011	10:26:06 PM	PH3 valve closed
3/9/2011	10:26:06 PM	SiCl4 pre valve closed
3/9/2011	10:26:06 PM	SiCl4 post valve closed
3/9/2011	10:26:06 PM	Bubbler valve closed
3/9/2011	10:26:06 PM	Main Vac valve opened
3/9/2011	10:26:06 PM	Bypass valve opened
3/9/2011	10:26:06 PM	Helium MFC set to  0.000000
3/9/2011	10:26:06 PM	H2 MFC set to  0.000000
3/9/2011	10:26:06 PM	BCl3 MFC set to  0.000000
3/9/2011	10:26:06 PM	PHl3 MFC set to  0.000000
3/9/2011	10:26:06 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:26:06 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:26:07 PM	Tube furnace set to 0
3/9/2011	10:26:07 PM	Run finished at 10:26 PM
3/9/2011	10:26:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/9/2011	10:40:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	10:40:27 PM	Recipe started at 10:40 PM
3/9/2011	10:40:27 PM	Helium valve closed
3/9/2011	10:40:27 PM	H2 valve closed
3/9/2011	10:40:27 PM	BCl3 valve closed
3/9/2011	10:40:27 PM	PH3 valve closed
3/9/2011	10:40:27 PM	SiCl4 pre valve closed
3/9/2011	10:40:27 PM	SiCl4 post valve closed
3/9/2011	10:40:27 PM	Main Vac valve closed
3/9/2011	10:40:27 PM	Bubbler valve closed
3/9/2011	10:40:27 PM	Bypass valve opened
3/9/2011	10:40:27 PM	Helium MFC set to  0.000000
3/9/2011	10:40:27 PM	H2 MFC set to  0.000000
3/9/2011	10:40:27 PM	BCl3 MFC set to  0.000000
3/9/2011	10:40:27 PM	PHl3 MFC set to  0.000000
3/9/2011	10:40:27 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:40:27 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:40:27 PM	Tube furnace set to 0
3/9/2011	10:40:27 PM	Helium valve closed
3/9/2011	10:40:27 PM	H2 valve closed
3/9/2011	10:40:27 PM	BCl3 valve closed
3/9/2011	10:40:27 PM	PH3 valve closed
3/9/2011	10:40:27 PM	SiCl4 pre valve closed
3/9/2011	10:40:27 PM	SiCl4 post valve closed
3/9/2011	10:40:27 PM	Bubbler valve closed
3/9/2011	10:40:27 PM	Main Vac valve opened
3/9/2011	10:40:27 PM	Bypass valve opened
3/9/2011	10:40:27 PM	Helium MFC set to  0.000000
3/9/2011	10:40:27 PM	H2 MFC set to  0.000000
3/9/2011	10:40:27 PM	BCl3 MFC set to  0.000000
3/9/2011	10:40:27 PM	PHl3 MFC set to  0.000000
3/9/2011	10:40:27 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:40:27 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:40:27 PM	Tube furnace set to 0
3/9/2011	10:41:27 PM	H2 valve closed
3/9/2011	10:41:27 PM	BCl3 valve closed
3/9/2011	10:41:27 PM	PH3 valve closed
3/9/2011	10:41:27 PM	SiCl4 pre valve closed
3/9/2011	10:41:27 PM	SiCl4 post valve closed
3/9/2011	10:41:27 PM	Bubbler valve closed
3/9/2011	10:41:27 PM	Helium valve opened
3/9/2011	10:41:27 PM	Main Vac valve opened
3/9/2011	10:41:27 PM	Bypass valve opened
3/9/2011	10:41:27 PM	Helium MFC set to  100.000000
3/9/2011	10:41:27 PM	H2 MFC set to  0.000000
3/9/2011	10:41:27 PM	BCl3 MFC set to  0.000000
3/9/2011	10:41:27 PM	PHl3 MFC set to  0.000000
3/9/2011	10:41:27 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:41:27 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:41:28 PM	Tube furnace set to 0
3/9/2011	10:42:28 PM	Helium valve closed
3/9/2011	10:42:28 PM	H2 valve closed
3/9/2011	10:42:28 PM	BCl3 valve closed
3/9/2011	10:42:28 PM	PH3 valve closed
3/9/2011	10:42:28 PM	SiCl4 pre valve closed
3/9/2011	10:42:28 PM	SiCl4 post valve closed
3/9/2011	10:42:28 PM	Bubbler valve closed
3/9/2011	10:42:28 PM	Main Vac valve opened
3/9/2011	10:42:28 PM	Bypass valve opened
3/9/2011	10:42:28 PM	Helium MFC set to  0.000000
3/9/2011	10:42:28 PM	H2 MFC set to  0.000000
3/9/2011	10:42:28 PM	BCl3 MFC set to  0.000000
3/9/2011	10:42:28 PM	PHl3 MFC set to  0.000000
3/9/2011	10:42:28 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:42:28 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:42:28 PM	Tube furnace set to 0
3/9/2011	10:43:28 PM	H2 valve closed
3/9/2011	10:43:28 PM	BCl3 valve closed
3/9/2011	10:43:28 PM	PH3 valve closed
3/9/2011	10:43:28 PM	SiCl4 pre valve closed
3/9/2011	10:43:28 PM	SiCl4 post valve closed
3/9/2011	10:43:28 PM	Bubbler valve closed
3/9/2011	10:43:28 PM	Helium valve opened
3/9/2011	10:43:28 PM	Main Vac valve opened
3/9/2011	10:43:28 PM	Bypass valve opened
3/9/2011	10:43:28 PM	Helium MFC set to  100.000000
3/9/2011	10:43:28 PM	H2 MFC set to  0.000000
3/9/2011	10:43:28 PM	BCl3 MFC set to  0.000000
3/9/2011	10:43:28 PM	PHl3 MFC set to  0.000000
3/9/2011	10:43:28 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:43:28 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:43:28 PM	Tube furnace set to 0
3/9/2011	10:44:28 PM	Helium valve closed
3/9/2011	10:44:28 PM	H2 valve closed
3/9/2011	10:44:28 PM	BCl3 valve closed
3/9/2011	10:44:28 PM	PH3 valve closed
3/9/2011	10:44:28 PM	SiCl4 pre valve closed
3/9/2011	10:44:28 PM	SiCl4 post valve closed
3/9/2011	10:44:28 PM	Bubbler valve closed
3/9/2011	10:44:28 PM	Main Vac valve opened
3/9/2011	10:44:28 PM	Bypass valve opened
3/9/2011	10:44:28 PM	Helium MFC set to  0.000000
3/9/2011	10:44:28 PM	H2 MFC set to  0.000000
3/9/2011	10:44:28 PM	BCl3 MFC set to  0.000000
3/9/2011	10:44:28 PM	PHl3 MFC set to  0.000000
3/9/2011	10:44:28 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:44:28 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:44:28 PM	Tube furnace set to 0
3/9/2011	10:45:28 PM	H2 valve closed
3/9/2011	10:45:28 PM	BCl3 valve closed
3/9/2011	10:45:28 PM	PH3 valve closed
3/9/2011	10:45:28 PM	SiCl4 pre valve closed
3/9/2011	10:45:28 PM	SiCl4 post valve closed
3/9/2011	10:45:28 PM	Bubbler valve closed
3/9/2011	10:45:28 PM	Helium valve opened
3/9/2011	10:45:28 PM	Main Vac valve opened
3/9/2011	10:45:28 PM	Bypass valve opened
3/9/2011	10:45:28 PM	Helium MFC set to  100.000000
3/9/2011	10:45:28 PM	H2 MFC set to  0.000000
3/9/2011	10:45:28 PM	BCl3 MFC set to  0.000000
3/9/2011	10:45:28 PM	PHl3 MFC set to  0.000000
3/9/2011	10:45:28 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:45:28 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:45:28 PM	Tube furnace set to 0
3/9/2011	10:46:28 PM	Helium valve closed
3/9/2011	10:46:28 PM	H2 valve closed
3/9/2011	10:46:28 PM	BCl3 valve closed
3/9/2011	10:46:28 PM	PH3 valve closed
3/9/2011	10:46:28 PM	SiCl4 pre valve closed
3/9/2011	10:46:28 PM	SiCl4 post valve closed
3/9/2011	10:46:28 PM	Bubbler valve closed
3/9/2011	10:46:28 PM	Main Vac valve opened
3/9/2011	10:46:28 PM	Bypass valve opened
3/9/2011	10:46:28 PM	Helium MFC set to  0.000000
3/9/2011	10:46:28 PM	H2 MFC set to  0.000000
3/9/2011	10:46:28 PM	BCl3 MFC set to  0.000000
3/9/2011	10:46:28 PM	PHl3 MFC set to  0.000000
3/9/2011	10:46:28 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:46:28 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:46:29 PM	Tube furnace set to 0
3/9/2011	10:47:29 PM	H2 valve closed
3/9/2011	10:47:29 PM	BCl3 valve closed
3/9/2011	10:47:29 PM	PH3 valve closed
3/9/2011	10:47:29 PM	SiCl4 pre valve closed
3/9/2011	10:47:29 PM	SiCl4 post valve closed
3/9/2011	10:47:29 PM	Bubbler valve closed
3/9/2011	10:47:29 PM	Helium valve opened
3/9/2011	10:47:29 PM	Main Vac valve opened
3/9/2011	10:47:29 PM	Bypass valve opened
3/9/2011	10:47:29 PM	Helium MFC set to  100.000000
3/9/2011	10:47:29 PM	H2 MFC set to  0.000000
3/9/2011	10:47:29 PM	BCl3 MFC set to  0.000000
3/9/2011	10:47:29 PM	PHl3 MFC set to  0.000000
3/9/2011	10:47:29 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:47:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:47:29 PM	Tube furnace set to 0
3/9/2011	10:48:29 PM	Helium valve closed
3/9/2011	10:48:29 PM	H2 valve closed
3/9/2011	10:48:29 PM	BCl3 valve closed
3/9/2011	10:48:29 PM	PH3 valve closed
3/9/2011	10:48:29 PM	SiCl4 pre valve closed
3/9/2011	10:48:29 PM	SiCl4 post valve closed
3/9/2011	10:48:29 PM	Bubbler valve closed
3/9/2011	10:48:29 PM	Main Vac valve opened
3/9/2011	10:48:29 PM	Bypass valve opened
3/9/2011	10:48:29 PM	Helium MFC set to  0.000000
3/9/2011	10:48:29 PM	H2 MFC set to  0.000000
3/9/2011	10:48:29 PM	BCl3 MFC set to  0.000000
3/9/2011	10:48:29 PM	PHl3 MFC set to  0.000000
3/9/2011	10:48:29 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:48:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:48:29 PM	Tube furnace set to 0
3/9/2011	10:49:29 PM	H2 valve closed
3/9/2011	10:49:29 PM	BCl3 valve closed
3/9/2011	10:49:29 PM	PH3 valve closed
3/9/2011	10:49:29 PM	SiCl4 pre valve closed
3/9/2011	10:49:29 PM	SiCl4 post valve closed
3/9/2011	10:49:29 PM	Bubbler valve closed
3/9/2011	10:49:29 PM	Helium valve opened
3/9/2011	10:49:29 PM	Main Vac valve opened
3/9/2011	10:49:29 PM	Bypass valve opened
3/9/2011	10:49:29 PM	Helium MFC set to  100.000000
3/9/2011	10:49:29 PM	H2 MFC set to  0.000000
3/9/2011	10:49:29 PM	BCl3 MFC set to  0.000000
3/9/2011	10:49:29 PM	PHl3 MFC set to  0.000000
3/9/2011	10:49:29 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:49:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:49:29 PM	Tube furnace set to 0
3/9/2011	10:50:29 PM	Helium valve closed
3/9/2011	10:50:29 PM	H2 valve closed
3/9/2011	10:50:29 PM	BCl3 valve closed
3/9/2011	10:50:29 PM	PH3 valve closed
3/9/2011	10:50:29 PM	SiCl4 pre valve closed
3/9/2011	10:50:29 PM	SiCl4 post valve closed
3/9/2011	10:50:29 PM	Bubbler valve closed
3/9/2011	10:50:29 PM	Main Vac valve opened
3/9/2011	10:50:29 PM	Bypass valve opened
3/9/2011	10:50:29 PM	Helium MFC set to  0.000000
3/9/2011	10:50:29 PM	H2 MFC set to  0.000000
3/9/2011	10:50:29 PM	BCl3 MFC set to  0.000000
3/9/2011	10:50:29 PM	PHl3 MFC set to  0.000000
3/9/2011	10:50:29 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:50:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:50:29 PM	Tube furnace set to 0
3/9/2011	10:51:29 PM	H2 valve closed
3/9/2011	10:51:29 PM	BCl3 valve closed
3/9/2011	10:51:29 PM	PH3 valve closed
3/9/2011	10:51:29 PM	SiCl4 pre valve closed
3/9/2011	10:51:29 PM	SiCl4 post valve closed
3/9/2011	10:51:29 PM	Bubbler valve closed
3/9/2011	10:51:29 PM	Helium valve opened
3/9/2011	10:51:29 PM	Main Vac valve opened
3/9/2011	10:51:29 PM	Bypass valve opened
3/9/2011	10:51:29 PM	Helium MFC set to  100.000000
3/9/2011	10:51:29 PM	H2 MFC set to  0.000000
3/9/2011	10:51:29 PM	BCl3 MFC set to  0.000000
3/9/2011	10:51:29 PM	PHl3 MFC set to  0.000000
3/9/2011	10:51:29 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:51:29 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:51:30 PM	Tube furnace set to 0
3/9/2011	10:52:30 PM	Helium valve closed
3/9/2011	10:52:30 PM	H2 valve closed
3/9/2011	10:52:30 PM	BCl3 valve closed
3/9/2011	10:52:30 PM	PH3 valve closed
3/9/2011	10:52:30 PM	SiCl4 pre valve closed
3/9/2011	10:52:30 PM	SiCl4 post valve closed
3/9/2011	10:52:30 PM	Bubbler valve closed
3/9/2011	10:52:30 PM	Main Vac valve opened
3/9/2011	10:52:30 PM	Bypass valve opened
3/9/2011	10:52:30 PM	Helium MFC set to  0.000000
3/9/2011	10:52:30 PM	H2 MFC set to  0.000000
3/9/2011	10:52:30 PM	BCl3 MFC set to  0.000000
3/9/2011	10:52:30 PM	PHl3 MFC set to  0.000000
3/9/2011	10:52:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:52:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:52:30 PM	Tube furnace set to 0
3/9/2011	10:53:30 PM	H2 valve closed
3/9/2011	10:53:30 PM	BCl3 valve closed
3/9/2011	10:53:30 PM	PH3 valve closed
3/9/2011	10:53:30 PM	SiCl4 pre valve closed
3/9/2011	10:53:30 PM	SiCl4 post valve closed
3/9/2011	10:53:30 PM	Bubbler valve closed
3/9/2011	10:53:30 PM	Helium valve opened
3/9/2011	10:53:30 PM	Main Vac valve opened
3/9/2011	10:53:30 PM	Bypass valve opened
3/9/2011	10:53:30 PM	Helium MFC set to  100.000000
3/9/2011	10:53:30 PM	H2 MFC set to  0.000000
3/9/2011	10:53:30 PM	BCl3 MFC set to  0.000000
3/9/2011	10:53:30 PM	PHl3 MFC set to  0.000000
3/9/2011	10:53:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:53:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:53:30 PM	Tube furnace set to 0
3/9/2011	10:54:30 PM	Helium valve closed
3/9/2011	10:54:30 PM	H2 valve closed
3/9/2011	10:54:30 PM	BCl3 valve closed
3/9/2011	10:54:30 PM	PH3 valve closed
3/9/2011	10:54:30 PM	SiCl4 pre valve closed
3/9/2011	10:54:30 PM	SiCl4 post valve closed
3/9/2011	10:54:30 PM	Bubbler valve closed
3/9/2011	10:54:30 PM	Main Vac valve opened
3/9/2011	10:54:30 PM	Bypass valve opened
3/9/2011	10:54:30 PM	Helium MFC set to  0.000000
3/9/2011	10:54:30 PM	H2 MFC set to  0.000000
3/9/2011	10:54:30 PM	BCl3 MFC set to  0.000000
3/9/2011	10:54:30 PM	PHl3 MFC set to  0.000000
3/9/2011	10:54:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:54:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:54:30 PM	Tube furnace set to 0
3/9/2011	10:55:30 PM	H2 valve closed
3/9/2011	10:55:30 PM	BCl3 valve closed
3/9/2011	10:55:30 PM	PH3 valve closed
3/9/2011	10:55:30 PM	SiCl4 pre valve closed
3/9/2011	10:55:30 PM	SiCl4 post valve closed
3/9/2011	10:55:30 PM	Bubbler valve closed
3/9/2011	10:55:30 PM	Helium valve opened
3/9/2011	10:55:30 PM	Main Vac valve opened
3/9/2011	10:55:30 PM	Bypass valve opened
3/9/2011	10:55:30 PM	Helium MFC set to  100.000000
3/9/2011	10:55:30 PM	H2 MFC set to  0.000000
3/9/2011	10:55:30 PM	BCl3 MFC set to  0.000000
3/9/2011	10:55:30 PM	PHl3 MFC set to  0.000000
3/9/2011	10:55:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:55:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:55:30 PM	Tube furnace set to 0
3/9/2011	10:56:30 PM	Helium valve closed
3/9/2011	10:56:30 PM	H2 valve closed
3/9/2011	10:56:30 PM	BCl3 valve closed
3/9/2011	10:56:30 PM	PH3 valve closed
3/9/2011	10:56:30 PM	SiCl4 pre valve closed
3/9/2011	10:56:30 PM	SiCl4 post valve closed
3/9/2011	10:56:30 PM	Bubbler valve closed
3/9/2011	10:56:30 PM	Main Vac valve opened
3/9/2011	10:56:30 PM	Bypass valve opened
3/9/2011	10:56:30 PM	Helium MFC set to  0.000000
3/9/2011	10:56:30 PM	H2 MFC set to  0.000000
3/9/2011	10:56:30 PM	BCl3 MFC set to  0.000000
3/9/2011	10:56:30 PM	PHl3 MFC set to  0.000000
3/9/2011	10:56:30 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:56:30 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:56:31 PM	Tube furnace set to 0
3/9/2011	10:57:31 PM	H2 valve closed
3/9/2011	10:57:31 PM	BCl3 valve closed
3/9/2011	10:57:31 PM	PH3 valve closed
3/9/2011	10:57:31 PM	SiCl4 pre valve closed
3/9/2011	10:57:31 PM	SiCl4 post valve closed
3/9/2011	10:57:31 PM	Bubbler valve closed
3/9/2011	10:57:31 PM	Helium valve opened
3/9/2011	10:57:31 PM	Main Vac valve opened
3/9/2011	10:57:31 PM	Bypass valve opened
3/9/2011	10:57:31 PM	Helium MFC set to  100.000000
3/9/2011	10:57:31 PM	H2 MFC set to  0.000000
3/9/2011	10:57:31 PM	BCl3 MFC set to  0.000000
3/9/2011	10:57:31 PM	PHl3 MFC set to  0.000000
3/9/2011	10:57:31 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:57:31 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:57:31 PM	Tube furnace set to 0
3/9/2011	10:58:31 PM	Helium valve closed
3/9/2011	10:58:31 PM	H2 valve closed
3/9/2011	10:58:31 PM	BCl3 valve closed
3/9/2011	10:58:31 PM	PH3 valve closed
3/9/2011	10:58:31 PM	SiCl4 pre valve closed
3/9/2011	10:58:31 PM	SiCl4 post valve closed
3/9/2011	10:58:31 PM	Bubbler valve closed
3/9/2011	10:58:31 PM	Main Vac valve opened
3/9/2011	10:58:31 PM	Bypass valve opened
3/9/2011	10:58:31 PM	Helium MFC set to  0.000000
3/9/2011	10:58:31 PM	H2 MFC set to  0.000000
3/9/2011	10:58:31 PM	BCl3 MFC set to  0.000000
3/9/2011	10:58:31 PM	PHl3 MFC set to  0.000000
3/9/2011	10:58:31 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:58:31 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:58:31 PM	Tube furnace set to 0
3/9/2011	10:59:31 PM	H2 valve closed
3/9/2011	10:59:31 PM	BCl3 valve closed
3/9/2011	10:59:31 PM	PH3 valve closed
3/9/2011	10:59:31 PM	SiCl4 pre valve closed
3/9/2011	10:59:31 PM	SiCl4 post valve closed
3/9/2011	10:59:31 PM	Bubbler valve closed
3/9/2011	10:59:31 PM	Helium valve opened
3/9/2011	10:59:31 PM	Main Vac valve opened
3/9/2011	10:59:31 PM	Bypass valve opened
3/9/2011	10:59:31 PM	Helium MFC set to  100.000000
3/9/2011	10:59:31 PM	H2 MFC set to  0.000000
3/9/2011	10:59:31 PM	BCl3 MFC set to  0.000000
3/9/2011	10:59:31 PM	PHl3 MFC set to  0.000000
3/9/2011	10:59:31 PM	SiCl4 MFC set to  0.000000
3/9/2011	10:59:31 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	10:59:31 PM	Tube furnace set to 0
3/9/2011	11:00:31 PM	Helium valve closed
3/9/2011	11:00:31 PM	H2 valve closed
3/9/2011	11:00:31 PM	BCl3 valve closed
3/9/2011	11:00:31 PM	PH3 valve closed
3/9/2011	11:00:31 PM	SiCl4 pre valve closed
3/9/2011	11:00:31 PM	SiCl4 post valve closed
3/9/2011	11:00:31 PM	Bubbler valve closed
3/9/2011	11:00:31 PM	Main Vac valve opened
3/9/2011	11:00:31 PM	Bypass valve opened
3/9/2011	11:00:31 PM	Helium MFC set to  0.000000
3/9/2011	11:00:31 PM	H2 MFC set to  0.000000
3/9/2011	11:00:31 PM	BCl3 MFC set to  0.000000
3/9/2011	11:00:31 PM	PHl3 MFC set to  0.000000
3/9/2011	11:00:31 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:00:31 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:00:31 PM	Tube furnace set to 0
3/9/2011	11:00:32 PM	Run finished at 11:00 PM
3/9/2011	11:00:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	11:09:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	11:09:45 PM	Recipe started at 11:09 PM
3/9/2011	11:09:45 PM	Helium valve closed
3/9/2011	11:09:45 PM	H2 valve closed
3/9/2011	11:09:45 PM	BCl3 valve closed
3/9/2011	11:09:45 PM	PH3 valve closed
3/9/2011	11:09:45 PM	SiCl4 pre valve closed
3/9/2011	11:09:45 PM	SiCl4 post valve closed
3/9/2011	11:09:45 PM	Main Vac valve closed
3/9/2011	11:09:45 PM	Bubbler valve closed
3/9/2011	11:09:45 PM	Bypass valve opened
3/9/2011	11:09:45 PM	Helium MFC set to  0.000000
3/9/2011	11:09:45 PM	H2 MFC set to  0.000000
3/9/2011	11:09:45 PM	BCl3 MFC set to  0.000000
3/9/2011	11:09:45 PM	PHl3 MFC set to  0.000000
3/9/2011	11:09:45 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:09:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:09:45 PM	Tube furnace set to 0
3/9/2011	11:09:45 PM	Helium valve closed
3/9/2011	11:09:45 PM	H2 valve closed
3/9/2011	11:09:45 PM	BCl3 valve closed
3/9/2011	11:09:45 PM	PH3 valve closed
3/9/2011	11:09:45 PM	SiCl4 pre valve closed
3/9/2011	11:09:45 PM	SiCl4 post valve closed
3/9/2011	11:09:45 PM	Bubbler valve closed
3/9/2011	11:09:45 PM	Main Vac valve opened
3/9/2011	11:09:45 PM	Bypass valve opened
3/9/2011	11:09:45 PM	Helium MFC set to  0.000000
3/9/2011	11:09:45 PM	H2 MFC set to  0.000000
3/9/2011	11:09:45 PM	BCl3 MFC set to  0.000000
3/9/2011	11:09:45 PM	PHl3 MFC set to  0.000000
3/9/2011	11:09:45 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:09:45 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:09:46 PM	Tube furnace set to 0
3/9/2011	11:10:46 PM	H2 valve closed
3/9/2011	11:10:46 PM	BCl3 valve closed
3/9/2011	11:10:46 PM	PH3 valve closed
3/9/2011	11:10:46 PM	SiCl4 pre valve closed
3/9/2011	11:10:46 PM	SiCl4 post valve closed
3/9/2011	11:10:46 PM	Bubbler valve closed
3/9/2011	11:10:46 PM	Helium valve opened
3/9/2011	11:10:46 PM	Main Vac valve opened
3/9/2011	11:10:46 PM	Bypass valve opened
3/9/2011	11:10:46 PM	Helium MFC set to  100.000000
3/9/2011	11:10:46 PM	H2 MFC set to  0.000000
3/9/2011	11:10:46 PM	BCl3 MFC set to  0.000000
3/9/2011	11:10:46 PM	PHl3 MFC set to  0.000000
3/9/2011	11:10:46 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:10:46 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:10:46 PM	Tube furnace set to 0
3/9/2011	11:11:46 PM	Helium valve closed
3/9/2011	11:11:46 PM	H2 valve closed
3/9/2011	11:11:46 PM	BCl3 valve closed
3/9/2011	11:11:46 PM	PH3 valve closed
3/9/2011	11:11:46 PM	SiCl4 pre valve closed
3/9/2011	11:11:46 PM	SiCl4 post valve closed
3/9/2011	11:11:46 PM	Bubbler valve closed
3/9/2011	11:11:46 PM	Main Vac valve opened
3/9/2011	11:11:46 PM	Bypass valve opened
3/9/2011	11:11:46 PM	Helium MFC set to  0.000000
3/9/2011	11:11:46 PM	H2 MFC set to  0.000000
3/9/2011	11:11:46 PM	BCl3 MFC set to  0.000000
3/9/2011	11:11:46 PM	PHl3 MFC set to  0.000000
3/9/2011	11:11:46 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:11:46 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:11:46 PM	Tube furnace set to 0
3/9/2011	11:12:01 PM	Run aborted at 11:12 PM
3/9/2011	11:12:01 PM	Helium valve closed
3/9/2011	11:12:01 PM	H2 valve closed
3/9/2011	11:12:01 PM	BCl3 valve closed
3/9/2011	11:12:01 PM	PH3 valve closed
3/9/2011	11:12:01 PM	SiCl4 pre valve closed
3/9/2011	11:12:01 PM	SiCl4 post valve closed
3/9/2011	11:12:01 PM	Bypass valve closed
3/9/2011	11:12:01 PM	Main Vac valve closed
3/9/2011	11:12:01 PM	Bubbler valve closed
3/9/2011	11:12:01 PM	Helium MFC set to  0.000000
3/9/2011	11:12:01 PM	H2 MFC set to  0.000000
3/9/2011	11:12:02 PM	BCl3 MFC set to  0.000000
3/9/2011	11:12:02 PM	PHl3 MFC set to  0.000000
3/9/2011	11:12:02 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:12:02 PM	Tube furnace set to 0
3/9/2011	11:12:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/9/2011	11:12:04 PM	Bypass valve opened
3/9/2011	11:12:05 PM	Main Vac valve opened
3/9/2011	11:12:40 PM	Recipe started at 11:12 PM
3/9/2011	11:12:40 PM	Helium valve closed
3/9/2011	11:12:40 PM	BCl3 valve closed
3/9/2011	11:12:40 PM	PH3 valve closed
3/9/2011	11:12:40 PM	SiCl4 pre valve closed
3/9/2011	11:12:40 PM	SiCl4 post valve closed
3/9/2011	11:12:40 PM	Main Vac valve closed
3/9/2011	11:12:40 PM	Bypass valve closed
3/9/2011	11:12:40 PM	Bubbler valve closed
3/9/2011	11:12:40 PM	H2 valve opened
3/9/2011	11:12:40 PM	Helium MFC set to  0.000000
3/9/2011	11:12:40 PM	H2 MFC set to  500.000000
3/9/2011	11:12:40 PM	BCl3 MFC set to  0.000000
3/9/2011	11:12:40 PM	PHl3 MFC set to  0.000000
3/9/2011	11:12:40 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:12:40 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:12:40 PM	Tube furnace set to 0
3/9/2011	11:13:59 PM	Helium valve closed
3/9/2011	11:13:59 PM	BCl3 valve closed
3/9/2011	11:13:59 PM	PH3 valve closed
3/9/2011	11:13:59 PM	SiCl4 pre valve closed
3/9/2011	11:13:59 PM	SiCl4 post valve closed
3/9/2011	11:13:59 PM	Main Vac valve closed
3/9/2011	11:13:59 PM	Bypass valve closed
3/9/2011	11:13:59 PM	H2 valve opened
3/9/2011	11:13:59 PM	Bubbler valve opened
3/9/2011	11:13:59 PM	Helium MFC set to  0.000000
3/9/2011	11:13:59 PM	H2 MFC set to  500.000000
3/9/2011	11:13:59 PM	BCl3 MFC set to  0.000000
3/9/2011	11:13:59 PM	PHl3 MFC set to  0.000000
3/9/2011	11:13:59 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:13:59 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:13:59 PM	Tube furnace set to 1000
3/9/2011	11:33:59 PM	Helium valve closed
3/9/2011	11:33:59 PM	PH3 valve closed
3/9/2011	11:33:59 PM	Main Vac valve closed
3/9/2011	11:33:59 PM	Bypass valve closed
3/9/2011	11:33:59 PM	H2 valve opened
3/9/2011	11:33:59 PM	BCl3 valve opened
3/9/2011	11:33:59 PM	SiCl4 pre valve opened
3/9/2011	11:33:59 PM	SiCl4 post valve opened
3/9/2011	11:33:59 PM	Bubbler valve opened
3/9/2011	11:33:59 PM	Helium MFC set to  0.000000
3/9/2011	11:33:59 PM	H2 MFC set to  500.000000
3/9/2011	11:33:59 PM	BCl3 MFC set to  3.000000
3/9/2011	11:33:59 PM	PHl3 MFC set to  0.000000
3/9/2011	11:33:59 PM	SiCl4 MFC set to  50.000000
3/9/2011	11:33:59 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:33:59 PM	Tube furnace set to 1000
3/9/2011	11:53:59 PM	H2 valve closed
3/9/2011	11:53:59 PM	BCl3 valve closed
3/9/2011	11:53:59 PM	PH3 valve closed
3/9/2011	11:53:59 PM	SiCl4 pre valve closed
3/9/2011	11:53:59 PM	SiCl4 post valve closed
3/9/2011	11:53:59 PM	Main Vac valve closed
3/9/2011	11:53:59 PM	Bypass valve closed
3/9/2011	11:53:59 PM	Helium valve opened
3/9/2011	11:53:59 PM	Bubbler valve opened
3/9/2011	11:53:59 PM	Helium MFC set to  500.000000
3/9/2011	11:53:59 PM	H2 MFC set to  0.000000
3/9/2011	11:53:59 PM	BCl3 MFC set to  0.000000
3/9/2011	11:53:59 PM	PHl3 MFC set to  0.000000
3/9/2011	11:53:59 PM	SiCl4 MFC set to  0.000000
3/9/2011	11:53:59 PM	Bypass solenoid MFC set to  0.000000
3/9/2011	11:53:59 PM	Tube furnace set to 0
